Electric arc vapor deposition electrode apparatus

Claim 2

A consumable electrode adapted for use as a coating source in an electric arc physical vapor deposition machine of the type having, means for holding said electrode and means for sealingly engaging said electrode, said electrode comprising: (a) a body of consumable coating source material generally disposed about a longitudinal axis and having a front surface, a rear surface opposite said front surface, a broad rear central portion proximate to said longitudinal axis at said rear surface, and a periphery near the outer edge of said rear surface, said periphery adapted to be sealingly engaged by said engaging means; and (b) means operatively connecting said rear central portion of said body to said holding means for applying rearward tension to said body in a direction substantially parallel to said longitudinal axis of said body; wherein said rearward tension places said body periphery in sealing engagement with said engaging means so as to define a sealed coolant cavity that extends below substantially the entire said rear surface of said body when said body is operatively connected to said holding means, whereby substantially the entire rear surface of said body is directly cooled.

Claim 3

The electrode as recited in claim 1, wherein said body comprises a metallic material suitable for vaporization within an electric arc vapor deposition machine.

Claim 4

The electrode as recited in claim 2, wherein said body comprises titanium.

Claim 5

The electrode as recited in claim 1, wherein said connecting means comprises a stud having a first end and a second end, said stud being substantially coaxial with said longitudinal axis.

Claim 6

The electrode as recited in claim 4, wherein said stud is externally threaded on said first and second stud ends, wherein said holding means forms a first internally threaded hole adapted to threadedly engage said first end of said stud, and wherein said body forms a second internally threaded hole adapted to threadedly engage said second end of said stud.

Claim 7

The electrode as recited in claim 4, wherein said stud comprises an electrically conductive material.

Claim 8

The electrode as recited in claim 1, wherein said front surface of said body is substantially planar and wherein said body is substantially cylindrically disposed about said longitudinal axis.

Claim 9

A first electrode assembly adapted for use in an electric arc vapor deposition chamber of the type having a second electrode, said first electrode assembly comprising: (a) a body of consumable electrode material suitable for use as a coating source, said body being disposed about a longitudinal axis and having: a front surface, a rear surface opposite said front surface, a rear central portion proximate to said longitudinal axis at said rear surface, and a periphery near the outer edge of said rear surface, and adapted to be sealingly engaged; (b) means cooperatively sealingly engaging said periphery of said body for forming a uniform fluid tight pressure contact seal with said periphery; (c) means for holding said body; and (d) means operatively connecting said rear central portion of said body to said holding means, for applying rearward tension to said body in a direction substantially parallel to said longitudinal axis; wherein said rearward tension uniformly draws said body periphery into pressure contact sealing engagement with said engaging means when said body is operatively connected to said holding means, so as to define a sealed coolant cavity that extends below and permits active direct cooling of substantially the entire rear surface of said body.

Claim 10

A first electrode assembly adapted for use in an electric arc vapor deposition chamber of the type having a second electrode, said first electrode assembly comprising: (a) a body of consumable electrode material suitable for use as a coating source, said body being disposed about a longitudinal axis and having: a front surface, a rear surface opposite said front surface, a rear central portion proximate to said longitudinal axis at said rear surface, and a periphery near the outer edge of said rear surface, and adapted to be sealingly engaged; (b) means cooperatively sealingly engaging said periphery of said body for forming a uniform fluid tight pressure contact seal with said periphery; (c) means for holding said body; and (d) means operatively connecting said rear central portion of said body to said holding means, for applying rearward tension to said body in a direction substantially parallel to said longitudinal axis; wherein said rearward tension uniformly draws said body periphery into pressure contact sealing engagement with said engaging means when said body is operatively connected to said holding means, so as to define a sealed coolant cavity that extends below and permits active direct cooling of substantially the entire rear surface of said body.

Claim 11

The first electrode assembly as recited in claim 8 wherein said body comprises a metallic material suitable for conducting electric current and for vaporizing to a coating plasma within the electric arc vapor deposition machine.

Claim 12

The first electrode assembly as recited in claim 8, wherein said connecting means comprises a stud having a first end and a second end, said stud being substantially coaxial with said longitudinal axis.

Claim 13

The first electrode assembly as recited in claim 10, wherein said stud has male threads on said first and second stud ends, wherein said holding means forms a first female threaded hole adapted to threadingly engage said first end of said stud, and wherein said body forms a second female threaded hole adapted to threadingly engage said second end of said stud.

Claim 14

The first electrode assembly as recited in claim 8, wherein said body is substantial cylindrically shaped about said longitudinal axis, and wherein said front surface is substantially planar.

Claim 15

The first electrode assembly as recited in claim 8, wherein said vapor deposition chamber includes means for biasing said second electrode as an anode of the chamber and wherein said first electrode assembly further includes means for electrically biasing said body as a cathode of the chamber and more negatively than said second electrode.

Claim 16

An electrode assembly for an electric arc vapor deposition chamber, comprising: (a) consumable cathode comprising an electrode body of conductive coating source material, being generally symmetrically disposed about a longitudinal axis and having a front surface from which coating source material is vaporized, a rear surface opposite said front surface, a rear central portion on said rear surface and proximate said longitudinal axis, and a periphery near the outer edge of said rear surface; (b) means for mounting said cathode within a vapor deposition chamber, comprising: (i) support means for cooperatively engaging said cathode along said periphery thereof; and (ii) connecting means operatively mounted to said rear central portion of said cathode for axially urging said cathode periphery toward uniform cooperative engagement with said support means; and (c) seal means operatively connected between said support means and said cathode periphery for forming a fluid tight seal therebetween; wherein a liquid holding coolant cavity is peripherally defined by said seal means and below substantially the entire said rear surface of said cathode for directly actively cooling said cathode.

Claim 17

An electrode assembly for an electric arc vapor deposition chamber, comprising: (a) consumable cathode comprising an electrode body of conductive coating source material, being generally symmetrically disposed about a longitudinal axis and having a front surface from which coating source material is vaporized, a rear surface opposite said front surface, a rear central portion on said rear surface and proximate said longitudinal axis, and a periphery near the outer edge of said rear surface; (b) means for mounting said cathode within a vapor deposition chamber, comprising: (i) support means for cooperatively engaging said cathode along said periphery thereof; and (ii) connecting means operatively mounted to said rear central portion of said cathode for axially urging said cathode periphery toward uniform cooperative engagement with said support means; and (c) seal means operatively connected between said support means and said cathode periphery for forming a fluid tight seal therebetween; wherein a liquid holding coolant cavity is peripherally defined by said seal means and below substantially the entire said rear surface of said cathode for directly actively cooling said cathode.

Claim 18

An electrode assembly as recited in claim 14, wherein said support means comprises an annularly shaped seat arranged and configured to cooperatively engage said cathode periphery.

Claim 19

An electrode assembly as recited in claim 15, wherein said seal means includes an O-ring seal.

Claim 20

An electrode assembly as recited in claim 16, wherein said seat defines a groove configured to cooperatively address said periphery of said cathode; and wherein said O-ring seal is operatively mounted within said groove.

Claim 21

An electrode assembly as recited in claim 17, further including cooling means operatively connected with said mounting means and including in part said sealed coolant cavity for cooling said cathode when operatively mounted to said mounting means; said cooling means being adapted to carry a liquid coolant.

Claim 22

An electrode assembly as recited in claim 18, wherein said cooling means is configured to directly actively cool said rear surface of said cathode with said liquid coolant.

Claim 23

An electrode assembly as recited in claim 19, wherein said support means defines a liquid coolant reservoir for carrying said liquid coolant; and further including means for directly cooling said seal means with said liquid coolant from said reservoir.

Claim 24

An electrode assembly as recited in claim 20, wherein said O-ring groove comprises an inner annular wall and an outer annular wall, said walls being concentrically disposed with respect to one another with the radius of said inner wall being less than the radius of said outer wall; wherein said inner wall forms a plurality of notches, wherein said plurality of notches open into said liquid coolant reservoir to allow fluid communication between said groove and said reservoir.

Claim 25

An electrode assembly as recited in claim 14, further including cooling means operatively connected with said mounting means for cooling said cathode when operativley mounted to said mounting means; said cooling means being adapted to carry a liquid coolant.

Claim 26

An electrode assembly as recited in claim 22, wherein said cooling means is operatively connected to directly cool said rear surface of said cathode with said liquid coolant.

Claim 27

An electrode assembly as recited in claim 23, wherein said support means defines a liquid coolant reservoir for carrying said liquid coolant; and further including means for directly cooling said seal means with said liquid coolant from said reservoir.

Claim 28

An electrode assembly as recited in claim 14, wherein said cathode comprises titanium.