Patent US4608117A successfully refreshed from Google Patents.
US4608117A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Maskless growth of patterned films
Assignee: Massachusetts Institute of Technology
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Filing: 1982-06-01
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Granted: 1986-08-26
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Expires: 2002-06-01
Abstract
Abstract A method of growing patterned films on a substrate in a deposition chamber without masking, the method consisting of the following steps: pressurizing the chamber with a fluid medium to form a thin absorption layer on the substrate; evacuating the chamber to remove excess fluid medium; prenucleating portions of the substrate with a focused energy beam; repressurizing the chamber with a fluid medium; and inducing deposition of material from the fluid medium and thereby growing a patterned film with deposition occurring primarily on the prenucleated portions of the substrate.
Inventors
- 👤 Daniel J. Ehrlich
- 👤 Thomas F. Deutsch
- 👤 Richard M. Osgood
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:00
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/047; C23C16/44; C23C16/48; C23C16/483; H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; Y; Y10; Y10S; Y10S148/00; Y10S148/093; Y10S430/00; Y10S430/136
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
157 words
An apparatus for depositing a patterned film onto a substrate, the apparatus comprising: a. a deposition chamber capable of receiving a substrate; b. a beam source of energy; c. substrate-supporting means for supporting the substrate in the chamber; d. substrate-positioning means for positioning the substrate relative to the beam source; e. coating means for introducing a dissociable fluid medium into said chamber and depositing therefrom an absorption layer of the dissociable fluid medium onto said substrate; f. evacuating means for removing any excess amounts of said dissociable fluid medium from said chamber to render the chamber substantially free of said dissociable fluid medium after said absorption layer has been formed on said substrate; g. focusing means for focusing the beam energy onto said substrate to dissociate portions of said absorption layer and thereby define prenucleation regions for film deposition; and h. atom deposition means for introducing atoms into said chamber for selective deposition onto said prenucleated regions.
Claim 2
Independent Claim
157 words
An apparatus for depositing a patterned film onto a substrate, the apparatus comprising: a. a deposition chamber capable of receiving a substrate; b. a beam source of energy; c. substrate-supporting means for supporting the substrate in the chamber; d. substrate-positioning means for positioning the substrate relative to the beam source; e. coating means for introducing a dissociable fluid medium into said chamber and depositing therefrom an absorption layer of the dissociable fluid medium onto said substrate; f. evacuating means for removing any excess amounts of said dissociable fluid medium from said chamber to render the chamber substantially free of said dissociable fluid medium after said absorption layer has been formed on said substrate; g. focusing means for focusing the beam energy onto said substrate to dissociate portions of said absorption layer and thereby define prenucleation regions for film deposition; and h. atom deposition means for introducing atoms into said chamber for selective deposition onto said prenucleated regions.
Claim 3
Dependent Claim
18 words
The apparatus of claim 1 wherein the beam source of energy is a source of untraviolet laser energy.
Claim 4
Dependent Claim
15 words
The apparatus of claim 2 wherein the laser source is a frequency doubled Ar-ion laser.
Claim 5
Dependent Claim
13 words
The apparatus of claim 2 wherein the laser source is an ArF laser.
Claim 6
Dependent Claim
15 words
The apparatus of claim 1 wherein the beam source of energy is a particle beam.
Claim 7
Dependent Claim
13 words
The apparatus of claim 5 wherein the particle beam is an electron beam.
Claim 8
Dependent Claim
22 words
The apparatus of claim 1 wherein the coating means for depositing an absorption layer comprises a means for depositing gas-phase organometallic molecules.
Claim 9
Dependent Claim
23 words
The apparatus of claim 1 wherein the coating means for depositing an absorption layer comprises a means for depositing gas-phase metallic halide molecules.
Claim 10
Dependent Claim
23 words
The apparatus of claim 1 wherein the coating means for depositing an absorption layer comprises a means for depositing gas-phase metallic hydride molecules.
Claim 11
Dependent Claim
21 words
The apparatus of claim 1 wherein the coating means for depositing an absorption layer comprises a means for depositing metallic alkyls.
Claim 12
Dependent Claim
21 words
The apparatus of claim 1 wherein the coating means for depositing an absorption layer comprises a means for depositing semiconductor alkyls.
Claim 13
Dependent Claim
21 words
The apparatus of claim 1 wherein the coating means for depositing an absorption layer comprises a means for depositing metallic carbonyls.
Claim 14
Dependent Claim
48 words
The apparatus of claim 1 wherein the coating means for depositing an absorption layer comprises a means for depositing an alkyl compound of the formula: M.sub.n (CH.sub.3).sub.m where M is at least one metal or semiconductor chosen from the group of B, Cd, Zn, Ge, Bi or Al.
Claim 15
Dependent Claim
26 words
The apparatus of claim 13 wherein the energy source is a laser source and the flood illumination means comprises a means of defocusing the laser source.
Claim 16
Dependent Claim
16 words
The apparatus of claim 14 wherein the flood illumination means comprises a separate laser illuminating source.
Claim 17
Dependent Claim
16 words
The apparatus of claim 15 wherein the flood illuminating means comprises a separate non-coherent illuminating source.
Claim 18
Dependent Claim
60 words
The apparatus of claim 1 wherein the atom deposition source comprises a means for introducing a second dissociable fluid medium into said deposition chamber, and a flood illumination means for flood illuminating the substrate, whereby a pattern can be grown upon said substrate without masks by dissociation of said fluid medium and deposition of dissociated atoms onto said prenucleated regions.
Claim 19
Dependent Claim
29 words
The apparatus of claim 17 wherein said second dissociable fluid medium of said atom deposition means has the same composition as the absorption layer initially deposited on said substrate.
Claim 20
Dependent Claim
37 words
The apparatus of claim 17 wherein said second dissociable fluid medium of said atom deposition source is a fluid medium which is dissociable by said beam energy to deposit a pattern of catalyticly-active material on said substrate.
Claim 21
Dependent Claim
41 words
The apparatus of claim 17 wherein said means for introducing a fluid medium into said chamber further comprises a means for introducing a fluid medium which is dissociable by a said beam energy to deposit a dopant pattern on said substrate.
Claim 22
Dependent Claim
15 words
The apparatus of claim 17 wherein the atom deposition source is a vacuum deposition means.
Claim 23
Dependent Claim
20 words
The apparatus of claim 1 wherein the apparatus further includes a means for scanning said beam source accross said substrate.
Claim 24
Dependent Claim
22 words
The apparatus of claim 1 wherein the apparatus further includes an optical viewing means for viewing said substrate during the deposition process.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-25 | 1990-02-24 | 1990-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-25 | 1994-02-24 | 1994-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-25 | 1998-02-24 | 1998-08-26 | $7700.00 | Window Closed / Lapsed |