Patent US4588801A successfully refreshed from Google Patents.
US4588801A
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Polysilane positive photoresist materials and methods for their use
Assignee: United States Department of Energy
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Filing: 1984-04-05
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Granted: 1986-05-13
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Expires: 2004-04-05
Abstract
Abstract New polysilane copolymers comprise recurring units of --Si(X)(Y)-- and Si(A)(B)--, Si(X)(Y) being different from Si(A)(B), wherein X and Y together have 1-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, phenyl, alkylphenyl, or phenylalkyl, with the proviso that only one of X and Y contains a phenyl moiety, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, and wherein A and B together have 3-13 carbon atoms, and A and B each independently is alkyl or cycloalkyl, with the proviso (a) that when one of A and B is ethyl, the other is not methyl or ethyl, and (b) that when one of A and B is n-propyl and the other is methyl, X and Y are not both methyl. Corresponding homopolysilanes are also provided. Upon ultraviolet irradiation, they photodepolymerize to form volatile products. As a result, they represent a new class of photoresists which enable direct formation of a positive image eliminating the heretofore required development step.
Inventors
- 👤 Larry A. Harrah
- 👤 John M. Zeigler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:17
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0754; C; C08; C08G; C08G77/00; C08G77/60
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
119 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and whcih comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 4-13 carbon atoms, and X and Y each indepedently is hydrogen, alkyl, cycloalkyl, substituted phenyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; with the proviso that only one of X and Y can be substituted phenyl,
Claim 2
Dependent Claim
119 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and whcih comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 4-13 carbon atoms, and X and Y each indepedently is hydrogen, alkyl, cycloalkyl, substituted phenyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; with the proviso that only one of X and Y can be substituted phenyl,
Claim 3
Dependent Claim
28 words
and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 4
Dependent Claim
28 words
and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 5
Dependent Claim
17 words
A polysilane of claim 1 which is substantially non-crystalline and wherein neither X nor Y is H.
Claim 6
Dependent Claim
18 words
A polysilane of claim 1 wherein one of X or Y is cyclohexyl and the other is methyl.
Claim 7
Dependent Claim
29 words
A polysilane of claim 1 wherein X and Y each is methyl, ethyl, phenethyl, isopropyl, n-propyl, t-butyl, n-hexyl, or dodecyl, or X and Y together form a pentamethylene group.
Claim 8
Dependent Claim
16 words
A polysilane of claim 2 which is substantially not cross-linked upon exposure to actinic UV radiation.
Claim 9
Dependent Claim
178 words
A polysilane copolymer comprising recurring units of --Si(X)(Y)--, and --Si(A)(B)--, Si(X)(Y) being different from Si(A)(B), wherein X and Y together have 1-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, phenyl, alkylphenyl, or phenylalkyl, with the proviso that only one of X and Y contains a phenyl moiety, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, and wherein A and B together have 3-13 carbon atoms, and A and B each independently is alkyl, 1- or 2-naphthyhl, or cycloalkyl, wherein X, Y, A and B groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; with the proviso (a) that when one of A and B is ethyl, the other is not methyl or ethyl, and (b) that when one of A and B is n-propyl and the other is methyl, X and Y are not both methyl.
Claim 10
Dependent Claim
178 words
A polysilane copolymer comprising recurring units of --Si(X)(Y)--, and --Si(A)(B)--, Si(X)(Y) being different from Si(A)(B), wherein X and Y together have 1-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, phenyl, alkylphenyl, or phenylalkyl, with the proviso that only one of X and Y contains a phenyl moiety, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, and wherein A and B together have 3-13 carbon atoms, and A and B each independently is alkyl, 1- or 2-naphthyhl, or cycloalkyl, wherein X, Y, A and B groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; with the proviso (a) that when one of A and B is ethyl, the other is not methyl or ethyl, and (b) that when one of A and B is n-propyl and the other is methyl, X and Y are not both methyl.
Claim 11
Dependent Claim
19 words
A polysilane of claim 6 which is substantially non-crystalline and wherein neither X or Y is H or alkylphenyl.
Claim 12
Dependent Claim
17 words
A polysilane of claim 7 wherein the ratio of --Si(X)(Y)-- to --Si(A)(B)-- is about 1 to 1.
Claim 13
Dependent Claim
26 words
A polysilane of claim 6 wherein X and Y are both methyl and wherein one of A and B is methyl and the other is cyclohexyl.
Claim 14
Dependent Claim
31 words
A polysilane of claim 6 wherein one of X and Y is methyl and the other is n-propyl, and one of A and B is methyl and the other is isopropyl.
Claim 15
Dependent Claim
44 words
A polysilane of claim 6 wherein X and Y each is methyl, ethyl, or propyl, or X and Y together form pentamethylene; and wherein one of A and B is n-propyl, isopropyl, t-butyl, cyclohexyl, n-hexyl or n-dodecyl and the other is methyl or ethyl.
Claim 16
Dependent Claim
50 words
A polysilane of claim 6 wherein X and Y each is methyl, and one of A and B is cyclohexyl, n-hexyl or n-dodecyl; or wherein one of X and Y is methyl and the other is n-propyl, and one of A and B is methyl and the other is isopropyl.
Claim 17
Dependent Claim
26 words
A polysilane of claim 6 comprising at least three different recurring units obtained from --Si(X)(Y)-- and --Si(A)(B)-- and including at least one of each said units.
Claim 18
Dependent Claim
53 words
A polysilane of claim 6, which is substantially free of low molecular weight oligomers or cyclic materials and which comprises said recurring units, and wherein, as a result of the selection of A, B, X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 19
Dependent Claim
147 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and which comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 5-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, substituted phenyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; with the proviso that only one of X and Y can be substituted phenyl, and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 20
Dependent Claim
147 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and which comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 5-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, substituted phenyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; with the proviso that only one of X and Y can be substituted phenyl, and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 21
Dependent Claim
131 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and which comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 4-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 22
Dependent Claim
131 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and which comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 4-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 23
Dependent Claim
131 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and which comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 5-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 24
Dependent Claim
131 words
A polysilane which is substantially free of low molecular weight oligomers or cyclic materials and which comprises recurring units of --Si(X)(Y)-- wherein X and Y together have 5-13 carbon atoms, and X and Y each independently is hydrogen, alkyl, cycloalkyl, 1- or 2-naphthyl, or phenylalkyl, or together X and Y are an alkylene group forming a ring with the adjoining Si atom, wherein X and Y groups which are not H can optionally be substituted by one of C 1-6 -alkoxy, mono- or di-(C 1-3 -alkyl)amino, C 2-6 -alkanoyl or the corresponding C 2-3 -ketal thereof, C 1-6 -alkyl, --NH 2 or --OH; and wherein, as a result of the selection of X and Y, said polysilane has sufficient photosensitivity to depolymerize upon exposure to actinic radiation, forming products which volatilize.
Claim 25
Dependent Claim
13 words
A polymer of claim 1, wherein X and Y together have 6-13 C-atoms.
References Cited (Backward Citations)
US2554976A
Cited
US2612511A
Cited
US2606879A
Cited
DE1236506B
Cited
US4052430A
Cited
US4276424A
Cited
US4377677A
Cited
US4324901A
Cited
US4464460A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-05-12 | 1989-11-11 | 1990-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-05-12 | 1993-11-11 | 1994-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-05-12 | 1997-11-11 | 1998-05-13 | $7700.00 | Window Closed / Lapsed |