Patent US4633893A successfully refreshed from Google Patents.
US4633893A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for treating semiconductor wafers
Assignee: CFMT Inc
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Filing: 1985-06-24
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Granted: 1987-01-06
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Expires: 2005-06-24
Abstract
Abstract An improved apparatus for enclosed flow-line semiconductor wafer treatment includes a wafer-containing vessel and a mechanism for imparting plug-flow to a treatment fluid flowing into the vessel. One plug-flow imparting mechanism includes a flow-expansion input element and a fixed helical flow-diverting surface. Another mechanism incorporates a rotating flow diverting surface.
Inventors
- 👤 Christopher F. McConnell
- 👤 Alan E. Walter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 05:56
CPC Classifications
B; B08; B08B; B08B3/00; B08B3/04; B05; B05C; B05C3/00; B05C3/02; B05C3/09; B05C3/109; B08B7/00; B08B7/0064; B08B7/0092; C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C30; C30B; C30B33/00; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0404; H10P72/0406; H10P72/30; H10P72/33; H10P72/3311; H10P72/34; H10P72/3411; H10P72/3412; B08B2203/00; B08B2203/002; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
126 words
An apparatus for treating semiconductor wafers with a sequential flow of liquids, said apparatus comprising: A. a vessel comprising an enclosure defining a treatment liquid inlet opposed to a treatment liquid outlet, the direction of liquid flow through said enclosure between said inlet and outlet defining an axis; B. means for supporting the semiconductor wafers within said enclosure for exposure to the liquid flow through said enclosure; and C. a liquid-input element in fluid communication with said treatment liquid inlet comprising means for imparting plug flow to a first liquid being introduced into said enclosure to displace by the plug flow a second liquid already disposed within said enclosure such that the semiconductor wafers are uniformly exposed to the plug flow of liquid through said enclosure.
Claim 2
Independent Claim
126 words
An apparatus for treating semiconductor wafers with a sequential flow of liquids, said apparatus comprising: A. a vessel comprising an enclosure defining a treatment liquid inlet opposed to a treatment liquid outlet, the direction of liquid flow through said enclosure between said inlet and outlet defining an axis; B. means for supporting the semiconductor wafers within said enclosure for exposure to the liquid flow through said enclosure; and C. a liquid-input element in fluid communication with said treatment liquid inlet comprising means for imparting plug flow to a first liquid being introduced into said enclosure to displace by the plug flow a second liquid already disposed within said enclosure such that the semiconductor wafers are uniformly exposed to the plug flow of liquid through said enclosure.
Claim 3
Dependent Claim
47 words
The apparatus of claim 1 wherein said liquid input element comprises means for increasing the area of the flow of said first liquid in a direction transverse to said axis thereby to increase the flow cross-section of said first liquid prior to its introduction into said enclosure.
Claim 4
Dependent Claim
27 words
The apparatus of claim 2 wherein said means for imparting plug flow comprises means for imparting to said first liquid a flow vector transverse to said axis.
Claim 5
Dependent Claim
18 words
The apparatus of claim 3 wherein said means for imparting plug flow comprises a fixed flow diverting surface.
Claim 6
Dependent Claim
18 words
The apparatus of claim 3 wherein said means for imparting plug flow comprises a helical flow diverting surface.
Claim 7
Dependent Claim
21 words
The apparatus of claim 5 wherein said helical flow-diverting surface defines an angle of rotation of about 360° about said axis.
Claim 8
Dependent Claim
24 words
The apparatus of claim 3 wherein said means for imparting plug flow is disposed upstream of said means for increasing the area of flow.
Claim 9
Dependent Claim
23 words
The apparatus of claim 3 wherein said means for imparting plug flow comprises a flow diverting surface mounted for rotation about said axis.
Claim 10
Dependent Claim
32 words
The apparatus of claim 3 wherein said means for imparting plug flow comprises a fixed flow diverting surface disposed within an output portion of said means for increasing the area of flow.
Claim 11
Dependent Claim
17 words
The apparatus of claim 9 wherein said means for imparting plug flow comprises a perforated baffle structure.
Claim 12
Dependent Claim
22 words
The apparatus of claim 1 wherein said vessel further comprises means disposed within said enclosure for supporting a plurality of semiconductor wafers.
Claim 13
Dependent Claim
20 words
The apparatus of claim 1 wherein said vessel further comprises means disposed within said enclosure for supporting a wafer carrier.
Claim 14
Dependent Claim
18 words
The apparatus of claim 12 further comprising a sealable access port disposed in a wall of said enclosure.
Claim 15
Dependent Claim
25 words
The apparatus of claim 1 wherein said vessel and input element comprise interfitting seals for connecting said treatment liquid inlet with said liquid input element.
Claim 16
Dependent Claim
37 words
The apparatus of claim 1 further comprising means defining a source of at least one liquid selected from the group consisting of hydrofluoric acid, deionized water, and mixtures thereof, in fluid communication with said liquid input element.
Claim 17
Dependent Claim
18 words
The apparatus of claim 1 further comprising a static mixer upstream of said means for imparting plug flow.
Claim 18
Dependent Claim
16 words
The apparatus of claim 1 further comprising means for introducing a purge gas into said enclosure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-05 | 1990-07-07 | 1991-01-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-05 | 1994-07-07 | 1995-01-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-05 | 1998-07-07 | 1999-01-06 | $7700.00 | Window Closed / Lapsed |