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Polysilicon/silicon junction field effect transistors and integrated circuits (POSFET)

Assignee: Individual
•
Filing: 1982-02-19
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Granted: 1985-10-08
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Expires: 2002-02-19
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Abstract

Abstract A junction field effect transistor is fabricated in crystalline silicon by using oppositely doped polysilicon as the gate (POSFET). The depletion region of the pn (or np) junction formed at the polysilicon/silicon interface is used as the gate electrode to modulate the current path through the silicon channel from source to drain, the source and drain contacts may either be conventional metal or polysilicon heavily doped of the same conductivity type as the single crystal silicon substrate.

Inventors

  • 👤 Bobby L. Buchanan

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 16:29
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/602; H10D30/00; H10D30/80; H10D30/83; H10D62/00; H10D62/10; H10D62/17; H10D62/343

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 160 words
A junction field effect transistor for use with large scale integrated circuits having at least one set of source, drain and gate components comprising: a bounding substrate; an overlay substrate having a given conductivity type overlying the bounding substrate; a planar layer of insulative material overlying and contacting the overlay substrate and having formed therein apertures for receiving source, drain and gate material; polysilicon gate material of an opposite conductivity type than said overlay substrate filling said gate aperture and overlying the overlay substrate forming a p-n junction at the interface; conductive material filling the source and drain apertures; and electrical contacts for connecting the source, drain and gate components to an electrical circuit, wherein the insulative material is polysilicon, the gate component is formed of polysilicon doped in the conductivity type opposite that of the overlay substrate material and source and drain components are formed of polysilicon doped in the conductivity type similar to that of the overlay substrate.
Claim 2
Dependent Claim 160 words
A junction field effect transistor for use with large scale integrated circuits having at least one set of source, drain and gate components comprising: a bounding substrate; an overlay substrate having a given conductivity type overlying the bounding substrate; a planar layer of insulative material overlying and contacting the overlay substrate and having formed therein apertures for receiving source, drain and gate material; polysilicon gate material of an opposite conductivity type than said overlay substrate filling said gate aperture and overlying the overlay substrate forming a p-n junction at the interface; conductive material filling the source and drain apertures; and electrical contacts for connecting the source, drain and gate components to an electrical circuit, wherein the insulative material is polysilicon, the gate component is formed of polysilicon doped in the conductivity type opposite that of the overlay substrate material and source and drain components are formed of polysilicon doped in the conductivity type similar to that of the overlay substrate.
Claim 3
Dependent Claim 153 words
A junction field effect transistor for use with large scale integrated circuits having at least one set of source, drain and gate components comprising: a bounding substrate; an overlay substrate having a given conductivity type overlying the bounding substrate; a planar layer of insulative material overlying and contacting the overlay substrate and having formed therein apertures for receiving source, drain and gate material; polysilicon gate material of an opposite conductivity type than said overlay substrate filling said gate aperture and overlying the overlay substrate forming a p-n junction at the interface; conductive material filling the source and drain apertures; and electrical contacts for connecting the source, drain and gate components to an electrical circuit, and wherein said bounding substrate is n type silicon, said overlay substrate is p type silicon, said gate material is heavily doped n+ polysilicon and said conductive material is aluminum, and said layer of insulative material is undoped polysilicon.
Claim 4
Dependent Claim 153 words
A junction field effect transistor for use with large scale integrated circuits having at least one set of source, drain and gate components comprising: a bounding substrate; an overlay substrate having a given conductivity type overlying the bounding substrate; a planar layer of insulative material overlying and contacting the overlay substrate and having formed therein apertures for receiving source, drain and gate material; polysilicon gate material of an opposite conductivity type than said overlay substrate filling said gate aperture and overlying the overlay substrate forming a p-n junction at the interface; conductive material filling the source and drain apertures; and electrical contacts for connecting the source, drain and gate components to an electrical circuit, and wherein said bounding substrate is n type silicon, said overlay substrate is p type silicon, said gate material is heavily doped n+ polysilicon and said conductive material is aluminum, and said layer of insulative material is undoped polysilicon.
Claim 5
Dependent Claim 27 words
A junction field effect transistor as defined in claim 1 wherein said gate material is n type polysilicon doped to approximately 10 19 donors per cubic centimeter.
Claim 6
Dependent Claim 19 words
A junction field effect transistor as defined in claim 1 wherein said overlay substrate is p type crystalline silicon.
Claim 7
Dependent Claim 16 words
A junction field effect transistor as defined in claim 1 wherein said bounding substrate is sapphire.

References Cited (Backward Citations)

US3847687A Cited
US4176372A Cited
US4124933A Cited
US4072974A Cited
US4072545A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-10-07 1989-04-08 1989-10-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-10-07 1993-04-08 1993-10-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-10-07 1997-04-08 1997-10-08 $7700.00 Window Closed / Lapsed

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