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US4641060A
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US
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Method and apparatus using electron cyclotron heated plasma for vacuum pumping
Assignee: Tokyo Electron Ltd
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Filing: 1985-02-11
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Granted: 1987-02-03
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Expires: 2005-02-11
Abstract
Abstract A method and apparatus is disclosed for producing a gas pumping plasma within an evacuated enclosure having a collimating system consisting of baffle structures and a magnetic field having a central uniform region connected to a source of neutral gas, a magnetic mirror intermediate region and a terminating divergent region. According to the method and apparatus of the present invention, the enclosure is evacuated to a selected pressure, high frequency microwave energy of a selected power and frequency is fed into the magnetic mirror intermediate region, the magnetic field is established at a strength such that an electron cyclotron frequency is made equal to the frequency of the microwave energy within the intermediate region, electrons within the magnetic mirror intermediate region being heated by the microwave energy, the heated electrons ionizing the neutral gas in the intermediate and central regions for creating and maintaining a pumping plasma. Baffle structures are provided between the central and intermediate regions and between the intermediate and terminal regions for permitting unobstructed flow of plasma along the magnetic field lines to the terminal region while restricting inward flow of neutral gas resulting from recombination in the terminal region. The plasma is preferably composed of ionized neutral gas from the central and intermediate regions and an adequate neutral gas concentration is maintained in the intermediate region by controlled supply of make-up gas.
Inventors
- 👤 Raphael A. Dandl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:39
CPC Classifications
H; H01; H01J; H01J41/00; H01J41/12; H05; H05H; H05H1/00; H05H1/02; H05H1/16; H05H1/18
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
227 words
A method of producing a gas pumping plasma within an evacuated enclosure having a collimating system consisting of baffle structures and a magnetic field having a central uniform region connected to a source of neutral gas to be pumped, a magnetic mirror intermediate region and a terminating divergent region, comprising the steps of evacuating the enclosure to a selected pressure, feeding high frequency microwave energy of a selected power and frequency into the magnetic mirror intermediate region, establishing the magnetic field at a strength such that an electron cyclotron frequency is made equal to the frequency of the microwave energy within the intermediate region, the electrons within the magnetic mirror intermediate region being heated by the microwave energy up to 100 electron volts, the heated electrons ionizing the neutral gas in the intermediate and central regions, and thereby creating and maintaining a pumping plasma in the intermediate and central regions, providing baffle structures between the central and intermediate regions and between the intermediate and terminal regions, thereby permitting unobstructed flow of plasma along the magnetic field lines to the terminal region while restricting the inward flow of neutral gas resulting from recombination in the terminal region, the plasma being composed of ionized neutral gas from the central and intermediate regions, and maintaining an adequate neutral gas concentration in the intermediate region by controlled supply of make-up gas.
Claim 2
Independent Claim
227 words
A method of producing a gas pumping plasma within an evacuated enclosure having a collimating system consisting of baffle structures and a magnetic field having a central uniform region connected to a source of neutral gas to be pumped, a magnetic mirror intermediate region and a terminating divergent region, comprising the steps of evacuating the enclosure to a selected pressure, feeding high frequency microwave energy of a selected power and frequency into the magnetic mirror intermediate region, establishing the magnetic field at a strength such that an electron cyclotron frequency is made equal to the frequency of the microwave energy within the intermediate region, the electrons within the magnetic mirror intermediate region being heated by the microwave energy up to 100 electron volts, the heated electrons ionizing the neutral gas in the intermediate and central regions, and thereby creating and maintaining a pumping plasma in the intermediate and central regions, providing baffle structures between the central and intermediate regions and between the intermediate and terminal regions, thereby permitting unobstructed flow of plasma along the magnetic field lines to the terminal region while restricting the inward flow of neutral gas resulting from recombination in the terminal region, the plasma being composed of ionized neutral gas from the central and intermediate regions, and maintaining an adequate neutral gas concentration in the intermediate region by controlled supply of make-up gas.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein the baffle structures confine the microwave energy to the intermediate region.
Claim 4
Dependent Claim
16 words
The method of claim 2 wherein the baffle structures are sized to reactively prevent microwave transmission.
Claim 5
Dependent Claim
23 words
The method of claim 1 wherein the selected pressure is in the range of from about 10 -6 Torr to 10 -3 Torr.
Claim 6
Dependent Claim
31 words
The method of claim 1 wherein a series of plasma pumping regions is utilized to create and maintain a gas pressure difference in the presence of a large gas flow rate.
Claim 7
Dependent Claim
248 words
In a plasma vacuum pump assembly for producing a gas pumping plasma within an evacuated enclosure including means for developing a magnetic field having a central uniform region connected to a source of neutral gas to be pumped, magnetic mirror means forming a magnetic mirror intermediate region and a terminating divergent region, and a collimating system consisting of baffle structures, the combination comprising means for evacuating the enclosure to a selected pressure, means for feeding high frequency microwave energy of a selected power and frequency into the magnetic mirror intermediate region, means for establishing the magnetic field at a strength such that an electron cyclotron frequency is made equal to the frequency of the microwave energy within the intermediate region, the electrons within the magnetic mirror intermediate region being heated by the microwave energy up to 100 electron volts, the heated electrons ionizing the neutral gas in the intermediate and central regions, and thereby creating and maintaining a pumping plasma in the intermediate and central regions, baffle structures arranged respectively between the central and intermediate regions and between the intermediate and terminal regions for permitting unobstructed flow of plasma along the magnetic field lines to the terminal region while restricting the inward flow of neutral gas resulting from recombination in the terminal region, the plasma being composed of ionized neutral gas from the central and intermediate regions, and means for controlling a supply of make-up gas in the intermediate region for maintaining an adequate neutral gas concentration therein.
Claim 8
Dependent Claim
248 words
In a plasma vacuum pump assembly for producing a gas pumping plasma within an evacuated enclosure including means for developing a magnetic field having a central uniform region connected to a source of neutral gas to be pumped, magnetic mirror means forming a magnetic mirror intermediate region and a terminating divergent region, and a collimating system consisting of baffle structures, the combination comprising means for evacuating the enclosure to a selected pressure, means for feeding high frequency microwave energy of a selected power and frequency into the magnetic mirror intermediate region, means for establishing the magnetic field at a strength such that an electron cyclotron frequency is made equal to the frequency of the microwave energy within the intermediate region, the electrons within the magnetic mirror intermediate region being heated by the microwave energy up to 100 electron volts, the heated electrons ionizing the neutral gas in the intermediate and central regions, and thereby creating and maintaining a pumping plasma in the intermediate and central regions, baffle structures arranged respectively between the central and intermediate regions and between the intermediate and terminal regions for permitting unobstructed flow of plasma along the magnetic field lines to the terminal region while restricting the inward flow of neutral gas resulting from recombination in the terminal region, the plasma being composed of ionized neutral gas from the central and intermediate regions, and means for controlling a supply of make-up gas in the intermediate region for maintaining an adequate neutral gas concentration therein.
Claim 9
Dependent Claim
23 words
The plasma vacuum pump assembly of claim 6 wherein the baffle structures are adapted for confining the microwave energy to the intermediate region.
Claim 10
Dependent Claim
18 words
The plasma vacuum pump assembly claim 7 wherein the baffle structures are sized to reactively prevent microwave transmission.
Claim 11
Dependent Claim
32 words
The plasma vacuum pump assembly of claim 6 wherein the evacuating means is adapted for maintaining the selected pressure in the range of from about 10 -6 Torr to 10 -3 Torr.
Claim 12
Dependent Claim
34 words
The plasma vacuum pump assembly of claim 6 wherein a series of plasma pumping regions is utilized to create and maintain a gas pressure difference in the presence of a large gas flow rate.
Claim 13
Independent Claim
194 words
A method of producing a gas pumping plasma within an evacuated enclosure having a collimating system consisting of baffle structures and a magnetic field having a central uniform region connected to a source of neutral gas to be pumped, a magnetic mirror intermediate region and a terminating divergent region, comprising the steps of evacuating the enclosure to a selected pressure, establishing the magnetic field at a selected strength, heating electrons within the magnetic mirror intermediate region to a selected level up to 100 electron volts whereupon the heated electrons ionize the neutral gas in the intermediate and central regions in order to create and maintain a pumping plasma in the intermediate and central regions, providing baffle structures respectively between the central and intermediate regions and between the intermediate and terminal regions for permitting unobstructed flow of plasma along the magnetic field lines to the terminal region while restricting the inward flow of neutral gas resulting from recombination in the terminal region, the plasma being composed of ionized neutral gas from the central and intermediate regions, and maintaining an adequate neutral gas concentration in the intermediate region by means of a controlled supply make-up gas.
Claim 14
Independent Claim
194 words
A method of producing a gas pumping plasma within an evacuated enclosure having a collimating system consisting of baffle structures and a magnetic field having a central uniform region connected to a source of neutral gas to be pumped, a magnetic mirror intermediate region and a terminating divergent region, comprising the steps of evacuating the enclosure to a selected pressure, establishing the magnetic field at a selected strength, heating electrons within the magnetic mirror intermediate region to a selected level up to 100 electron volts whereupon the heated electrons ionize the neutral gas in the intermediate and central regions in order to create and maintain a pumping plasma in the intermediate and central regions, providing baffle structures respectively between the central and intermediate regions and between the intermediate and terminal regions for permitting unobstructed flow of plasma along the magnetic field lines to the terminal region while restricting the inward flow of neutral gas resulting from recombination in the terminal region, the plasma being composed of ionized neutral gas from the central and intermediate regions, and maintaining an adequate neutral gas concentration in the intermediate region by means of a controlled supply make-up gas.
Claim 15
Dependent Claim
17 words
The method of claim 11 wherein the baffle structures confine the microwave energy to the intermediate region.
Claim 16
Dependent Claim
16 words
The method of claim 12 wherein the baffle structures are sized to reactively prevent microwave transmission.
Claim 17
Dependent Claim
22 words
The method of claim 11 wherein the selected pressure is in the range of from 10 -6 Torr to 10 -3 Torr.
Claim 18
Dependent Claim
31 words
The method of claim 11 wherein a series of plasma pumping regions is utilized to create and maintain a gas pressure difference in the presence of a large gas flow rate.
Claim 19
Dependent Claim
20 words
The method of claim 1 wherein electron temperatures are present in the range of from 10 to 40 electron volts.
Claim 20
Dependent Claim
22 words
The plasma pump assembly of claim 6 wherein electron temperatures are present in the range of from 10 to 40 electron volts.
Claim 21
Dependent Claim
20 words
The method of claim 11 wherein electron temperatures are present in the range of from 10 to 40 electron volts.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-02-02 | 1990-08-04 | 1991-02-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-02 | 1994-08-04 | 1995-02-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-02 | 1998-08-04 | 1999-02-03 | $7700.00 | Window Closed / Lapsed |