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US4698602A
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Micromirror spatial light modulator
Assignee: United States Department of the Air Force
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Filing: 1985-10-09
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Granted: 1987-10-06
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Expires: 2005-10-09
Abstract
Abstract A micromirror spatial light modulator having an associated silicon photodiode for photoaddressing a micromirror array, and a readout system for providing intensity-to-position encoding and for providing a color image from coded monochromatic input light.
Inventors
- 👤 David Armitage
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:30
CPC Classifications
B; B82; B82Y; B82Y15/00; G; G09; G09F; G09F9/00; G09F9/30; G09F9/37; G09F9/372
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
104 words
A micromirror spatial light modulator comprising a micromirror array formed on a substrate and having a two dimensional configuration of electrostatically deflectable micromirror elements; a silicon photodiode having a charge retaining grid formed on a surface thereof; means for positioning said micromirror array within ten microns from said charge retaining grid; means for applying a voltage between said photodiode and said micromirror array; a metallic screen grid positioned between said silicon photodiode and said micromirror array and electrically isolated from said surface of said silicon photodiode by a layer of silicon dioxide; and means for selectively applying a voltage to said metallic screen grid.
Claim 2
Dependent Claim
104 words
A micromirror spatial light modulator comprising a micromirror array formed on a substrate and having a two dimensional configuration of electrostatically deflectable micromirror elements; a silicon photodiode having a charge retaining grid formed on a surface thereof; means for positioning said micromirror array within ten microns from said charge retaining grid; means for applying a voltage between said photodiode and said micromirror array; a metallic screen grid positioned between said silicon photodiode and said micromirror array and electrically isolated from said surface of said silicon photodiode by a layer of silicon dioxide; and means for selectively applying a voltage to said metallic screen grid.
Claim 3
Dependent Claim
36 words
A micromirror spatial light modulator as defined in claim 1 wherein said micromirror array is positioned five microns from said charge retaining grid and wherein said layer of silicon dioxide has a thickness of 0.2 microns.
Claim 4
Dependent Claim
37 words
A micromirror spatial light modulator as defined in claim 1 and further comprising: a Schlieren optical system coupled to the output of said spatial light modulator including a Fourier plane mask and providing intensity to position encoding.
Claim 5
Dependent Claim
43 words
A micromirror spatial light modulator as defined in claim 3 wherein said Fourier plane mask comprises contiguous red, green and blue filter strips whereby the intensity of coded monochromatic light applied to said spatial light modulator is modulated to provide a color image.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-10-05 | 1991-04-06 | 1991-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-10-05 | 1995-04-06 | 1995-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-10-05 | 1999-04-06 | 1999-10-06 | $7700.00 | Window Closed / Lapsed |