US4801507A
Expired / Lapsed
US
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Arylsiloxane/silicate compositions useful as interlayer dielectric films
Assignee: Akzo America Inc
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Filing: 1987-07-02
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Granted: 1989-01-31
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Expires: 2007-07-02
Abstract
Abstract Oligomers and polymers, useful as interlayer dielectric films, are formed by the co(hydrolysis/condensation) of an aryl group-containing trifunctional silanetriol or derivative with a tetrafunctional silicic acid compound. The respective tri- and tetrafunctional substituents on either silicon compound reaction are chosen so that they act as reactants in condensation oligomerization or polymerization reactions with the substituents on the other reactant.
Inventors
- 👤 William E. Estes
- 👤 John H. Deatcher
- 👤 George E. Whitwell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 10:43
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; C; C09; C09D; C09D183/00; C09D183/04; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P14/63; H10P14/6326; H10P14/6342
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
53 words
A semiconductor device which comprises, as a dielectric insulating layer, a cured polymeric composition formed by the condensation of an aryl-group containing trifunctional silane comprising three groups capable of condensation with a tetrafunctional silicon compound of the formula Si(Y) 4 , where Y is selected from the group consisting of alkoxy and halogen.
Claim 2
Dependent Claim
53 words
A semiconductor device which comprises, as a dielectric insulating layer, a cured polymeric composition formed by the condensation of an aryl-group containing trifunctional silane comprising three groups capable of condensation with a tetrafunctional silicon compound of the formula Si(Y) 4 , where Y is selected from the group consisting of alkoxy and halogen.
Claim 3
Dependent Claim
48 words
A device as claimed in claim 1 where the trifunctional silane is of the formula ArSiZ 3 where Ar is a substituted or unsubstituted phenyl group and Z is selected from the group consisting of halogen and hydroxy and where the tetrafunctional silicon compound is a tetraalkyl orthosilicate.
Claim 4
Dependent Claim
13 words
A device as claimed in claim 1 where the trifunctional silane is phenyltrichlorosilane.
Claim 5
Dependent Claim
13 words
A device as claimed in claim 1 where the trifunctional silane is phenylsilanetriol.
Claim 6
Dependent Claim
14 words
A device as claimed in claim 2 wherein the tetraalkyl orthosilicate is ethyl silicate.
Claim 7
Dependent Claim
147 words
A process for forming polymer compositions by the hydrolysis and condensation of a compound (a) of the formula ArSiZ 3 , where Ar is an unsubstituted or substituted phenyl group and z is selected from the group consisting of halogen, alkoxy and hydroxy with a compound (b) of the formula SiY 4 , where Y is selected from the group consisting of alkoxy and halogen, and with a compound (c) selected from the group consisting of Ar x M(O)(OR y ) and Ar x M(OR) y , where Ar is phenyl, where M is selected from the group consisting of boron and phosphorus, R is selected from the group consisting of hydrogen and alkyl, and where x is 0 to 2 and y is 3 to 1 when M is phosphorus and x is 0 or 1 and y is 3 or 2 when M is boron.
Claim 8
Dependent Claim
147 words
A process for forming polymer compositions by the hydrolysis and condensation of a compound (a) of the formula ArSiZ 3 , where Ar is an unsubstituted or substituted phenyl group and z is selected from the group consisting of halogen, alkoxy and hydroxy with a compound (b) of the formula SiY 4 , where Y is selected from the group consisting of alkoxy and halogen, and with a compound (c) selected from the group consisting of Ar x M(O)(OR y ) and Ar x M(OR) y , where Ar is phenyl, where M is selected from the group consisting of boron and phosphorus, R is selected from the group consisting of hydrogen and alkyl, and where x is 0 to 2 and y is 3 to 1 when M is phosphorus and x is 0 or 1 and y is 3 or 2 when M is boron.
Claim 9
Dependent Claim
24 words
A process as claimed in claim 6 where the mole ratio of compound (a) to compound (b) is from about 3:1 to about 6:1.
Claim 10
Dependent Claim
26 words
A process as claimed in claim 6 wherein compound (a) is selected from the group consisting of phenyltrichlorosilane and phenylsilanetriol and compound (b) is ethyl silicate.
Claim 11
Dependent Claim
21 words
A process as claimed in claim 6 wherein compound (c) is selected from the group consisting of phenylphosphonic acid and triisopropylborate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-31 | 1992-08-01 | 1993-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-31 | 1996-08-01 | 1997-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-31 | 2000-08-01 | 2001-01-31 | $7700.00 | Window Closed / Lapsed |