Electrical contact coating for silicon pressure transducers

Claim 2

In an electrostatically bonded capacative pressure measuring transducer having a silicon diaphragm member sandwitched between a top silicon support plate and a bottom silicon support plate each of which has a via hole extending therethrough, a thin layer of borosilicate glass interposed between the diaphragm and each of the support plates, and a metallized deposit extending through the via holes and over a part of the surface of each of the glass layers opposite the diaphragm to form with the diaphragm two variable capacitors which will be electrically contacted by spring loaded plunger type contact, the improvement comprising: a layer of platinum silicide deposited on the top of the silicon diaphragm and the top of each of the silicon plates as an electrical contact coating providing a contact surface for said plunger type contacts.

Claim 3

A capacitive pressure measuring transducer formed as an electrostatically bonded stack which is contacted electrically by spring loaded plunger type contacts, said transducer comprising: a diaphragm member formed of a single crystal of silicon by etching into both sides of said diaphragm recesses defining the deflecting region of said diaphragm; a pair of silicon support plates on opposite sides of said diaphragm so that one forms a top plate and the other forms a bottom plate, said plate each having a pressure communicating passage extending therethrough; a platinum silicide coating deposited on the top of each of said plates and the top of said diaphragm; a thin layer of borosilicate glass interposed between the silicon top plate and the platinum silicide coating on said diaphragm and between the silicon diaphragm and the platinum silicide coating on said bottom plate; and a metallized region deposited in said communicating passages and extending over a part of the surface of each of said glass layers opposite the deflecting region of said diaphragm to form opposite said deflecting region separate capacitor plates which form with the common plate formed by said diaphragm two variable capacitors whose capacitances change in opposite sense with changes in the pressure being measured, external electrical contact with said diaphragm and said capacitor plates being made by contact with said platinum silicide coatings.

Claim 4

A capacitive pressure measuring transducer formed as an electrostatically bonded stack which is contacted electrically by spring loaded plunger type contacts, said transducer comprising: a diaphragm member formed of a single crystal of silicon by etching into both sides of said diaphragm recesses defining the deflecting region of said diaphragm; a pair of silicon support plates on opposite sides of said diaphragm so that one forms a top plate and the other forms a bottom plate, said plate each having a pressure communicating passage extending therethrough; a platinum silicide coating deposited on the top of each of said plates and the top of said diaphragm; a thin layer of borosilicate glass interposed between the silicon top plate and the platinum silicide coating on said diaphragm and between the silicon diaphragm and the platinum silicide coating on said bottom plate; and a metallized region deposited in said communicating passages and extending over a part of the surface of each of said glass layers opposite the deflecting region of said diaphragm to form opposite said deflecting region separate capacitor plates which form with the common plate formed by said diaphragm two variable capacitors whose capacitances change in opposite sense with changes in the pressure being measured, external electrical contact with said diaphragm and said capacitor plates being made by contact with said platinum silicide coatings.