Patent US4736087A successfully refreshed from Google Patents.
US4736087A
Expired / Lapsed
US
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Plasma stripper with multiple contact point cathode
Assignee: Olin Corp
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Filing: 1987-01-12
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Granted: 1988-04-05
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Expires: 2007-01-12
Abstract
Abstract An improved plasma stripping apparatus with external electrodes is provided wherein the cathode has multiple small area contact points adjacent and in close proximity to or uniformly touching the reactor chamber to cause areas of high r.f. field densities that enhance the gas breakdown in the plasma to obtain high rate film removal.
Inventors
- 👤 Michael G. Whitlock
- 👤 Kevin C. Lettire
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 11:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32807; H01J37/32009; H01J37/32082; H01J37/32091; H01J37/3244; H01J37/32449; H01J37/32458; H01J37/32513; H01J37/32532; H01J37/3255; H01J37/32568; H01J37/32623; H01J37/32715; H01J37/32724; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H01J2237/3342
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
220 words
An apparatus for the dry plasma processing of a single workpiece, comprising in combination: (a) a quartz reactor chamber for generating plasma having a generally cylindrical central wall portion with a top half and a bottom half, an open-bottom and a closed top; (b) base means for supporting the reactor chamber, the base means being contactable with the open-bottom; (c) sealing means between the reactor chamber and the base means for sealing the reactor chamber; (d) gas inlet means for feeding a reactant gas into the reactor chamber; (e) a cathode externally positioned about the top half of the cylindrical central wall portion of the reactor chamber adjacent and below the closed top, the cathode being connectable to a radio frequency power source, the cathode further being generally circular and having a plurality of contact points in close proximity to and extending inwardly toward the reactor chamber to create radio frequency fields of high density; (f) support means connected to the base means for receiving a workpiece; (g) an anode externally positioned about the bottom half of the central wall portion of the reactor chamber adjacent and above the open-bottom and above the support means, the anode being electrically grounded; (h) vacuum means for evacuating the reactor chamber; and (i) cooling means for controlling the temperature of the support means.
Claim 2
Independent Claim
220 words
An apparatus for the dry plasma processing of a single workpiece, comprising in combination: (a) a quartz reactor chamber for generating plasma having a generally cylindrical central wall portion with a top half and a bottom half, an open-bottom and a closed top; (b) base means for supporting the reactor chamber, the base means being contactable with the open-bottom; (c) sealing means between the reactor chamber and the base means for sealing the reactor chamber; (d) gas inlet means for feeding a reactant gas into the reactor chamber; (e) a cathode externally positioned about the top half of the cylindrical central wall portion of the reactor chamber adjacent and below the closed top, the cathode being connectable to a radio frequency power source, the cathode further being generally circular and having a plurality of contact points in close proximity to and extending inwardly toward the reactor chamber to create radio frequency fields of high density; (f) support means connected to the base means for receiving a workpiece; (g) an anode externally positioned about the bottom half of the central wall portion of the reactor chamber adjacent and above the open-bottom and above the support means, the anode being electrically grounded; (h) vacuum means for evacuating the reactor chamber; and (i) cooling means for controlling the temperature of the support means.
Claim 3
Dependent Claim
13 words
The apparatus according to claim 1 wherein the sealing means is an O-ring.
Claim 4
Dependent Claim
18 words
The apparatus according to claim 1 wherein the plurality of contact points further comprise extensions from the cathode.
Claim 5
Dependent Claim
21 words
The apparatus according to claim 3 wherein the extensions are evenly spaced apart about the central portion of the reactor chamber.
Claim 6
Dependent Claim
15 words
The apparatus according to claim 4 wherein the extensions are generally perpendicular to the cathode.
Claim 7
Dependent Claim
11 words
The apparatus according to claim 5 wherein the extensions are L-shaped.
Claim 8
Dependent Claim
11 words
The apparatus according to claim 1 wherein the cathode is aluminum.
Claim 9
Dependent Claim
11 words
The apparatus according to claim 1 wherein the anode is aluminum.
Claim 10
Dependent Claim
23 words
The apparatus according to claim 1 wherein the wafer support means further comprise a plurality of quartz pins upon which rests the workpiece.
Claim 11
Dependent Claim
14 words
The apparatus according to claim 9 wherein the workpiece is further a semiconductor wafer.
Claim 12
Dependent Claim
26 words
The apparatus according to claim 9 wherein the cooling means further comprises a circulating water system that circulates water into and out of the support means.
Claim 13
Dependent Claim
26 words
The apparatus according to claim 1 wherein the gas inlet means feeds the reactant gases in an uninterrupted substantially vertically downward flow path toward the workpiece.
Claim 14
Dependent Claim
23 words
The apparatus according to claim 12 wherein the plasma generated within the reactor chamber includes active oxygen species that work on the workpiece.
Claim 15
Dependent Claim
42 words
The apparatus according to claim 13 wherein the uninterrupted substantially vertically downward flow path creates an internal flow pattern within the reactor chamber that pulls the active oxygen species away from the central wall portion of the chamber down toward the workpiece.
Claim 16
Dependent Claim
16 words
The apparatus according to claim 1 wherein the plurality of contact points contact the reactor chamber.
Claim 17
Independent Claim
182 words
An apparatus with a reactor chamber for the dry plasma processing of a single workpiece positioned adjacent the bottom of the chamber, the chamber further having a cylindrical wall with a top half and a bottom half and a domed top and a gas inlet means for feeding a reactant gas through the domed top into the chamber, the improvement comprising in combination: (a) a cathode externally positioned about the top half of the cylindrical wall of the reactor chamber adjacent and below the domed top, the cathode being connectable to a radio frequency power source and being circular with a plurality of contact points in close proximity to and extending inwardly toward the reactor chamber to create radio frequency fields of high density within the chamber which produce active gas species to work on the workpiece; and (b) an uninterrupted substantially vertically downward flow path of the reactant gas toward the workpiece that creates an internal flow pattern within the reactor chamber that pulls the active gas species away from the cylindrical wall portion of the chamber down toward the workpiece.
Claim 18
Independent Claim
182 words
An apparatus with a reactor chamber for the dry plasma processing of a single workpiece positioned adjacent the bottom of the chamber, the chamber further having a cylindrical wall with a top half and a bottom half and a domed top and a gas inlet means for feeding a reactant gas through the domed top into the chamber, the improvement comprising in combination: (a) a cathode externally positioned about the top half of the cylindrical wall of the reactor chamber adjacent and below the domed top, the cathode being connectable to a radio frequency power source and being circular with a plurality of contact points in close proximity to and extending inwardly toward the reactor chamber to create radio frequency fields of high density within the chamber which produce active gas species to work on the workpiece; and (b) an uninterrupted substantially vertically downward flow path of the reactant gas toward the workpiece that creates an internal flow pattern within the reactor chamber that pulls the active gas species away from the cylindrical wall portion of the chamber down toward the workpiece.
Claim 19
Dependent Claim
12 words
The apparatus according to claim 16 wherein the reactant gas includes oxygen.
Claim 20
Dependent Claim
21 words
The apparatus according to claim 17 wherein the active gas species include monatomic oxygen and molecular oxygen in its excited state.
Claim 21
Dependent Claim
18 words
The apparatus according to claim 16 wherein the plurality of contact points further comprise extensions from the cathode.
Claim 22
Dependent Claim
17 words
The apparatus according to claim 19 wherein the extensions are evenly spaced apart about the cylindrical wall.
Claim 23
Dependent Claim
15 words
The apparatus according to claim 20 wherein the extensions are generally perpendicular to the cathode.
Claim 24
Dependent Claim
16 words
The apparatus according to claim 16 wherein the plurality of contact points contact the reactor chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-05 | 1991-10-05 | 1992-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-05 | 1995-10-05 | 1996-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-05 | 1999-10-05 | 2000-04-05 | $7700.00 | Window Closed / Lapsed |