Patent US4681774A successfully refreshed from Google Patents.
US4681774A
Expired / Lapsed
US
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Laser induced selective electroless plating
Assignee: Individual
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Filing: 1986-01-17
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Granted: 1987-07-21
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Expires: 2006-01-17
Abstract
Abstract A method for maskless deposition of metals onto a workpiece by applying a sensitizing solution to a workpiece, directing a laser beam onto the sensitized workpiece surface to flash evaporate sensitizer from the workpiece in areas which are not to be plated, moving the workpiece or beam to describe a pattern, and thereafter contacting the thus-patterned sensitized workpiece with an electroless plating solution to deposit a layer of metal in those areas from which the sensitizer is not flashed off.
Inventors
- 👤 Michael J. Halliwell
- 👤 Joseph Zahavi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:21
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/185; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1607; C23C18/1608; C23C18/1612; C23C18/18; C23C18/1803; C23C18/1813; C23C18/182; C23C18/1824; C23C18/1827; C23C18/1831; C23C18/1851; C23C18/1862; C23C18/1868; C23C18/1872; C23C18/1875; C23C18/1879; C23C18/20; C23C18/2006; C23C18/2026; C23C18/204; C23C18/28; C23C18/285; C23C18/30
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
84 words
A method for selectively plating a metal onto a workpiece which consists essentially of the steps of (a) applying a sensitizing solution to said workpiece, thereby providing a sensitized workpiece, (b) describing a pattern on said workpiece by flash evaporating sensitizer from said workpiece by directing a laser beam onto the thus-sensitized workpiece in an area which is not to receive said metal plated thereon, and (c) contacting said workpiece with an electroless plating solution to achieve plating in areas wherein said sensitizer remains.
Claim 2
Independent Claim
84 words
A method for selectively plating a metal onto a workpiece which consists essentially of the steps of (a) applying a sensitizing solution to said workpiece, thereby providing a sensitized workpiece, (b) describing a pattern on said workpiece by flash evaporating sensitizer from said workpiece by directing a laser beam onto the thus-sensitized workpiece in an area which is not to receive said metal plated thereon, and (c) contacting said workpiece with an electroless plating solution to achieve plating in areas wherein said sensitizer remains.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said sensitizer is a PdCl 2 --SnCl 2 --HCl solution.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein said laser has an intensity in the range of about 0.05 to 5.0 joule/cm 2 .
Claim 5
Dependent Claim
13 words
The method of claim 3 wherein said laser is a Q-switched Nd:YAG laser.
Claim 6
Dependent Claim
23 words
The method of claim 1 wherein said beam directing step (b) is carried out with said sensitized workpiece immersed in a liquid media.
Claim 7
Dependent Claim
13 words
The method of claim 1 wherein said workpiece is a flexible, polymeric film.
Claim 8
Dependent Claim
11 words
The method of claim 7 wherein said film is a polyimide.
Claim 9
Dependent Claim
13 words
The method of claim 1 wherein said pattern is described by a photomask.
Claim 10
Dependent Claim
31 words
The method of claim 1 wherein said beam is focused and wherein said pattern is described by moving at least one of said workpiece and said beam relative to the other.
Claim 11
Independent Claim
188 words
A method for selectively plating a metal onto a workpiece which consists essentially of the steps of (a) mounting a workpiece in a plating vessel comprising a housing, a cover which is transparent to laser radiation, inlet means for introducing a fluid into said vessel and outlet means for withdrawing a fluid from said vessel; (b) introducing a sensitizing solution into said vessel while withdrawing therefrom any residual fluid previously therein, to thereby coat said workpiece with a layer of said sensitizer solution; (c) introducing an inert liquid media into said vessel while withdrawing therefrom said sensitizer solution, thereby flushing excess sensitizer solution from said vessel; (d) describing a pattern on said workpiece by flash evaporating sensitizer from said workpiece by directing a laser beam through said transparent cover and said inert liquid and onto the thus-sensitized workpiece in an area which is not to receive said metal plated thereon; and (e) introducing an electroless plating solution into said vessel while withdrawing therefrom said inert liquid and maintaining said plating solution in contact with the thus-plated sensitized workpiece for a time sufficient to obtain a desired plating deposit.
Claim 12
Independent Claim
188 words
A method for selectively plating a metal onto a workpiece which consists essentially of the steps of (a) mounting a workpiece in a plating vessel comprising a housing, a cover which is transparent to laser radiation, inlet means for introducing a fluid into said vessel and outlet means for withdrawing a fluid from said vessel; (b) introducing a sensitizing solution into said vessel while withdrawing therefrom any residual fluid previously therein, to thereby coat said workpiece with a layer of said sensitizer solution; (c) introducing an inert liquid media into said vessel while withdrawing therefrom said sensitizer solution, thereby flushing excess sensitizer solution from said vessel; (d) describing a pattern on said workpiece by flash evaporating sensitizer from said workpiece by directing a laser beam through said transparent cover and said inert liquid and onto the thus-sensitized workpiece in an area which is not to receive said metal plated thereon; and (e) introducing an electroless plating solution into said vessel while withdrawing therefrom said inert liquid and maintaining said plating solution in contact with the thus-plated sensitized workpiece for a time sufficient to obtain a desired plating deposit.
Claim 13
Dependent Claim
17 words
The method of claim 10 wherein said sensitizer solution is a PdCl 2 --SnCl 2 --HCl solution.
Claim 14
Dependent Claim
12 words
The method of claim 10 wherein said inert liquid is distilled water.
Claim 15
Dependent Claim
22 words
The method of claim 10 wherein said laser has an intensity in the range of about 0.05 to 5.0 joule/cm 2 .
Claim 16
Dependent Claim
13 words
The method of claim 13 wherein said laser is a Q-switched Nd:YAG laser.
Claim 17
Dependent Claim
13 words
The method of claim 8 wherein said workpiece is a flexible, polymeric film.
Claim 18
Dependent Claim
11 words
The method of claim 13 wherein said film is a polyimide.
Claim 19
Independent Claim
116 words
A method for continuously plating a metal onto a workpiece which consists essentially of the steps of coating a linearly moving flexible workpiece with a sensitizer, positioning a linearly moving photomask in contact with the thus-sensitized workpiece, moving said sensitized workpiece and said photomask through a laser beam positioned so that the said beam is directed onto said mask and through selected portions thereof onto said workpiece, whereby the portion of light passing through said selected portions flash evaporates said sensitizer from said sensitized workpiece, separating said photomask from the resulting pattern -sensitized workpiece, and contacting said pattern-sensitized workpiece with an electroless plating solution for a time sufficient to achieve a desired level of plating thereon.
Claim 20
Independent Claim
116 words
A method for continuously plating a metal onto a workpiece which consists essentially of the steps of coating a linearly moving flexible workpiece with a sensitizer, positioning a linearly moving photomask in contact with the thus-sensitized workpiece, moving said sensitized workpiece and said photomask through a laser beam positioned so that the said beam is directed onto said mask and through selected portions thereof onto said workpiece, whereby the portion of light passing through said selected portions flash evaporates said sensitizer from said sensitized workpiece, separating said photomask from the resulting pattern -sensitized workpiece, and contacting said pattern-sensitized workpiece with an electroless plating solution for a time sufficient to achieve a desired level of plating thereon.
Claim 21
Dependent Claim
16 words
The method of claim 17 wherein said sensitizer is a PdCl 2 SnCl 2 --Hcl solution.
Claim 22
Dependent Claim
18 words
The method of claim 17 wherein said beam has an intensity of 0.05 to 5.0 joule/cm 2 .
Claim 23
Dependent Claim
12 words
The method of claim 17 wherein said workpiece is a polyimide film.
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