Optical objective adjusting apparatus

Claim 2

An optical objective device to be moved linearly, including means for moving the device to a particular location over a prescribed length of travel, said means comprising: a fixed support relative to which linear movement of the device is desired; means including a piezoelectric motor fixed with respect to said support for initiating an accurate incremental linear movement; a first flexure fulcrum lever means having a first portion juxtaposed to and in contact with said piezomotor for receiving such incremental movement, said first lever means magnifying said linear movement; a second flexure fulcrum lever means having a first end in contact with a second portion of said first flexure fulcrum lever means for receiving said magnified linear movement, said second lever means further magnifying said linear movement; means for attaching said device to a second end of said second fulcrum lever means; and means for supporting said device linearly with respect to said fixed support.

Claim 3

The invention of claim 1 in which said first fulcrum lever means extends from said piezoelectric motor in a first direction and said second fulcrum lever means is folded-back in spaced relation from said first fulcrum lever means and extends toward said motor.

Claim 4

The invention of claim 2 in which said motor is positioned on a linear axis, said second portion of said first fulcrum lever means extending above said first portion of said fulcrum lever means and the axis of said motor and wherein said means for attaching said device is positioned substantially perpendicular to said linear axis and is displaced from an end of said motor in a direction opposite to said first direction.

Claim 5

The invention of claims 1, 2 or 3 in which said device is a microscope objective.

Claim 6

The invention of claims 1, 2 or 3 wherein said device comprises multiple objectives, each objective being positioned for independent movement relative to said fixed support and attached to separate means for moving as recited.

Claim 7

The invention of claims 1, 2 or 3 wherein said device is one of a multiplicity of optical objectives positioned in an X-ray, ultraviolet or ion beam semiconductor lithography apparatus for aligning semiconductor wafers and wafer masks.

Claim 8

The invention of claim 1 in which said first flexure fulcrum lever means comprises a C-shaped block member having a first leg fixedly attached relative to said fixed support, a second leg forming said first portion of said first flexure fulcrum lever means and having a cantilevered end amplifying said incremental linear movement and a narrowed medial portion forming an integral flexible link between said first and second legs.

Claim 9

The invention of claim 7 including pin means adjustably attached to and extending from said cantilevered end of said second leg for moving said second flexure fulcrum means.

Claim 10

The invention of claim 7 in which said second flexure fulcrum lever means comprises a 90° L-shaped member having a bottom leg extending vertically downwardly and journalled to receive a flexure supported on said fixed support, and a top leg extending substantially horizontal and in a reverse direction from said second leg of said first fulcrum lever means.

Claim 11

The invention of claim 1 in which said means for attaching includes additional flexure fulcrum lever means for further magnification of lever movement.

Claim 12

An optical objective to be moved linearly including means for moving the objective to a particular location over a prescribed length of travel, said means comprising: a fixed support relative to which linear movement of the objective is desired; a piezoelectric motor operably connected to said support and a linearly incrementally movable piezo ram extending from said motor; a first lever positioned in a first plane and having a first end in contact with said piezo ram; a first flexure means connected to said first end of said lever for allowing to and fro flexure of said lever upon linear movement of said ram; a second lever extending in a second plane displaced from the plane of said first lever; means adjacent a second end of said first lever to contact a point on said second lever inward of a first end of said second lever; a second flexure means having a first portion connected to said first end of said second lever outward of said point and a second portion fixed with respect to said support; and means at a second end of said second lever for flexibly connecting said second end of said second lever to said objective.

Claim 13

An optical objective to be moved linearly including means for moving the objective to a particular location over a prescribed length of travel, said means comprising: a fixed support relative to which linear movement of the objective is desired; a piezoelectric motor operably connected to said support and a linearly incrementally movable piezo ram extending from said motor; a first lever positioned in a first plane and having a first end in contact with said piezo ram; a first flexure means connected to said first end of said lever for allowing to and fro flexure of said lever upon linear movement of said ram; a second lever extending in a second plane displaced from the plane of said first lever; means adjacent a second end of said first lever to contact a point on said second lever inward of a first end of said second lever; a second flexure means having a first portion connected to said first end of said second lever outward of said point and a second portion fixed with respect to said support; and means at a second end of said second lever for flexibly connecting said second end of said second lever to said objective.

Claim 14

The invention of claim 11 in which said first lever and first flexure means comprises a C-shaped block member having a first top leg attached to said fixed support, a narrowed central portion forming an integral flexible ink and a second bottom leg having a cantilevered end opposite said link, amplifying movement of said ram.

Claim 15

The invention of claim 11 in which said second lever comprises a 90° L-shaped member having its bottom leg extending downwardly and journalled for receiving a central portion of said second flexure means and a top leg extending substantially horizontal and in a reverse direction from said first lever further amplifying movement of said ram.

Claim 16

The invention of claim 11 including multiple objectives, each being movable independently with respect to said fixed support and each attached to a separate one of the recited means for moving.