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Method of providing a metal layer on a substrate

Assignee: US Philips Corp
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Filing: 1983-12-05
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Granted: 1985-06-04
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Expires: 2003-12-05
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Abstract

Abstract A method of providing a metal layer on a substrate having an ultra-smooth or microprofiled surface, in which the surface structure is reproduced in the metal layer. On the substrate surface which is hydrophilic or is made hydrophilic, preferably a monomolecular layer of alkoxysilylalkylthiol, an alkoxysilylalkylamine or a chlorosilylalkylthiol is provided as a bonding intermediary in a layer which is at most 15 molecules thick by contact with an atmosphere in which said substance is present in a vapor form. The metal layer is vapor-deposited thereon in a thickness of 50-300 nm.

Inventors

  • 👤 Johannes J. Ponjee
  • 👤 Johan W. A. Nelissen
  • 👤 Christiaan J. A. Verwijlen

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 04:46
CPC Classifications
G; G11; G11B; G11B23/00; G11B23/0057; C; C03; C03C; C03C17/00; C03C17/34; C03C17/36; C03C17/38; C23; C23C; C23C14/00; C23C14/02; C23C14/024

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 96 words
A method of providing a metal layer on a hydrophilic surface of a substrate by means of a bonding intermediary selected from the group consisting of alkoxysilylalkylthiols, alkoxysilylalkylamines and chlorosilylalkylthiols comprising exposing said surface of said substrate with an atmosphere in which said bonding intermediary is present in vapor form until a monomer layer of said intermediary of a thickness of at most 15 molecules is formed on said hydrophilic surface and providing, by vapor deposition a metal layer of a thickness of 50-300 nm on the exposed surface of the resultant layer of said intermediary.
Claim 2
Independent Claim 96 words
A method of providing a metal layer on a hydrophilic surface of a substrate by means of a bonding intermediary selected from the group consisting of alkoxysilylalkylthiols, alkoxysilylalkylamines and chlorosilylalkylthiols comprising exposing said surface of said substrate with an atmosphere in which said bonding intermediary is present in vapor form until a monomer layer of said intermediary of a thickness of at most 15 molecules is formed on said hydrophilic surface and providing, by vapor deposition a metal layer of a thickness of 50-300 nm on the exposed surface of the resultant layer of said intermediary.
Claim 3
Dependent Claim 19 words
A method as claimed in claim 1 characterized in that said bonding intermediary is provided in a monomolecular layer.
Claim 4
Dependent Claim 32 words
A method of claim 1 characterized in that prior to exposure to the bonding intermediary, the substrate surface is rendered hydrophilic by being exposed to a glow discharge in an oxidizing atmosphere.
Claim 5
Dependent Claim 32 words
A method of claim 2 characterized in that prior to exposure to the bonding intermediary, the substrate surface is rendered hydrophilic by being exposed to a glow discharge in an oxidizing atmosphere.

References Cited (Backward Citations)

GB2070070A Cited
US4315970A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-06-03 1988-12-03 1989-06-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-06-03 1992-12-03 1993-06-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-06-03 1996-12-03 1997-06-04 $7700.00 Window Closed / Lapsed

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