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US4568601A
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Use of radiation sensitive polymerizable oligomers to produce polyimide negative resists and planarized dielectric components for semiconductor structures
Assignee: International Business Machines Corp
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Filing: 1984-10-19
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Granted: 1986-02-04
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Expires: 2004-10-19
Abstract
Abstract The photosensitivity of a particular group of polymerizable oligomers permits radiation induced polymerization. This photosensitivity thus enables the polymerizable oligomers to be used as photoresists in general, and facilitates in situ cure when the oligomers are used to produce isolation films and trenches in semiconductor devices. The photosensitivity further enables use of a simplified planarization process when the polymerizable oligomers are used in the fabrication of semiconductor structures and integrated circuit components. Specifically, the polymerizable oligomers are comprised of poly N-substituted amic acids, the corresponding amic esters, the corresponding amic isoimides, the corresponding amic imids or mixtures thereof, wherein the end groups of the polymerizable oligomer are end capped with a vinyl or acetylinic end group.
Inventors
- 👤 Constance J. Araps
- 👤 George Czornyj
- 👤 Steven M. Kandetzke
- 👤 Mark A. Takacs
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 05:22
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1067; C08G73/1071; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6536; H10P14/6539; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/10; H10W10/17; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24479; Y10T428/2457
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
70 words
A method initiating reaction in a polymerizable oligomer wherein said method comprises: (a) providing said polymerizable oligomer, wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, corresponding amic esters, corresponding isoimides, corresponding imides, and mixtures thereof, and wherein said polymerizable oligomer is vinyl or acetylinic end-capped; and (b) exposing said polymerizable oligomer to radiation sufficient to initiate inter-reaction between molecules of said polymerizable oligomer.
Claim 2
Independent Claim
70 words
A method initiating reaction in a polymerizable oligomer wherein said method comprises: (a) providing said polymerizable oligomer, wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, corresponding amic esters, corresponding isoimides, corresponding imides, and mixtures thereof, and wherein said polymerizable oligomer is vinyl or acetylinic end-capped; and (b) exposing said polymerizable oligomer to radiation sufficient to initiate inter-reaction between molecules of said polymerizable oligomer.
Claim 3
Dependent Claim
8 words
Product produced by the method of claim 1.
Claim 4
Independent Claim
72 words
A method of forming a selectively patterned protective layer on a substrate comprising: (a) providing a layer of a polymerizable oligomer, wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, corresponding amic esters, corresponding isoimides, corresponding imides, and mixtures thereof, and wherein said polymerizable oligomer is vinyl or acetylinic end-capped; and (b) pattern-wise exposing said layer to radiation to couple and cross-link the irradiated portions thereof.
Claim 5
Independent Claim
72 words
A method of forming a selectively patterned protective layer on a substrate comprising: (a) providing a layer of a polymerizable oligomer, wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, corresponding amic esters, corresponding isoimides, corresponding imides, and mixtures thereof, and wherein said polymerizable oligomer is vinyl or acetylinic end-capped; and (b) pattern-wise exposing said layer to radiation to couple and cross-link the irradiated portions thereof.
Claim 6
Independent Claim
113 words
A method of forming a selectively patterned protective layer on a substrate comprising: (a) blanket coating said substrate with a solution of a polymerizable oligomer wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, the corresponding amic esters, the corresponding isoimides, the corresponding imides, and mixtures thereof, and wherein the end groups of said polymerizable oligomer are end capped with a vinyl or acetylinic end group; (b) baking said coated substrate to remove substantially all of the solvent of said solution; (c) pattern-wise exposing said coating to radiation, to couple and cross-link the irradiated portions thereof; and (d) developing said coating to remove the non-irradiated portions thereof.
Claim 7
Independent Claim
113 words
A method of forming a selectively patterned protective layer on a substrate comprising: (a) blanket coating said substrate with a solution of a polymerizable oligomer wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, the corresponding amic esters, the corresponding isoimides, the corresponding imides, and mixtures thereof, and wherein the end groups of said polymerizable oligomer are end capped with a vinyl or acetylinic end group; (b) baking said coated substrate to remove substantially all of the solvent of said solution; (c) pattern-wise exposing said coating to radiation, to couple and cross-link the irradiated portions thereof; and (d) developing said coating to remove the non-irradiated portions thereof.
Claim 8
Dependent Claim
11 words
The method of claim 4 wherein said radiation source is E-beam.
Claim 9
Dependent Claim
21 words
The method of claim 5 wherein said polymerizable oligomer is comprised of N-substituted polyisoimides end-capped with vinyl or acetylenic end groups.
Claim 10
Dependent Claim
23 words
The method of claim 6 wherein said solution of said polyisoimide comprises about 38% weight of said polyisoimide in a solvent of 1-methyl-2-pyrrolidone.
Claim 11
Dependent Claim
13 words
The method of claim 7 wherein said developing is effected with 2-methoxyethyl ether.
Claim 12
Independent Claim
57 words
A method of forming a selectively patterned protective layer on an integrated circuit device, comprising: (a) coating an acetylene-terminated N-substituted polyisoimide on said device; (b) pattern-wise exposing said coating to radiation to couple and cross-link the irradiated portions of said coating; and (c) developing said coating by removing the non-irradiated portions of said coating with a solvent.
Claim 13
Independent Claim
57 words
A method of forming a selectively patterned protective layer on an integrated circuit device, comprising: (a) coating an acetylene-terminated N-substituted polyisoimide on said device; (b) pattern-wise exposing said coating to radiation to couple and cross-link the irradiated portions of said coating; and (c) developing said coating by removing the non-irradiated portions of said coating with a solvent.
Claim 14
Dependent Claim
11 words
The method of claim 9 wherein the radiation source is E-beam.
Claim 15
Dependent Claim
8 words
Product produced by the method of claim 9.
Claim 16
Independent Claim
142 words
A method of fabricating semiconductor structures having insulator isolating trenches formed therein, wherein the insulator comprises a polymeric dielectric, comprising: (a) applying a layer of a polymeric oligomer upon said semiconductor structure and concurrently filling the trenches thereof, wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, the corresponding amic esters, the corresponding isoimides, the corresponding imides, and mixtures thereof, and wherein the end groups of said polymerizable oligomer are end capped with a vinyl or acetylinic end group; (b) pattern-wise exposing said layer to radiation in the area of said trenches to couple and cross-link the irradiated portions thereof; (c) developing said layer to remove the non-irradiated portions thereof; and (d) coating said semiconductor structure with a resist material to a level above the irradiated portions of said polymerizable oligomer layer remaining after step (c).
Claim 17
Independent Claim
142 words
A method of fabricating semiconductor structures having insulator isolating trenches formed therein, wherein the insulator comprises a polymeric dielectric, comprising: (a) applying a layer of a polymeric oligomer upon said semiconductor structure and concurrently filling the trenches thereof, wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, the corresponding amic esters, the corresponding isoimides, the corresponding imides, and mixtures thereof, and wherein the end groups of said polymerizable oligomer are end capped with a vinyl or acetylinic end group; (b) pattern-wise exposing said layer to radiation in the area of said trenches to couple and cross-link the irradiated portions thereof; (c) developing said layer to remove the non-irradiated portions thereof; and (d) coating said semiconductor structure with a resist material to a level above the irradiated portions of said polymerizable oligomer layer remaining after step (c).
Claim 18
Dependent Claim
47 words
The method of claim 12 including the additional step of: (e) reactive ion etching the surface of said coated semiconductor structure to remove polymeric material from the upper surface of said semiconductor structure and to obtain the desired level of said polymerized oligomer within the trenches thereof.
Claim 19
Dependent Claim
20 words
The method of claim 13 wherein said polymerizable oligomer is an N-substituted polyisoimide end-capped with vinyl or acetylenic end groups.
Claim 20
Dependent Claim
11 words
The method of claim 14 wherein said radiation source is E-beam.
Claim 21
Dependent Claim
13 words
The method of claim 15 wherein said reactive ion etching is by oxygen.
Claim 22
Dependent Claim
8 words
Product produced by the method of claim 12.
Claim 23
Independent Claim
199 words
A method of fabricating semiconductor structures having insulator isolating portions formed therein, wherein said insulator comprises a polymeric dielectric, comprising: (a) blanket coating said semiconductor structure with a solution of a polymerizable oligomer wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, the corresponding amic esters, the corresponding amic isoimides, the corresponding imides, and mixtures thereof, and wherein the end groups of said polymerizable oligomer are end capped with a vinyl or acetylinic end group; (b) baking the coated substrate to remove substantially all of the solvent of said solution; (c) pattern-wise exposing said coating to radiation to couple and cross-link the irradiated portions thereof; (d) developing said coating to remove the non-irradiated portions thereof; (e) thermally curing said irradiated portions of said polymerizable oligomer to produce the desired polymeric dielectric structure; (f) coating said semiconductor structure with a resist material to a level above said irradiated portions of said polymerizable oligomer remaining after step (e); and (g) reactive ion etching the surface of said semiconductor structure to remove polymeric material from the upper surface of said semiconductor structure and to obtain the desired level of said polymerized oligomer within the trenches thereof.
Claim 24
Independent Claim
199 words
A method of fabricating semiconductor structures having insulator isolating portions formed therein, wherein said insulator comprises a polymeric dielectric, comprising: (a) blanket coating said semiconductor structure with a solution of a polymerizable oligomer wherein said polymerizable oligomer is selected from the group consisting of poly N-substituted amic acids, the corresponding amic esters, the corresponding amic isoimides, the corresponding imides, and mixtures thereof, and wherein the end groups of said polymerizable oligomer are end capped with a vinyl or acetylinic end group; (b) baking the coated substrate to remove substantially all of the solvent of said solution; (c) pattern-wise exposing said coating to radiation to couple and cross-link the irradiated portions thereof; (d) developing said coating to remove the non-irradiated portions thereof; (e) thermally curing said irradiated portions of said polymerizable oligomer to produce the desired polymeric dielectric structure; (f) coating said semiconductor structure with a resist material to a level above said irradiated portions of said polymerizable oligomer remaining after step (e); and (g) reactive ion etching the surface of said semiconductor structure to remove polymeric material from the upper surface of said semiconductor structure and to obtain the desired level of said polymerized oligomer within the trenches thereof.
Claim 25
Dependent Claim
21 words
The method of claim 18 wherein said polymerizable oligomer is an N-substituted polyisoimide end capped with vinyl or acetylenic end groups.
Claim 26
Dependent Claim
11 words
The method of claim 19 wherein said radiation source is E-beam.
Claim 27
Dependent Claim
27 words
The method of claim 20 wherein said irradiated portions are thermally cured at about 400° C. for periods ranging between about 30 minutes and about 4.5 hours.
Claim 28
Dependent Claim
13 words
The method of claim 21 wherein said reactive ion etching is by oxygen.
Claim 29
Dependent Claim
9 words
The product produced by the method of claim 18.
Claim 30
Dependent Claim
63 words
The method of claim 1 wherein said poly N-substituted amic acids, corresponding amic esters, corresponding isoimides and corresponding imides are selected from the group consisting of: ##STR5## wherein R and R' are selected from the group consisting of: ##STR6## and wherein R" is selected from the group consisting of hydrogen and C n H 2n+1 wherein n ranges from 1 to about 10.
Claim 31
Dependent Claim
63 words
The method of claim 3 wherein said poly N-substituted amic acids, corresponding amic esters, corresponding isoimides and corresponding imides are selected from the group consisting of: ##STR7## wherein R and R' are selected from the group consisting of: ##STR8## and wherein R" is selected from the group consisting of hydrogen and C n H 2n+1 wherein n ranges from 1 to about 10.
Claim 32
Dependent Claim
63 words
The method of claim 4 wherein said poly N-substituted amic acids, corresponding amic esters, corresponding isoimides and corresponding imides are selected from the group consisting of: ##STR9## wherein R and R' are selected from the group consisting of: ##STR10## and wherein R" is selected from the group consisting of hydrogen and C n H 2n+1 wherein n ranges from 1 to about 10.
Claim 33
Dependent Claim
11 words
The method of claim 26 wherein said radiation source is E-beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-03 | 1989-08-05 | 1990-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-03 | 1993-08-05 | 1994-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-03 | 1997-08-05 | 1998-02-04 | $7700.00 | Window Closed / Lapsed |