Patent US6045017A successfully refreshed from Google Patents.
Patent US4641071A successfully refreshed from Google Patents.
US4641071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for controlling drive of a wafer stage
Assignee: Canon Inc
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Filing: 1985-09-25
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Granted: 1987-02-03
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Expires: 2005-09-25
Abstract
Abstract A system for controlling drive of a movable member for carrying a workpiece such as a semiconductor wafer, the system including a first servo control system effective to move the workpiece carrying member at a relatively high speed and with a relatively low positional accuracy for stoppage of the workpiece carrying member, a second servo control system effective to move the workpiece carrying member at a relatively low speed and with a relatively high positional accuracy for the stoppage of the workpiece carrying member, and a system for selecting one of or a combination of the first and second servo control system in accordance with a positional accuracy required with respect to a target position of the workpiece carrying member.
Inventors
- 👤 Shigemoto Tazawa
- 👤 Naoki Ayata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:57
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/19; G05B19/21; G05B19/23; G05B19/231; G05B19/232; G05B2219/00; G05B2219/30; G05B2219/42; G05B2219/42104
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
180 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece carrying member with a relatively low positional accuracy relative to a target position; second servo control means for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with the positional accuracy required of the workpiece carrying member with respect to the target position; wherein said first servo control means includes means for setting the desired moving speed of the workpiece carrying member in accordance with a speed pattern that is substantially trapezoidal in shape, and wherein said first servo control means further includes means for controlling the moving speed of the workpiece carrying member in accordance with the speed pattern set by said setting means.
Claim 2
Independent Claim
180 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece carrying member with a relatively low positional accuracy relative to a target position; second servo control means for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with the positional accuracy required of the workpiece carrying member with respect to the target position; wherein said first servo control means includes means for setting the desired moving speed of the workpiece carrying member in accordance with a speed pattern that is substantially trapezoidal in shape, and wherein said first servo control means further includes means for controlling the moving speed of the workpiece carrying member in accordance with the speed pattern set by said setting means.
Claim 3
Independent Claim
164 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means effective for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece carrying member with a relatively low positional accuracy relative to a target position; second servo control means effective for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with the positional accuracy required of the workpiece carrying member with respect to the target position; wherein said first servo control system comprises means for detecting a moving speed of the workpiece carrying member and means for controlling the moving speed, acceleration and deceleration of the workpiece carrying member in response to an output of said moving speed detecting means.
Claim 4
Independent Claim
164 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means effective for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece carrying member with a relatively low positional accuracy relative to a target position; second servo control means effective for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with the positional accuracy required of the workpiece carrying member with respect to the target position; wherein said first servo control system comprises means for detecting a moving speed of the workpiece carrying member and means for controlling the moving speed, acceleration and deceleration of the workpiece carrying member in response to an output of said moving speed detecting means.
Claim 5
Dependent Claim
25 words
A system according to claim 2, wherein said moving speed detecting means comprises a tachogenerator connected to a motor for driving the workpiece carrying member.
Claim 6
Dependent Claim
46 words
A system according to claim 1, wherein said second servo control system comprises means for detecting a position of the workpiece carrying member and means for controlling a stop position of the workpiece carrying member on the basis of an output from said position detecting means.
Claim 7
Dependent Claim
15 words
A system according to claim 4, wherein said position detecting means comprises an optical scale.
Claim 8
Dependent Claim
15 words
A system according to claim 4, wherein said position detecting means comprises a laser interferometer.
Claim 9
Dependent Claim
151 words
A system according to claim 1, wherein the workpiece carrying member has at least a first position at which the workpiece is to be fed to and/or from the workpiece carrying member, a second position at which the workpiece is to be placed with a relatively low positional accuracy and a third position at which the workpiece is to be placed with a relatively high positional accuracy and wherein said selecting means selects said first servo control means when the target position of the workpiece carrying member is at the first or second position, while said selecting means first selects said first servo control means and then selects said second servo control means, when the target position of the workpiece carrying member is at the third position, said selecting means selecting said second servo control means when the workpiece carrying member reaches a predetermined position in proximity to the third position.
Claim 10
Independent Claim
114 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece carrying member with a relatively low positional accuracy relative to a target position; second servo control means for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with a kind of process to be effected relative to the workpiece.
Claim 11
Independent Claim
114 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece carrying member with a relatively low positional accuracy relative to a target position; second servo control means for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with a kind of process to be effected relative to the workpiece.
Claim 12
Dependent Claim
50 words
A system according to claim 8, wherein said first servo control system comprises means for detecting a moving speed of the workpiece carrying member and means for controlling the moving speed, acceleration and deceleration of the workpiece carrying member in response to an output of said moving speed detecting means.
Claim 13
Dependent Claim
25 words
A system according to claim 9, wherein said moving speed detecting means comprises a tachogenerator connected to a motor for driving the workpiece carrying member.
Claim 14
Dependent Claim
46 words
A system according to claim 8, wherein said second servo control system comprises means for detecting a position of the workpiece carrying member and means for controlling a stop position of the workpiece carrying member on the basis of an output from said position detecting means.
Claim 15
Dependent Claim
15 words
A system according to claim 11, wherein said position detecting means comprises an optical scale.
Claim 16
Dependent Claim
15 words
A system according to claim 11, wherein said position detecting means comprises a laser interferometer.
Claim 17
Dependent Claim
112 words
A system according to claim 8, wherein the workpiece is a semiconductor wafer which is to be subjected to plural exposure steps in sequence, wherein said selecting means selects said first servo control means when the exposure step to be effected relative to the workpiece is other than a first exposure step and wherein said selecting means first selects said first servo control means and then selects said second servo control means, when the exposure step to be effected relative to the workpiece is the first exposure step, said selecting means selecting said second servo control means when the workpiece carrying member reaches a predetermined position in proximity to the target position.
Claim 18
Independent Claim
71 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: means for controlling a stopping position of the workpiece carrying member with a predetermined positional tolerance relative to a target position at which the workpiece carrying member is to be placed; and means for variably setting the predetermined positional tolerance of the stopping position of the workpiece carrying member relative to the target position.
Claim 19
Independent Claim
71 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: means for controlling a stopping position of the workpiece carrying member with a predetermined positional tolerance relative to a target position at which the workpiece carrying member is to be placed; and means for variably setting the predetermined positional tolerance of the stopping position of the workpiece carrying member relative to the target position.
Claim 20
Dependent Claim
53 words
A system according to claim 15, wherein said controlling means comprises means for detecting a position of the workpiece carrying member and means for controlling, on the basis of an output of said position detecting means, the position of the workpiece carrying member to control the stopping position of the workpiece carrying member.
Claim 21
Dependent Claim
15 words
A system according to claim 16, wherein said position detecting means comprises an optical scale.
Claim 22
Dependent Claim
15 words
A system according to claim 16, wherein said position detecting means comprises a laser interferometer.
Claim 23
Dependent Claim
111 words
A system according to claim 15, wherein said workpiece carrying member has at least a first position at which the workpiece is to be fed to and/or from the workpiece carrying member, a second position at which the workpiece is to be placed with a relatively low positional accuracy and a third position at which the workpiece is to be placed with a relatively high positional accuracy and wherein said variably setting means sets a relatively narrow tolerance when the target position is at the third position, as compared with the tolerance to be set by said variably setting means when the target position is at the first or second position.
Claim 24
Independent Claim
149 words
A system for controlling a drive of a stage for carrying a wafer, for use in an integrated circuit manufacturing exposure apparatus including aligning means for moving the wafer and a reticle relative to each other so as to bring them into alignment, said system comprising: means for controlling a stopping position of the stage carrying the wafer with a predetermined positional tolerance; and means for variably setting the predetermined positional tolerance of the stopping position of the stage, said variably setting means adapted to set a different positional tolerance with respect to a first exposure step to be effected relative to the wafer, as compared with a positional tolerance to be set by said variably setting means with respect to a second exposure step in which the exposure of the wafer is effected after completion of the alignment between the wafer and the reticle by the aligning means.
Claim 25
Independent Claim
149 words
A system for controlling a drive of a stage for carrying a wafer, for use in an integrated circuit manufacturing exposure apparatus including aligning means for moving the wafer and a reticle relative to each other so as to bring them into alignment, said system comprising: means for controlling a stopping position of the stage carrying the wafer with a predetermined positional tolerance; and means for variably setting the predetermined positional tolerance of the stopping position of the stage, said variably setting means adapted to set a different positional tolerance with respect to a first exposure step to be effected relative to the wafer, as compared with a positional tolerance to be set by said variably setting means with respect to a second exposure step in which the exposure of the wafer is effected after completion of the alignment between the wafer and the reticle by the aligning means.
Claim 26
Dependent Claim
17 words
A system according to claim 20, wherein the aligning means comprises a through the lens alignment system.
Claim 27
Dependent Claim
55 words
A system according to claim 20, wherein said variably setting means is adapted to set a relatively wide positional tolerance with respect to movement of the stage during the second exposure step, as compared with the positional tolerance set by said variably setting means for the movement of the stage during the first exposure step.
Claim 28
Dependent Claim
47 words
A system according to claim 20, wherein said controlling means includes means for detecting a position of the stage and means for controlling, on the basis of an output from said position detecting means, the position of the stage to control the stopping position of the stage.
Claim 29
Dependent Claim
15 words
A system according to claim 23, wherein said position detecting means comprises an optical scale.
Claim 30
Dependent Claim
15 words
A system according to claim 23, wherein said position detecting means comprises a laser interferometer.
Claim 31
Independent Claim
148 words
A system for controlling a drive of a stage for carrying a wafer, for use in an integrated circuit manufacturing exposure apparatus including aligning means for moving the wafer and a reticle relative to each other so as to bring them into alignment prior to initiation of a first movement of the stage, said system comprising: means for controlling a stopping position of the stage carrying the wafer with a predetermined positional tolerance; and means for variably setting the predetermined positional tolerance of the stopping position of the stage; wherein, with respect to a particular exposure step of a plurality of exposure steps to be made relative to the same region of the wafer, said variably setting means is adapted to set a positional tolerance for the particular exposure step different from the positional tolerances set by said variably setting means with respect to the other exposure steps.
Claim 32
Independent Claim
148 words
A system for controlling a drive of a stage for carrying a wafer, for use in an integrated circuit manufacturing exposure apparatus including aligning means for moving the wafer and a reticle relative to each other so as to bring them into alignment prior to initiation of a first movement of the stage, said system comprising: means for controlling a stopping position of the stage carrying the wafer with a predetermined positional tolerance; and means for variably setting the predetermined positional tolerance of the stopping position of the stage; wherein, with respect to a particular exposure step of a plurality of exposure steps to be made relative to the same region of the wafer, said variably setting means is adapted to set a positional tolerance for the particular exposure step different from the positional tolerances set by said variably setting means with respect to the other exposure steps.
Claim 33
Dependent Claim
15 words
A system according to claim 26, wherein the aligning means comprises an off-axis alignment system.
Claim 34
Dependent Claim
60 words
A system according to claim 26, wherein said particular exposure step is an exposure step for printing a wiring pattern onto the wafer and wherein the positional tolerance set by said variably setting means with respect to said particular exposure step is wider than the positional tolerances set by said variably setting means with respect to the other exposure steps.
Claim 35
Dependent Claim
47 words
A system according to claim 26, wherein said controlling means includes means for detecting a position of the stage and means for controlling, on the basis of an output from said position detecting means, the position of the stage to control the stopping position of the stage.
Claim 36
Dependent Claim
15 words
A system according to claim 29, wherein said position detecting means comprises an optical scale.
Claim 37
Dependent Claim
15 words
A system according to claim 29, wherein said position detecting means comprises a laser interferometer.
Claim 38
Independent Claim
170 words
A method of controlling a drive of a stage for carrying a wafer, comprising the steps of: placing the wafer on the stage; moving the stage with a first servo control that is capable of moving the stage at a relatively high speed and stopping the stage with a relatively low positional accuracy relative to a stopping position; moving the stage with a second servo control that is capable of moving the stage at a relatively low speed and stopping the stage with a relatively high positional accuracy relative to a stopping position; and selecting one of or a combination of the first and second servo-controlled movements in accordance with the positional accuracy required with respect to a target position of the stage; wherein the step of moving the stage with the first servo control includes setting the desired moving speed of the stage in accordance with a speed pattern that is substantially trapezoidal in shape, and controlling the moving speed of the stage in accordance with the speed pattern.
Claim 39
Independent Claim
170 words
A method of controlling a drive of a stage for carrying a wafer, comprising the steps of: placing the wafer on the stage; moving the stage with a first servo control that is capable of moving the stage at a relatively high speed and stopping the stage with a relatively low positional accuracy relative to a stopping position; moving the stage with a second servo control that is capable of moving the stage at a relatively low speed and stopping the stage with a relatively high positional accuracy relative to a stopping position; and selecting one of or a combination of the first and second servo-controlled movements in accordance with the positional accuracy required with respect to a target position of the stage; wherein the step of moving the stage with the first servo control includes setting the desired moving speed of the stage in accordance with a speed pattern that is substantially trapezoidal in shape, and controlling the moving speed of the stage in accordance with the speed pattern.
Claim 40
Dependent Claim
19 words
A method according to claim 32, wherein said selecting step includes selection of the target position of the stage.
Claim 41
Dependent Claim
18 words
A method according to claim 32, wherein said selecting step includes selection of an integrated circuit manufacturing step.
Claim 42
Independent Claim
48 words
A method of controlling a drive of a stage for carrying a wafer for manufacturing an integrated circuit, said method comprising the steps of: placing the wafer on the stage; and selecting in sequence plural positional tolerances for a positional accuracy of a stopping position of the stage.
Claim 43
Independent Claim
48 words
A method of controlling a drive of a stage for carrying a wafer for manufacturing an integrated circuit, said method comprising the steps of: placing the wafer on the stage; and selecting in sequence plural positional tolerances for a positional accuracy of a stopping position of the stage.
Claim 44
Dependent Claim
19 words
A method according to claim 35, wherein said selecting step includes selection of a target position of the stage.
Claim 45
Dependent Claim
18 words
A method according to claim 35, wherein said selecting step includes selection of an integrated circuit manufacturing step.
Claim 46
Independent Claim
174 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece with a relatively low positional accuracy relative to a target position; second servo control means for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with a kind of process to be effected relative to the workpiece; wherein said first servo control means includes means for setting the desired moving speed of the workpiece carrying member in accordance with a speed pattern that is substantially trapezoidal in shape, and wherein said first servo control means further includes means for controlling the moving speed of the workpiece carrying member in accordance with the speed pattern set by said setting means.
Claim 47
Independent Claim
174 words
A system for controlling a drive of a movable member for carrying a workpiece, said system comprising: first servo control means for moving the workpiece carrying member at a relatively high speed and for stopping the workpiece with a relatively low positional accuracy relative to a target position; second servo control means for moving the workpiece carrying member at a relatively low speed and for stopping the workpiece carrying member with a relatively high positional accuracy relative to the target position; and means for selecting one of or a combination of said first and second servo control means in accordance with a kind of process to be effected relative to the workpiece; wherein said first servo control means includes means for setting the desired moving speed of the workpiece carrying member in accordance with a speed pattern that is substantially trapezoidal in shape, and wherein said first servo control means further includes means for controlling the moving speed of the workpiece carrying member in accordance with the speed pattern set by said setting means.
References Cited (Backward Citations)
US4223257A
Cited
US4535277A
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USPTO Annuity & Maintenance Windows
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| 7.5 Years (Year 8) | 1994-02-02 | 1994-08-04 | 1995-02-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-02 | 1998-08-04 | 1999-02-03 | $7700.00 | Window Closed / Lapsed |