Patent US4818359A successfully refreshed from Google Patents.
US4818359A
Expired / Lapsed
US
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Low contamination RF sputter deposition apparatus
Assignee: International Business Machines Corp
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Filing: 1987-12-01
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Granted: 1989-04-04
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Expires: 2007-12-01
Abstract
Abstract A high rate, low contamination, non-reactive sputter etching or deposition apparatus is disclosed herein. The apparatus is comprised of a pair of parallel plate electrodes, cathode and substrate and an additional or wall electrode means surrounding said other electrode means. The wall electrode can be made to be coplanar with said other electrodes and the area of said electrodes are designed so that the wall electrode is resputtered eliminating contamination. The electrodes are housed in a vacuum chamber with inlet means for introducing a non-reactive gas into said chamber. Means are provided for supplying said RF voltage to said electrodes both in and out of phase and for varying the magnitude of the substrate electrode RF voltage with respect to the magnitude of the cathode voltage. Thick insulator rings are used to reduce stray capacitance between the wall electrode and ground whereby the outer chamber (normally grounded) forms a low inductance path between the cathode electrode and acts as a shield for the inner chamber RF potential.
Inventors
- 👤 Fletcher Jones
- 👤 Joseph S. Logan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; H01J37/32431; H01J37/32532; H01J37/32568; H01J37/32623; H01J37/32697; H01J37/32706
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
158 words
In a non-reactive RF sputter etching and/or deposition apparatus wherein a vacuum chamber encloses cathode and anode electrodes having respective areas, said cathode electrode being adapted for having a source target located thereon and said anode electrode being adapted for having workpiece substrates mounted thereon such that said cathode electrode and anode electrode are located in a face to face relationship and having a means for supplying and varying RF voltage applied to said cathode and anode electrodes and wherein said chamber includes means for introducing an ionizable gas into said chamber such that the high frequency and relatively high voltages applied to said electrodes form a plasma there between, the improvement comprising: an additional electrode encircling said cathode and anode electrodes and the space therebetween wherein said additional electrode is within and separate from said chamber and has an area approximately equal to or slightly larger than the sum of said cathode electrode and anode electrode areas.
Claim 2
Dependent Claim
158 words
In a non-reactive RF sputter etching and/or deposition apparatus wherein a vacuum chamber encloses cathode and anode electrodes having respective areas, said cathode electrode being adapted for having a source target located thereon and said anode electrode being adapted for having workpiece substrates mounted thereon such that said cathode electrode and anode electrode are located in a face to face relationship and having a means for supplying and varying RF voltage applied to said cathode and anode electrodes and wherein said chamber includes means for introducing an ionizable gas into said chamber such that the high frequency and relatively high voltages applied to said electrodes form a plasma there between, the improvement comprising: an additional electrode encircling said cathode and anode electrodes and the space therebetween wherein said additional electrode is within and separate from said chamber and has an area approximately equal to or slightly larger than the sum of said cathode electrode and anode electrode areas.
Claim 3
Dependent Claim
55 words
An RF sputter etching and/or deposition apparatus according to claim 1 wherein the additional electrode is driven from one terminal of an BF generator and the cathode and anode electrodes provide the return path such that there is an in-phase voltage relationship between said cathode electrode and plasma and said anode electrode and plasma voltages.
Claim 4
Dependent Claim
32 words
An RF sputter etching and/or deposition apparatus according to claim 2 wherein the means for introducing the gas flow into said vacuum chamber is from a circular manifold surrounding the anode electrode.
Claim 5
Dependent Claim
29 words
An RF sputter etching and/or deposition apparatus according to claim 2 wherein the gas to be introduced into said vacuum chamber is selected from the group of noble gases.
Claim 6
Dependent Claim
31 words
An RF sputter etching and/or deposition apparatus according to claim 4 wherein the gas to be introduced into said vacuum chamber is selected form the group of argon, xenon or krypton.
Claim 7
Dependent Claim
50 words
An RF sputter etching and/or deposition apparatus according to claim 1 wherein said cathode electrode and anode electrode are the driven electrodes and said additional electrode provides the return path such that the voltage relationship between said cathode electrode and plasma and said anode electrode and plasma voltage is in-phase.
Claim 8
Dependent Claim
32 words
An RF sputter etching and/or deposition apparatus according to claim 6 wherein the means of introducing the gas flow into said vacuum chamber is from a circular manifold surrounding the anode electrode.
Claim 9
Dependent Claim
29 words
An RF sputter etching and/or deposition apparatus according to claim 6 wherein the gas to be introduced into said vacuum chamber is selected from the group of noble gases.
Claim 10
Dependent Claim
31 words
An RF sputter etching and/or deposition apparatus according to claim 8 wherein the gas to be introduced into said vacuum chamber is selected from the group of argon, xenon or krypton.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-03 | 1992-10-03 | 1993-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-03 | 1996-10-03 | 1997-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-03 | 2000-10-03 | 2001-04-04 | $7700.00 | Window Closed / Lapsed |