Patent US4564428A successfully refreshed from Google Patents.
US4564428A
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US
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Ammoniated etching solution and process for its regeneration utilizing ammonium chloride addition
Assignee: Forschungszentrum Jülich
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Filing: 1984-06-26
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Granted: 1986-01-14
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Expires: 2004-06-26
Abstract
Abstract The addition of a small quantity of ammonium chloride to an ammonium sulf etching solution results in shortening the regeneration time of the spent etching solution when air or oxygen is bubbled through it to reoxidize it, and it also results in accelerating the etching rate. The extent of this improvement deteriorates with increasing chlorine ion content, disappearing when the chlorine ion content substantially exceeds 0.4% by weight of the solution and still greater chlorine ion additions are distinctly undesirable. The electrolysis of the etching solution to remove etched-away metal cathodically produces enough oxygen at the anode to prevent any substantial evolution of chlorine from the electrolytic action on the small chlorine ion content.
Inventors
- 👤 Leander Furst
- 👤 Walter Holzer
- 👤 Bertel Kastening
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 03:43
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/32; C23F1/34; C23F1/46
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
77 words
An alkaline-ammoniated etching solution containing an etching agent and an ammonium salt having an oxygen-containing anion which is not a reducing agent, said solution being capable, when spent, of being regenerated by supplying oxygen thereto and of having etched-away metal separated therefrom by circulation of at least a portion thereof through an electrolysis cell, said etchant incorporating the improvement comprising the presence therein of at least 0.05% and not more than 0.4% by weight of chlorine ion.
Claim 2
Dependent Claim
77 words
An alkaline-ammoniated etching solution containing an etching agent and an ammonium salt having an oxygen-containing anion which is not a reducing agent, said solution being capable, when spent, of being regenerated by supplying oxygen thereto and of having etched-away metal separated therefrom by circulation of at least a portion thereof through an electrolysis cell, said etchant incorporating the improvement comprising the presence therein of at least 0.05% and not more than 0.4% by weight of chlorine ion.
Claim 3
Dependent Claim
22 words
Etching solution according to claim 1, in which said ammonium salt is ammonium sulfate and said etching is an alkaline-ammoniated tetrammine salt.
Claim 4
Dependent Claim
36 words
Etching solution according to claim 2, in which said solution contains not less than 0.1% and not more than 0.3% by weight of chlorine ion and in which said tetrammine salt is a copper tetrammine salt.
Claim 5
Dependent Claim
27 words
Etching solution according to claim 1, in which said presence of chlorine ion in said solution is by virtue of ammonium chloride being dissolved in said solution.
Claim 6
Dependent Claim
93 words
Process for regenerating an etching solution containing an etching agent and an alkaline ammonium salt having an oxygen-containing anion which is not a reducing agent, comprising the steps of: incorporating into said solution a quantity of chloride which produces a chlorine ion content in said solution not less than 0.05% and not more than 0.4% by weight; passing a gas containing free oxygen through said solution for oxidation thereof, and electrolyzing at least a circulated portion of said solution through an electrolysis cell and thereby cathodically depositing etched-away metal out of said solution.
Claim 7
Dependent Claim
93 words
Process for regenerating an etching solution containing an etching agent and an alkaline ammonium salt having an oxygen-containing anion which is not a reducing agent, comprising the steps of: incorporating into said solution a quantity of chloride which produces a chlorine ion content in said solution not less than 0.05% and not more than 0.4% by weight; passing a gas containing free oxygen through said solution for oxidation thereof, and electrolyzing at least a circulated portion of said solution through an electrolysis cell and thereby cathodically depositing etched-away metal out of said solution.
Claim 8
Dependent Claim
23 words
Process according to claim 5, in which said ammonium salt is ammonium sulfate and said etching agent is an alkaline-ammoniated metal tetrammine sulfate.
Claim 9
Dependent Claim
12 words
Process according to claim 5, in which said chloride is ammonium chloride.
Claim 10
Dependent Claim
24 words
Process according to claim 5, in which the step of incorporating chloride into said solution is performed before the use of said etching solution.
Claim 11
Dependent Claim
37 words
Process according to claim 5, in which the chlorine ion content of said solution, produced by the step of incoporating a quantity of chloride therein, is not less than 0.1% and not more than 0.3% by weight.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-01-13 | 1989-07-15 | 1990-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-01-13 | 1993-07-15 | 1994-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-01-13 | 1997-07-15 | 1998-01-14 | $7700.00 | Window Closed / Lapsed |