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Method for suppressing growth of graphite and other non-diamond carbon species during formation of synthetic diamond

Assignee: Advanced Refractory Technologies Inc
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Filing: 1987-03-30
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Granted: 1989-07-18
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Expires: 2007-03-30
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Abstract

Abstract Methods are provided for suppressing the growth of graphite and other non-diamond carbon species during the low pressure deposition of carbon to form diamond. In one method, the graphite or other non-diamond carbon species is vaporized using incident radiative energy sufficient to vaporize graphite but insufficient to damage the substrate. In another embodiment the graphite or other non-diamond carbon species is selectively photolyzed, such as, by use of laser energy of appropriate wavelength.

Inventors

  • 👤 John M. Pinneo

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 08:57
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/52; B; B01; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/121; C23C16/22; C23C16/26; C23C16/27; C23C16/48; C23C16/483; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 74 words
A method for suppressing growth of graphite and other non-diamond carbon species during growth of diamond by low pressure vapor deposition of carbon upon a substrate, comprising the step of heating the growing diamond surfaces during deposition with incident radiative energy comprising optical wavelengths sufficiently high to vaporize graphite and other non-diamond carbon species formed upon said surfaces but said flux being sufficiently low to avoid substantial physical and chemical damage to said substrate.
Claim 2
Independent Claim 74 words
A method for suppressing growth of graphite and other non-diamond carbon species during growth of diamond by low pressure vapor deposition of carbon upon a substrate, comprising the step of heating the growing diamond surfaces during deposition with incident radiative energy comprising optical wavelengths sufficiently high to vaporize graphite and other non-diamond carbon species formed upon said surfaces but said flux being sufficiently low to avoid substantial physical and chemical damage to said substrate.
Claim 3
Dependent Claim 22 words
A method according to claim 1 wherein said radiative energy is of a magnitude of about 0.5 to 1000 watts/cm 2 .
Claim 4
Dependent Claim 26 words
A method according to claim 2 wherein said energy is in the range of 1 to 5 watts/cm 2 and is produced by a pulsed laser.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-07-17 1993-01-16 1993-07-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-07-17 1997-01-16 1997-07-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-07-17 2001-01-16 2001-07-18 $7700.00 Window Closed / Lapsed

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