Patent US4629899A successfully refreshed from Google Patents.
US4629899A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deflection lens system for generating a beam of neutral particles of variable cross section
Assignee: Siemens AG
•
Filing: 1986-01-08
•
Granted: 1986-12-16
•
Expires: 2006-01-08
Abstract
Abstract An apparatus for deflecting and focusing a beam of neutral particles for operating on extremely small workpieces, such as for doping or inscribing micro-electronic components, has a deflection system for generating at least one magnetic field through which the beam of neutral particles is directed for focusing and shaping of the beam on the workpiece. The lens system may include one or more six-pole or eight-pole lenses.
Inventors
- 👤 Erich Plies
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:06
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/14; H01J37/141; G; G21; G21K; G21K1/00; G21K1/08; G21K5/00; G21K5/04
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
97 words
An apparatus having a lens system for generating a shaped beam of neutral particles with variable beam cross-section, said lens system comprising a plurality of magnetic multipole lenses disposed sequentially in the radiation propagation direction, each multipole lens having a plurality of pole shoes disposed about a central axis with excitation windings generating at least one dipole field for aligning the magnetic dipole moments of the neutral particles, at least one quadripole field for deflecting the beam of neutral particles, and at least one hexapole field for focusing the beam of neutral particles in the lens system.
Claim 2
Independent Claim
97 words
An apparatus having a lens system for generating a shaped beam of neutral particles with variable beam cross-section, said lens system comprising a plurality of magnetic multipole lenses disposed sequentially in the radiation propagation direction, each multipole lens having a plurality of pole shoes disposed about a central axis with excitation windings generating at least one dipole field for aligning the magnetic dipole moments of the neutral particles, at least one quadripole field for deflecting the beam of neutral particles, and at least one hexapole field for focusing the beam of neutral particles in the lens system.
Claim 3
Dependent Claim
14 words
An apparatus as claimed in claim 1, wherein said multipole lenses are six-pole lenses.
Claim 4
Dependent Claim
14 words
An apparatus as claimed in claim 1, wherein said multipole lenses are eight-pole lenses.
Claim 5
Dependent Claim
14 words
An apparatus as claimed in claim 1, wherein said lens system exhibits stigmatic imaging.
Claim 6
Dependent Claim
15 words
An apparatus as claimed in claim 1, wherein said multipole lenses are two magnetic lenses.
Claim 7
Dependent Claim
15 words
An apparatus as claimed in claim 1, wherein said multipole lenses are three magnetic lenses.
Claim 8
Dependent Claim
15 words
An apparatus as claimed in claim 1, wherein said multipole lenses are four magnetic lenses.
Claim 9
Dependent Claim
30 words
An apparatus as claimed in claim 1 further comprising a beam diaphragm disposed in front of said beam lens system in the z-direction of travel of said neutral particle beam.
References Cited (Backward Citations)
US3418463A
Cited
US3387241A
Cited
US3952198A
Cited
US4236073A
Cited
US4355236A
Cited
US4429229A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-15 | 1990-06-16 | 1990-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-15 | 1994-06-16 | 1994-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-15 | 1998-06-16 | 1998-12-16 | $7700.00 | Window Closed / Lapsed |