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US4565767A
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Light-sensitive polymer composition with poly(amic acid), bisazide, and tertiary amine compound
Assignee: Hitachi Ltd
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Filing: 1984-04-24
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Granted: 1986-01-21
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Expires: 2004-04-24
Abstract
Abstract A light-sensitive polymer composition comprising a poly(amic acid), a special bisazide compound and an amine compound can give a film which has high sensitivity and in which portions exposed to light are not easily released by a developing solution at the time of development.
Inventors
- 👤 Fumio Kataoka
- 👤 Fusaji Shoji
- 👤 Isao Obara
- 👤 Issei Takemoto
- 👤 Hitoshi Yokono
- 👤 Tokio Isogai
- 👤 Mitsumasa Kojima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:08
CPC Classifications
C; C08; C08L; C08L79/00; C08L79/04; C08L79/08; G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/012; G03F7/0125; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/12; Y10S430/128
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
81 words
A light-sensitive polymer composition for forming fine patterns consisting essentially of: (a) 100 parts by weight of a poly(amic acid), (b) 0.1 to 100 parts by weight of at least one bisazide compound selected from the group consisting of ##STR72## wherein X is --OH, --R 3' OH, --OR 3 or --COOH; R 3 is a lower alkyl group; --R 3' is an alkylene group; and (c) 1 to 400 parts by weight of a tertiary amine compound together in an admixture.
Claim 2
Dependent Claim
81 words
A light-sensitive polymer composition for forming fine patterns consisting essentially of: (a) 100 parts by weight of a poly(amic acid), (b) 0.1 to 100 parts by weight of at least one bisazide compound selected from the group consisting of ##STR72## wherein X is --OH, --R 3' OH, --OR 3 or --COOH; R 3 is a lower alkyl group; --R 3' is an alkylene group; and (c) 1 to 400 parts by weight of a tertiary amine compound together in an admixture.
Claim 3
Dependent Claim
30 words
A light-sensitive polymer composition according to claim 1, wherein the bisazide compound (b) is at least one member selected from the group consisting of 2,6-di(4'-azidobenzal)-4-hydroxymethylcyclohexanone, 2,6-di(4'-azidobenzal)-4-carboxycyclodexanone, 2,6-di(4'-azidobenzal)-4-methoxycyclohexanone, 2,6-di(4'-azidobenzal)-4-hydroxycyclohexanone and 2,6-di(4'-azidecinnamylidene)-4-carboxycyclohexanone.
Claim 4
Dependent Claim
27 words
A light-sensitive polymer composition according to claim 1, wherein the bisazide compound (b) is at least one compound selected from the group consisting of 2,6-di(4'-azidebenzal)-4-carboxycyclohexanone and 2,6-di(4'-azidecinnamylidene-4-carboxycyclohexanone.
Claim 5
Dependent Claim
94 words
A light-sensitive polymer composition according to claim 1, wherein the poly(amic acid) (a) is at least one compound selected from those having in the molecule any of the following repeating unit of the formulae (A) to (F): ##STR73## wherein R 1 is ##STR74## (1:1 in molar ratio), and R 2 is ##STR75## (9:1 in molar ratio), ##STR76## wherein R 1 is ##STR77## (1:1 in molar ratio), and R 2 is ##STR78## (9:1 in molar ratio), ##STR79## where R 1 is ##STR80## (1:1 in molar ratio); and R 2 is ##STR81## (9:1 in molar ratio).
Claim 6
Dependent Claim
75 words
A light-sensitive polymer composition according to claim 4, wherein the tertiary amine compound (c) is at least one compound selected from the group consisting of ##STR82## wherein R 4 is a vinyl group, a propenyl group, a lower alkyl group or hydrogen; R 5 is a lower alkyl group or hydrogen; R 6 is an alkylene group; and R 7 is a lower alkyl group; and R 8 is a lower alkyl group or hydrogen.
Claim 7
Dependent Claim
35 words
A light-sensitive polymer composition acoording to claim 1; wherein the tertiary amine compound (c) is at least one compound selected from the group consisting of 2-(N,N-dimethylamino)ethyl methacrylate, 3-(N,N-dimethylamino)propyl methacrylate, 3-(N,N-dimethylamino)propyl-1,3-pentadiene carboxylate, 4-(N,N-dimethylamino)butyl methacrylate and 4,6-heptadienyldimethylamine.
Claim 8
Dependent Claim
17 words
A light-sensitive polymer composition according to claim 1, which further consists essentially of an aprotic polar solvent.
Claim 9
Dependent Claim
27 words
A light-sensitive polymer composition according to claim 7, wherein the aprotic polar solvent is at least one compound selected from the group consisting of N-methyl-2-pyrrolidone and N,N-dimethylacetamide.
Claim 10
Dependent Claim
99 words
A light-sensitive polymer composition for forming fine patterns consisting essentially of: (a) 100 parts by weight of a poly(amic acid), (b) 0.1 to 100 parts by weight of at least one bisazide compound selected from the group consisting of ##STR83## wherein X is --OH, --R 3' OH, --OR 3 or --COOH; R 3 is a lower alkyl group; --R 3' is an alkylene group; (c) 1 to 400 parts by weight of a tertiary amine compound; and (d) 0.1 to 10 parts by weight of a photosensitizer in an admixture; said admixture being dispersed in an aprotic polar solvent.
Claim 11
Dependent Claim
99 words
A light-sensitive polymer composition for forming fine patterns consisting essentially of: (a) 100 parts by weight of a poly(amic acid), (b) 0.1 to 100 parts by weight of at least one bisazide compound selected from the group consisting of ##STR83## wherein X is --OH, --R 3' OH, --OR 3 or --COOH; R 3 is a lower alkyl group; --R 3' is an alkylene group; (c) 1 to 400 parts by weight of a tertiary amine compound; and (d) 0.1 to 10 parts by weight of a photosensitizer in an admixture; said admixture being dispersed in an aprotic polar solvent.
Claim 12
Dependent Claim
27 words
A light-sensitive polymer composition according to claim 9, wherein said aprotic polar solvent is at least one compound selected from the group consisting of N-methyl-2-pyrrolidone and N,N-dimethylacetamide.
Claim 13
Dependent Claim
31 words
A light-sensitive polymer composition according to claim 5, wherein the bisazide compound (b) is at least one member selected from the group consisting of of 2,6-di(4'-azidobenzal)-4-hydroxymethylcyclohexanone, 2,6-di(4'-azidobenzal)-4-carboxycyclohexanone, 2,6-di(4'-azidobenzal)-4-methoxycyclohexanone, 2,6-di(4'-azidobenzal)-4-hydroxycyclohexanone and 2,6-di(4'-azidecinnamylidene)-4-carboxycyclohexanone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-01-20 | 1989-07-22 | 1990-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-01-20 | 1993-07-22 | 1994-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-01-20 | 1997-07-22 | 1998-01-21 | $7700.00 | Window Closed / Lapsed |