US4775877A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for processing a plate-like workpiece
Assignee: Canon Inc
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Filing: 1986-10-28
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Granted: 1988-10-04
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Expires: 2006-10-28
Abstract
Abstract A step-and-repeat type exposure apparatus includes an X-Y stage for moving stepwise a workpiece such as a wafer relative to a projection lens system so that images of a pattern of an original such as a reticle are transferred onto different areas on the wafer in sequence. After exposures of such areas of the wafer that are included in one of plural regions of the wafer, the position of the wafer relative to the X-Y stage is shifted. Then, exposures of the areas included in another region of the wafer are effected. In another aspect, the step-and-repeat exposures of the wafer are effected along a direction inclined to the moving directions of the X-Y stage.
Inventors
- 👤 Masao Kosugi
- 👤 Yukio Tokuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:57
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; H; H10; H10P; H10P72/00; H10P72/30; H10P72/38; H10P72/50
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
156 words
A method of exposing in a step-and-repeat manner a plate-like workpiece to a pattern of an original, wherein the workpiece is placed on an X-Y stage movable in orthogonal X and Y directions and is moved stepwise in the X and Y directions so that different areas of the workpiece are exposed in sequence to the pattern of the original, said method comprising the steps of: effecting sequential exposures in the step-and-repeat manner relative to such areas on the workpiece that are included in a first portion of the surface of the workpiece; separating the workpiece from the X-Y stage and replacing the workpiece on the X-Y stage in a position shifted relative to the X-Y stage in at least one of the X and Y directions; and effecting sequential exposures after the workpiece has been shifted to such areas on the workpiece that are included in a second portion of the surface of the workpiece.
Claim 2
Independent Claim
156 words
A method of exposing in a step-and-repeat manner a plate-like workpiece to a pattern of an original, wherein the workpiece is placed on an X-Y stage movable in orthogonal X and Y directions and is moved stepwise in the X and Y directions so that different areas of the workpiece are exposed in sequence to the pattern of the original, said method comprising the steps of: effecting sequential exposures in the step-and-repeat manner relative to such areas on the workpiece that are included in a first portion of the surface of the workpiece; separating the workpiece from the X-Y stage and replacing the workpiece on the X-Y stage in a position shifted relative to the X-Y stage in at least one of the X and Y directions; and effecting sequential exposures after the workpiece has been shifted to such areas on the workpiece that are included in a second portion of the surface of the workpiece.
Claim 3
Dependent Claim
51 words
A method according to claim 1, wherein in said separating step, the workpiece is lifted upwardly from the X-Y stage and wherein the X-Y stage is subsequently displaced in at least one of the X and Y directions relative to the workpiece, the workpiece being replaced on the displaced X-Y stage.
Claim 4
Dependent Claim
31 words
A method according to claim 1, wherein the X-Y stage includes a chuck for holding the workpiece and wherein in said separating step the workpiece is displaced together with the chuck.
Claim 5
Dependent Claim
176 words
A step-and-repeat exposure apparatus for exposing, in sequence, different areas on a workpiece to a pattern of an original, said apparatus comprising: exposing means for exposing an area of the workpiece to the pattern of the original; an X-Y stage for holding the workpiece, said X-Y stage being movable stepwise in orthogonal X and Y directions to permit step-and-repeat exposure of the workpiece by said exposing means; workpiece shifting means for separating the workpiece from said X-Y stage and for replacing the workpiece on said X-Y stage so that the workpiece and said X-Y stage are relatively shifted in at least one of the X and Y directions; and control means for causing said workpiece shifting means to shift the workpiece relative to said X-Y stage after such areas on the workpiece that are included in a first portion of the workpiece are exposed in sequence to the pattern of the original, so that exposure of such areas on workpiece that are included in a second portion of the workpiece are effected thereafter and in sequence.
Claim 6
Dependent Claim
176 words
A step-and-repeat exposure apparatus for exposing, in sequence, different areas on a workpiece to a pattern of an original, said apparatus comprising: exposing means for exposing an area of the workpiece to the pattern of the original; an X-Y stage for holding the workpiece, said X-Y stage being movable stepwise in orthogonal X and Y directions to permit step-and-repeat exposure of the workpiece by said exposing means; workpiece shifting means for separating the workpiece from said X-Y stage and for replacing the workpiece on said X-Y stage so that the workpiece and said X-Y stage are relatively shifted in at least one of the X and Y directions; and control means for causing said workpiece shifting means to shift the workpiece relative to said X-Y stage after such areas on the workpiece that are included in a first portion of the workpiece are exposed in sequence to the pattern of the original, so that exposure of such areas on workpiece that are included in a second portion of the workpiece are effected thereafter and in sequence.
Claim 7
Dependent Claim
46 words
An apparatus according to claim 4, wherein said X-Y stage includes a chuck for holding the workpiece, and wherein said chuck is adapted to hold the workpiece so that an array of the areas on the workpiece is inclined relative to the X and Y directions.
Claim 8
Dependent Claim
42 words
An apparatus according to claim 5, wherein said chuck is adapted to hold only that portion of the workpiece which substantially corresponds to said first or second portion of the workpiece and which is about to be exposed in the step-and-repeat manner.
Claim 9
Dependent Claim
30 words
An apparatus according to claim 6, wherein said chuck includes a groove for applying vacuum suction to the workpiece and includes a passage for supplying a vacuum to said groove.
Claim 10
Dependent Claim
23 words
An apparatus according to claim 4, wherein said X-Y stage has a movable range which is smaller than the size of the workpiece.
Claim 11
Dependent Claim
52 words
An apparatus according to claim 4, wherein said shifting means is arranged to lift the workpiece upwardly from said X-Y stage and wherein said X-Y stage is subsequently displaced in at least one of the X and Y directions relative to the workpiece, the workpiece being replaced on said displaced X-Y stage.
Claim 12
Dependent Claim
37 words
An apparatus according to claim 4, wherein said X-Y stage includes a chuck for holding the workpiece and wherein said workpiece shifting means is arranged to separate the workpiece together with said chuck from said X-Y stage.
Claim 13
Independent Claim
99 words
An apparatus for processing a workpiece, said apparatus comprising: transporting means for transporting processed and unprocessed workpieces; a stage for carrying the workpiece; means for effecting a predetermined operation to process the workpiece carried on said stage; a first mechanical hand for removing the processed workpiece from said stage; and a second mechanical hand for receiving the unprocessed workpiece from said transporting means and for placing the unprocessed workpiece on said stage, said second mechanical hand being also arranged to receive the processed workpiece from said first mechanical hand and to transfer the processed workpiece to said transporting means.
Claim 14
Independent Claim
99 words
An apparatus for processing a workpiece, said apparatus comprising: transporting means for transporting processed and unprocessed workpieces; a stage for carrying the workpiece; means for effecting a predetermined operation to process the workpiece carried on said stage; a first mechanical hand for removing the processed workpiece from said stage; and a second mechanical hand for receiving the unprocessed workpiece from said transporting means and for placing the unprocessed workpiece on said stage, said second mechanical hand being also arranged to receive the processed workpiece from said first mechanical hand and to transfer the processed workpiece to said transporting means.
Claim 15
Dependent Claim
65 words
An apparatus according to claim 11, wherein said first mechanical hand is rotatable about an axis which is eccentric with respect to a center of the workpiece when it is held by said first mechanical hand, and wherein said first mechanical hand holds the processed workpiece and then rotates about said axis so as to allow transfer of the workpiece to said second mechanical hand.
Claim 16
Dependent Claim
55 words
An apparatus according to claim 12 further comprising a third hand movable in a direction different from a moving direction of said second mechanical hand to collect the processed workpiece, and wherein said first mechanical hand holds the processed workpiece and rotates so as to allow transfer of the processed workpiece to said third hand.
Claim 17
Independent Claim
146 words
A method of exposing a step-and-repeat manner a plate-like workpiece to a pattern of an original, wherein the workpiece is placed on a rotatable table disposed on an X-Y stage movable in orthogonal X and Y directions and wherein the workpiece is moved stepwise in the X and Y directions so that different areas on the workpiece are exposed in sequence to the pattern of the original, said method comprising the steps of: effecting sequential exposures in the step-and-repeat manner relative to such areas on the workpiece that are included in a first portion of the surface of the workpiece; shifting the workpiece relative to the rotatable table in at least one of the X and Y directions; and effecting sequential exposures after said shifting step relative to such areas on the workpiece that are included in a second portion of the surface of the workpiece.
Claim 18
Independent Claim
146 words
A method of exposing a step-and-repeat manner a plate-like workpiece to a pattern of an original, wherein the workpiece is placed on a rotatable table disposed on an X-Y stage movable in orthogonal X and Y directions and wherein the workpiece is moved stepwise in the X and Y directions so that different areas on the workpiece are exposed in sequence to the pattern of the original, said method comprising the steps of: effecting sequential exposures in the step-and-repeat manner relative to such areas on the workpiece that are included in a first portion of the surface of the workpiece; shifting the workpiece relative to the rotatable table in at least one of the X and Y directions; and effecting sequential exposures after said shifting step relative to such areas on the workpiece that are included in a second portion of the surface of the workpiece.
Claim 19
Dependent Claim
60 words
A method according to claim 14, wherein in said shifting step the workpiece is lifted upwardly from the rotatable table and wherein the X-Y stage carrying the rotatable table is subsequently displaced in at least one of the X and Y directions relative to the workpiece, the workpiece being replaced on the rotatable table carried on the displaced X-Y stage.
Claim 20
Dependent Claim
36 words
A method according to claim 14, wherein the X-Y stage includes a chuck disposed on the rotatable table for holding the workpiece and wherein in said shifting step the workpiece is displaced together with the chuck.
Claim 21
Dependent Claim
167 words
A step-and-repeat exposure apparatus for exposing, in sequence, different areas on a workpiece to a pattern of an original, said apparatus comprising: exposing means for exposing an area of the workpiece to the pattern of the original; an X-Y stage having a rotatable table for holding the workpiece, said X-Y stage being movable stepwise in orthogonal X and Y directions to permit step-and-repeat exposure of the workpiece by said exposing means; workpiece shifting means for shifting the workpiece relative to said rotatable table in at least one of the X and Y directions; and control means for causing said shifting means to shift the workpiece relative to said rotatable table after such areas on the workpiece that are included in a first portion of the surface of the workpiece are exposed in sequence to the pattern of the original, so that exposure of such areas on the workpiece that are included in a second portion of the surface of the workpiece are effected thereafter and in sequence.
Claim 22
Dependent Claim
167 words
A step-and-repeat exposure apparatus for exposing, in sequence, different areas on a workpiece to a pattern of an original, said apparatus comprising: exposing means for exposing an area of the workpiece to the pattern of the original; an X-Y stage having a rotatable table for holding the workpiece, said X-Y stage being movable stepwise in orthogonal X and Y directions to permit step-and-repeat exposure of the workpiece by said exposing means; workpiece shifting means for shifting the workpiece relative to said rotatable table in at least one of the X and Y directions; and control means for causing said shifting means to shift the workpiece relative to said rotatable table after such areas on the workpiece that are included in a first portion of the surface of the workpiece are exposed in sequence to the pattern of the original, so that exposure of such areas on the workpiece that are included in a second portion of the surface of the workpiece are effected thereafter and in sequence.
Claim 23
Dependent Claim
23 words
An apparatus according to claim 17, wherein said X-Y stage has a movable range which is smaller than the size of the workpiece.
Claim 24
Dependent Claim
51 words
An apparatus according to claim 17, wherein said X-Y stage includes a chuck disposed on said rotatable table for holding the workpiece, and wherein said chuck is adapted to hold the workpiece so that an aray of the areas on the workpiece is inclined relative to the X and Y directions.
Claim 25
Dependent Claim
43 words
An apparatus according to claim 19, wherein said chuck is adapted to hold only that portion of the workpiece which substantially corresponds to said first or second portion of the workpiece and which is about to be exposed in the step and-repeat manner.
Claim 26
Dependent Claim
30 words
An apparatus according to claim 20, wherein said chuck includes a groove for applying vacuum suction to the workpiece and includes a passage for supplying a vacuum to said groove.
Claim 27
Dependent Claim
61 words
An apparatus according to claim 17, wherein said shifting means is arranged to lift the workpiece upwardly from said rotatable table and wherein said X-Y stage carrying said rotatable table is subsequently displaced in at least one of the X and Y directions relative to the workpiece, the workpiece being replaced on said rotatable table carried on said displaced X-Y stage.
Claim 28
Dependent Claim
43 words
An apparatus according to claim 17, wherein said X-Y stage includes a chuck disposed on said rotatable table for holding the workpiece and wherein said workpiece shifting means is arranged to shift the workpiece together with said chuck relative to said rotatable table.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-04 | 1992-04-04 | 1992-10-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-04 | 1996-04-04 | 1996-10-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-04 | 2000-04-04 | 2000-10-04 | $7700.00 | Window Closed / Lapsed |