US4766472A — Monolithic semiconductor structure of a laser and…

Claim 1

Independent Claim 160 words

A monolithic semiconductor structure of a laser and a field effect transistor, produced on a monocrystalline semi-insulating substrate and comprising a first, a second and a third semiconductor layer superimposed in this order, said second layer constituting the active layer of said laser and the channel of said transistor and having a forbidden band narrower than the forbidden bands of said first and third layers which are formed with an undoped semiconductor material; a first region of a first conductivity type, a second and a third region of a second conductivity type, said regions being formed in said first, second and third semiconductor layers and oriented perpendicularly to the planes of said first, second and third layers, said first and second regions defining between them said active zone of said laser, said second and third regions respectively forming the transistor drain and source and defining between them said transistor channel, the gate of the transistor being situated above said channel.

Claim 2

Dependent Claim 160 words

A monolithic semiconductor structure of a laser and a field effect transistor, produced on a monocrystalline semi-insulating substrate and comprising a first, a second and a third semiconductor layer superimposed in this order, said second layer constituting the active layer of said laser and the channel of said transistor and having a forbidden band narrower than the forbidden bands of said first and third layers which are formed with an undoped semiconductor material; a first region of a first conductivity type, a second and a third region of a second conductivity type, said regions being formed in said first, second and third semiconductor layers and oriented perpendicularly to the planes of said first, second and third layers, said first and second regions defining between them said active zone of said laser, said second and third regions respectively forming the transistor drain and source and defining between them said transistor channel, the gate of the transistor being situated above said channel.

Claim 3

Dependent Claim 36 words

A semiconductor structure according to claim 1, wherein said laser comprises metal electrodes located in a plane parallel to the semiconductor layers, the source and drain of said transistor having ohmic contacts located in this plane.

Claim 4

Dependent Claim 48 words

A semiconductor structure according to claim 1, wherein the third semiconductor layer is partly covered with a fourth semiconductor layer serving as an electric contact layer for the laser and the transistor, said fourth layer having a forbidden band narrower than those of the first and third layers.

Claim 5

Dependent Claim 50 words

A semiconductor structure according to claim 1, wherein said first, second and third semiconductor layers are respectively produced from undoped Ga l-x Al x As, N-doped Ga l-y Al y As and undoped Ga l-z Al z As with 0<x≦1, 0≦y<1 and 0<z≦1, x and z being greater than y.

Claim 6

Dependent Claim 27 words

A semiconductor structure according to claim 4, wherein x and z are taken in the range 0.2 to 0.7 and y in the range 0 to 0.15.

Claim 7

Dependent Claim 16 words

A semiconductor structure according to claim 3, wherein said fourth semiconductor layer is of undoped GaAs.

Claim 8

Dependent Claim 13 words

A semiconductor structure according to claim 1, wherein said substrate is of GaAs.

Claim 9

Dependent Claim 26 words

A semiconductor structure according to claim 1, wherein said second semiconductor layer is a superlattice formed from two alternate series of semiconductor films of different composition.

Claim 10

Dependent Claim 23 words

A semiconductor structure according to claim 1, wherein said second semiconductor layer has a composition which varies in the thickness of the layer.

Claim 11

Dependent Claim 28 words

A semiconductor structure according to claim 2, wherein said transistor gate is located at a level below that of said ohmic contacts of said transistor source and drain.

Claim 12

Dependent Claim 181 words

A semiconductor structure of a laser and a field effect transistor produced on a GaAs monocrystalline substrate and comprising a first undoped GA l-x Al x As semiconductor layer with 0.2×0.7, covered with a second N-doped Ga l-y Al y As semiconductor layer with 0≦y≦0.15, forming the active layer of said laser and the channel of said transistor; a third undoped Ga l-z Al z As semiconductor layer with 0.2≦z≦0.7 covering said second layer; a fourth undoped GaAs semiconductor layer covering said third layer; a first type P region, second and third type N regions formed in said first, second, third and fourth semiconductor layers and oriented perpendicularly to the planes of said first, second, third and fourth layers, said first and second regions defining between them said active zone of said laser, said second and third regions respectively forming the drain and source of said transistor and defining between them said transistor channel; a Au-Zn electrode covering said type P region; a AuGeNi ohmic contact covering each of said N type regions; and a TiPtAu gate surmounting said transistor channel.

Claim 13

Dependent Claim 181 words

A semiconductor structure of a laser and a field effect transistor produced on a GaAs monocrystalline substrate and comprising a first undoped GA l-x Al x As semiconductor layer with 0.2×0.7, covered with a second N-doped Ga l-y Al y As semiconductor layer with 0≦y≦0.15, forming the active layer of said laser and the channel of said transistor; a third undoped Ga l-z Al z As semiconductor layer with 0.2≦z≦0.7 covering said second layer; a fourth undoped GaAs semiconductor layer covering said third layer; a first type P region, second and third type N regions formed in said first, second, third and fourth semiconductor layers and oriented perpendicularly to the planes of said first, second, third and fourth layers, said first and second regions defining between them said active zone of said laser, said second and third regions respectively forming the drain and source of said transistor and defining between them said transistor channel; a Au-Zn electrode covering said type P region; a AuGeNi ohmic contact covering each of said N type regions; and a TiPtAu gate surmounting said transistor channel.

Claim 14

Dependent Claim 26 words

A semiconductor structure according to claim 11, wherein said second semiconductor layer is a superlattice formed from two alternate series of semiconductor films of different compositions.

Claim 15

Dependent Claim 23 words

A semiconductor structure according to claim 11, wherein said second semiconductor layer has a composition which varies in the thickness of the layer.

Claim 16

Dependent Claim 28 words

A semiconductor structure according to claim 11, wherein said transistor gate is located at a level below that of said ohmic contacts of said transistor source and drain.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1991-08-23	1992-02-22	1992-08-23	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1995-08-23	1996-02-22	1996-08-23	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1999-08-23	2000-02-22	2000-08-23	$7700.00	Window Closed / Lapsed

Monolithic semiconductor structure of a laser and a field effect transistor

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