Method of making hermetic feedthrough in ceramic substrate

Claim 2

A process for forming an hermetic feedthrough in a ceramic substrate which comprises providing a sheet of a liquid phase sinterable ceramic composition having a feedthrough hole, at least substantially filling said feedthrough hole with a refractory metal metallization-forming material, firing the resulting structure to produce a sintered structure comprised of a sintered ceramic substrate having an electrically conductive refractory metal metallization, said ceramic substrate containing at least about 1% by volume of glassy phase, said metallization being comprised of a continuous phase of refractory metal and a continuous phase of glass, said refractory metal ranging from about 25% by volume to about 75% by volume of said metallization, said liquid phase ceramic composition and said metalliztion-forming material being formulated to produce said sintered structure, contacting said refractory metal at at least one exposed portion of said metallization with an intrusion metal selected from the group consisting of copper, nickel, tin, gold, iron, cobalt, and an alloy thereof, heating the resulting structure to an infiltration temperature which is above the transition temperature of said glass and at which said intrusion metal is liquid but said refractory metal is solid thereby infiltrating said liquid intrusion metal into said metallization, at said infiltration temperature said liquid metal preferentially wetting said refractory metal displacing said glass with said intrusion metal, and allowing the resulting structure to cool thereby solidifying said infiltrated liquid intrusion metal in place producing said feedthrough, said solid infiltrated intrusion metal at least partly occupying the volume space originally occupied by said displaced glass and being in contact with said refractory metal phase, said solid intrusion metal comprising at least about 25% by volume of said feedthrough, said process being carried out in an atmosphere which has no significant deleterious effect on said ceramic substrate, said refractory metal metallization and said intrusion metal.

Claim 3

The process according to claim 1 wherein said refractory metal is selected from the group consisting of tungsten and molybdenum.

Claim 4

The process according to claim 1 wherein said sintered ceramic substrate containing at least about 1% by volume of glassy phase is selected from the group consisting of alumina, aluminum nitride, and mullite-cordierite composition and silicon nitride.

Claim 5

The process according to claim 1 wherein the resulting feedthrough contains glass in an amount ranging to about 10% by volume of said feedthrough.

Claim 6

The process according to claim 1 wherein said intrusion metal is copper.

Claim 7

The process according to claim 1 wherein said infiltration is carried out sufficiently to produce a coating of said intrusion metal over the entire external exposed surface of said refractory metal metallization leaving none of said refractory metal metallization exposed.

Claim 8

The process according to claim 1 wherein said metallization-forming material extends to the external surface area of said sheet surrounding said feedthrough hole.

Claim 9

A process for forming an hermetic feedthrough in a ceramic substrate which comprises providing a sheet of a liquid phase sinterable ceramic composition having a feedthrough hole, at least substantially filling said feedthrough hole with a refractory metal metallization-forming material, firing the resulting structure to produce a sintered structure comprised of a sintered ceramic substrate having an hermetic electrically conductive refractory metal metallization, said ceramic substrate containing at least about 1% by volume of glassy phase, said metallization being comprised of an intermixture of a continuous phase of refractory metal and a continuous phase of glass, said refractory metal ranging from about 25% by volume to about 75% by volume of said metallization, said liquid phase ceramic composition and said metallization-forming material being formulated to produce said sintered structure, contacting said refractory metal at at least one exposed portion of said metallization with an intrusion metal selected from the group consisting of copper, nickel, tin, gold, iron, cobalt, and an alloy thereof, heating the resulting structure to an infiltration temperature which is above the transition temperature of said glass and at which said intrusion metal is liquid but said refractory metal is solid thereby infiltrating said liquid intrusion metal into said metallization, at said infiltration temperature said liquid metal preferentially wetting said refractory metal displacing said glass with said intrusion metal, and allowing the resulting structure to cool thereby solidifying said infiltrated liquid intrusion metal in place producing said feedthrough, said solid infiltrated intrusion metal at least partly occupying the volume space originally occupied by said displaced glass and being in contact with said refractory metal phase, said solid intrusion metal comprising at least about 25% by volume of said feedthrough, said process being carried out in an atmosphere which has no significant deleterious effect on said ceramic substrate, said refractory metal metallization and said intrusion metal.

Claim 10

A process for forming an hermetic feedthrough in a ceramic substrate which comprises providing a sheet of a liquid phase sinterable ceramic composition having a feedthrough hole, at least substantially filling said feedthrough hole with a refractory metal metallization-forming material, firing the resulting structure to produce a sintered structure comprised of a sintered ceramic substrate having an hermetic electrically conductive refractory metal metallization, said ceramic substrate containing at least about 1% by volume of glassy phase, said metallization being comprised of an intermixture of a continuous phase of refractory metal and a continuous phase of glass, said refractory metal ranging from about 25% by volume to about 75% by volume of said metallization, said liquid phase ceramic composition and said metallization-forming material being formulated to produce said sintered structure, contacting said refractory metal at at least one exposed portion of said metallization with an intrusion metal selected from the group consisting of copper, nickel, tin, gold, iron, cobalt, and an alloy thereof, heating the resulting structure to an infiltration temperature which is above the transition temperature of said glass and at which said intrusion metal is liquid but said refractory metal is solid thereby infiltrating said liquid intrusion metal into said metallization, at said infiltration temperature said liquid metal preferentially wetting said refractory metal displacing said glass with said intrusion metal, and allowing the resulting structure to cool thereby solidifying said infiltrated liquid intrusion metal in place producing said feedthrough, said solid infiltrated intrusion metal at least partly occupying the volume space originally occupied by said displaced glass and being in contact with said refractory metal phase, said solid intrusion metal comprising at least about 25% by volume of said feedthrough, said process being carried out in an atmosphere which has no significant deleterious effect on said ceramic substrate, said refractory metal metallization and said intrusion metal.

Claim 11

The process according to claim 8 wherein said refractory metal is selected from the group consisting of tungsten and molybdenum.

Claim 12

The process according to claim 8 wherein said sintered ceramic substrate containing at least about 1% by volume of glassy phase is selected from the group consisting of alumina, aluminum nitride, and mullite-cordierite composition and silicon nitride.

Claim 13

The process according to claim 8 wherein the resulting feedthrough contains glass in an amount ranging to about 10% by volume of said feedthrough.

Claim 14

The process according to claim 8 wherein said intrusion metal is copper.

Claim 15

The process according to claim 8 wherein said infiltration is carried out sufficiently to produce a coating of said intrusion metal over the entire external exposed surface of said refractory metal metallization leaving none of said refractory metal metallization exposed.

Claim 16

The process according to claim 8 wherein said metallization-forming material extends to the external surface area of said sheet surrounding said feedthrough hole.

Claim 17

A process for forming an hermetic feedthrough in a ceramic substrate which comprises providing a sintered structure comprised of a sintered ceramic substrate having an electrically conductive refractory metal metallization in a feedthrough hole therein, said ceramic substrate containing at least about 1% by volume of glassy phase, said metallization being comprised of a continuous phase of refractory metal and a continuous phase of glass, said refractory metal ranging from about 25% by volume to about 75% by volume of said metallization, said ceramic substrate and said metallization being formulated to produce said sintered structure, contacting said refractory metal at at least one exposed portion of said metallization with an intrusion metal selected from the group consisting of copper, nickel, tin, gold, iron, cobalt, and an alloy thereof, heating the resulting structure to an infiltration temperature which is above the transition temperature of said glass and at which said intrusion metal is liquid but said refractory metal is solid thereby infiltrating said liquid intrusion metal into said metallization, at said infiltration temperature said liquid metal preferentially wetting said refractory metal displacing said glass with said intrusion metal, and allowing the resulting structure to cool thereby solidifying said infiltrated liquid intrusion metal in place producing said feedthrough, said solid infiltrated intrusion metal at least partly occupying the volume space originally occupied by said displaced glass and being in contact with said refractory metal phase, said solid intrusion metal comprising at least about 25% by volume of said feedthrough, said process being carried out in an atmosphere which has no significant deleterious effect on said ceramic substrate, said refractory metal metallization and said intrusion metal.

Claim 18

A process for forming an hermetic feedthrough in a ceramic substrate which comprises providing a sintered structure comprised of a sintered ceramic substrate having an electrically conductive refractory metal metallization in a feedthrough hole therein, said ceramic substrate containing at least about 1% by volume of glassy phase, said metallization being comprised of a continuous phase of refractory metal and a continuous phase of glass, said refractory metal ranging from about 25% by volume to about 75% by volume of said metallization, said ceramic substrate and said metallization being formulated to produce said sintered structure, contacting said refractory metal at at least one exposed portion of said metallization with an intrusion metal selected from the group consisting of copper, nickel, tin, gold, iron, cobalt, and an alloy thereof, heating the resulting structure to an infiltration temperature which is above the transition temperature of said glass and at which said intrusion metal is liquid but said refractory metal is solid thereby infiltrating said liquid intrusion metal into said metallization, at said infiltration temperature said liquid metal preferentially wetting said refractory metal displacing said glass with said intrusion metal, and allowing the resulting structure to cool thereby solidifying said infiltrated liquid intrusion metal in place producing said feedthrough, said solid infiltrated intrusion metal at least partly occupying the volume space originally occupied by said displaced glass and being in contact with said refractory metal phase, said solid intrusion metal comprising at least about 25% by volume of said feedthrough, said process being carried out in an atmosphere which has no significant deleterious effect on said ceramic substrate, said refractory metal metallization and said intrusion metal.

Claim 19

The process according to claim 15 wherein said metallization is non-hermetic and wherein at least sufficient extrusion metal is infiltrated therein to make said feedthrough hermetic.

Claim 20

The process according to claim 15 wherein said metallization is hermetic and is comprised of an intermixture of a continuous phase of refractory metal and a continuous phase of glass.

Claim 21

The process according to claim 15 wherein said refractory metal is selected from the group consisting of tungsten and molybdenum.

Claim 22

The process according to claim 15 wherein said ceramic substrate is selected from the group consisting of alumina, aluminum nitride, mullite-cordierite composition and silicon nitride.

Claim 23

The process according to claim 15 wherein the resulting feedthrough contains glass in an amount ranging to about 10% by volume of said feedthrough.

Claim 24

The process according to claim 15 wherein said intrusion metal is copper.

Claim 25

The process according to claim 15 wherein said infiltration is carried out sufficiently to produce a coating of said intrusion metal over the entire external exposed surface of said refractory metallization leaving none of said refractory metal metallization exposed.

Claim 26

The process according to claim 15 wherein said metallization extends to the external surface area of said substrate.