Patent US3553649A successfully refreshed from Google Patents.
Patent US4547455A successfully refreshed from Google Patents.
US4547455A
Expired / Lapsed
US
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Process of forming polyimide pattern and developer therefor
Assignee: Toray Industries Inc
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Filing: 1983-06-17
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Granted: 1985-10-15
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Expires: 2003-06-17
Abstract
Abstract A process of forming a polyimide pattern on a base plate, which comprises exposing imagewise a layer of photosensitive polyimide precursor on the base plate, removing unexposed areas by developing and curing the resultant pattern of the polyimide precursor, characterized by employing a developer containing (A) at least one solvent selected from the group consisting of N,N-dimethylacetamide, N-methyl-2-pyrrolidone, N,N-dimethylformamide, dimethylsulfoxide and γ-butyrolactone, (B) methanol and (C) at least one solvent represented by the formula; R.sup.1 OCH.sub.2 CH.sub.2 OCH.sub.2 CH.sub.2 OR.sup.2 wherein R 1 is a hydrogen atom or R 2 and R 2 is an alkyl group having 1 to 4 carbon atoms.
Inventors
- 👤 Hiroo Hiramoto
- 👤 Masuichi Eguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:40
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/325
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
153 words
A process of forming a polyimide pattern on a base plate, which comprises: (1) providing to the base plate a layer of photosensitive polyimide precursor comprising a polyimide precursor and a compound having a photosensitive group and an amino group, (2) exposing the layer imagewise to actinic radiation through a photomask to form an exposed image pattern of polyimide precursor in the layer, (3) removing unexposed areas of the layer with a developer containing; (A) at least one solvent selected from the group consisting of N, N-dimethylacetamide, N-methyl-2-pyrrolidone, N, N-dimethylformamide, dimethylsulfoxide and γ-butyrolactone, (B) methanol, and (C) at least one solvent represented by the formula: R.sup.1 OCH.sub.2 CH.sub.2 OCH.sub.2 CH.sub.2 OR.sup.2 wherein R 1 is a hydrogen atom or the same as R 2 and R 2 is an alkyl group having 1 to 4 carbon atoms, and (4) curing the exposed image pattern of the polyimide precursor in the layer by heating.
Claim 2
Dependent Claim
153 words
A process of forming a polyimide pattern on a base plate, which comprises: (1) providing to the base plate a layer of photosensitive polyimide precursor comprising a polyimide precursor and a compound having a photosensitive group and an amino group, (2) exposing the layer imagewise to actinic radiation through a photomask to form an exposed image pattern of polyimide precursor in the layer, (3) removing unexposed areas of the layer with a developer containing; (A) at least one solvent selected from the group consisting of N, N-dimethylacetamide, N-methyl-2-pyrrolidone, N, N-dimethylformamide, dimethylsulfoxide and γ-butyrolactone, (B) methanol, and (C) at least one solvent represented by the formula: R.sup.1 OCH.sub.2 CH.sub.2 OCH.sub.2 CH.sub.2 OR.sup.2 wherein R 1 is a hydrogen atom or the same as R 2 and R 2 is an alkyl group having 1 to 4 carbon atoms, and (4) curing the exposed image pattern of the polyimide precursor in the layer by heating.
Claim 3
Dependent Claim
32 words
The process of claim 1, wherein the developer contains 80 to 10% by weight of the total amount of components (A) and (B) and 20 to 90% by weight of component (C).
Claim 4
Dependent Claim
32 words
The process of claim 1, wherein the developer contains 80 to 40% by weight of the total amount of components (A) and (B) and 20 to 60% by weight of component (C).
Claim 5
Dependent Claim
44 words
The process of claim 1, wherein the component (C) of the developer is selected from the group consisting of diethylene glycol monomethyl ether, diethylene glycol dimethyl ether, diethylene glycol monoethyl ether, diethylene glycol diethyl ether, diethylene glycol monobutyl ether and diethylene glycol dibutyl ether.
Claim 6
Dependent Claim
28 words
The process of claim 1, wherein the weight ratio of the component (A) to the component (B) in the developer is in the range of 4/6 to 9/1.
Claim 7
Dependent Claim
16 words
The process of claim 1, wherein the solvent of component (C) is diethylene glycol monomethyl ether.
Claim 8
Dependent Claim
23 words
The process of claim 6, wherein the content of diethylene glycol monomethyl ether amounts to 50 to 80% by weight of the developer.
Claim 9
Dependent Claim
16 words
The process of claim 1, wherein the solvent of component (C) is diethylene glycol dimethyl ether.
Claim 10
Dependent Claim
23 words
The process of claim 8, wherein the content of diethylene glycol dimethyl ether amounts to 30 to 50% by weight of the developer.
Claim 11
Dependent Claim
16 words
The process of claim 1, wherein the solvent of component (C) is diethylene glycol monoethyl ether.
Claim 12
Dependent Claim
23 words
The process of claim 10, wherein the content of diethylene glycol monoethyl ether amounts to 30 to 60% by weight of the developer.
Claim 13
Dependent Claim
16 words
The process of claim 1, wherein the solvent of component (C) is diethylene glycol diethyl ether.
Claim 14
Dependent Claim
23 words
The process of claim 12, wherein the content of diethylene glycol diethyl ether amounts to 20 to 40% by weight of the developer.
Claim 15
Dependent Claim
16 words
The process of claim 1, wherein the solvent of component (C) is diethylene glycol monobutyl ether.
Claim 16
Dependent Claim
23 words
The process of claim 14, wherein the content of diethylene glycol monobutyl ether amounts to 20 to 40% by weight of the developer.
Claim 17
Dependent Claim
16 words
The process of claim 1, wherein the solvent of component (C) is diethylene glycol dibutyl ether.
Claim 18
Dependent Claim
23 words
The process of claim 16, wherein the content of diethylene glycol dibutyl ether amounts to 20 to 40% by weight of the developer.
Claim 19
Dependent Claim
13 words
The process of claim 1, wherein the solvent of component (A) is N-methyl-2-pyrrolidone.
Claim 20
Dependent Claim
14 words
The process of claim 1, wherein the solvent of component (A) is N, N-dimethylacetamide.
Claim 21
Dependent Claim
25 words
The process of claim 1, wherein the photosensitive group is a group having a carbon-carbon double bond which is dimerizable or polymerizable by actinic light.
Claim 22
Dependent Claim
17 words
The process of claim 1, wherein the photosensitive group is an azide group or a sulfonazide group.
Claim 23
Dependent Claim
39 words
The process of claim 1, wherein the compound having a photosensitive group and an amino group is at least one selected from the group consisting of allylamine, vinyl pyridine, dimethylaminoethyl methacrylate, dimethylaminoethyl methacrylate, dimethylaminoethyl acrylate, dimethylaminoethyl acrylate and diallylamine.
Claim 24
Dependent Claim
19 words
The process of claim 1, wherein the compound having a photosensitive group and an amino group is dimethylaminoethyl methacrylate.
Claim 25
Dependent Claim
19 words
The process of claim 1, wherein the compound having a photosensitive group and an amino group is diethylaminoethyl methacrylate.
Claim 26
Dependent Claim
19 words
The process of claim 1, wherein the compound having a photosensitive group and an amino group is dimethylaminoethyl acrylate.
Claim 27
Dependent Claim
19 words
The process of claim 1, wherein the compound having a photosensitive group and an amino group is diethylaminoethyl acrylate.
Claim 28
Dependent Claim
14 words
The process of claim 1, wherein the photosensitive layer contains one or more photosensitizers.
Claim 29
Dependent Claim
20 words
The process of claim 27, wherein the photosensitizer is selected from the group consisting of Michler's ketone, bis-azide and monoazide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-10-14 | 1989-04-15 | 1989-10-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-10-14 | 1993-04-15 | 1993-10-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-10-14 | 1997-04-15 | 1997-10-15 | $7700.00 | Window Closed / Lapsed |