Abstract A projection exposure apparatus capable of improving the precision of baseline measurement has an objective optical system whose chromatic aberration has been corrected for a first wavelength and a second wavelength and which is used for introducing the lights of first and second wavelengths into an imging optical system through a mask, a first illuminating system for focusing the light of the first wavelength at a plane of the mask and a plane of a substrate through the objective optical system, a second illuminating system for focusing the light of the second wavelength at a plane of the mask and a plane of the substrate through the objective optical system, and deflecting means for commonly deflecting the lights of first and second wavelengths entering the objective optical system in such a manner that the lights of first and second wavelengths respectively scan alignment marks formed on the mask and substrate at the same time.
Inventors
👤 Kenji Nishi
Bibliographic Details
Application Number—
JurisdictionUS
Data Sourcegoogle_patents
Last Synchronized2026-10-29 09:29
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7065
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
171 words
A projection exposure apparatus comprising: an imaging optical system for projecting the image of an object placed on a first plane onto a second plane, wherein said first and second planes are mutually conjugate for a first wavelength with respect to said imaging optical system; first and second alignment mark means respectively formed on said first and second planes; means for supplying a first radiation beam of said first wavelength; means for supplying a second radiation beam of a second wavelength different from said first wavelength; optical means for focusing, through a common light path, said first and second radiation beams on said first plane in the vicinity of said first alignment mark means, and further focusing said beams through said imaging optical system on said second plane in the vicinity of said second alignment mark means; and deflection means for simultaneously varying the direction of said first and second radiation beams in such a manner that said first and second radiation beams scan said first and second alignment mark means.
Claim 2
Dependent Claim
171 words
A projection exposure apparatus comprising: an imaging optical system for projecting the image of an object placed on a first plane onto a second plane, wherein said first and second planes are mutually conjugate for a first wavelength with respect to said imaging optical system; first and second alignment mark means respectively formed on said first and second planes; means for supplying a first radiation beam of said first wavelength; means for supplying a second radiation beam of a second wavelength different from said first wavelength; optical means for focusing, through a common light path, said first and second radiation beams on said first plane in the vicinity of said first alignment mark means, and further focusing said beams through said imaging optical system on said second plane in the vicinity of said second alignment mark means; and deflection means for simultaneously varying the direction of said first and second radiation beams in such a manner that said first and second radiation beams scan said first and second alignment mark means.
Claim 3
Dependent Claim
19 words
A projection exposure apparatus according to claim 1, wherein said deflection means is provided on said common light path.
Claim 4
Dependent Claim
42 words
A projection exposure apparatus according to claim 1, wherein said optical means comprises multiple focus optical means for focusing a part of said second radiation beam onto said first plane and another part of said second radiation beam onto said second plane.
Claim 5
Dependent Claim
41 words
A projection exposure apparatus according to claim 1, further comprising alignment means for determining the relative positions of said first and second alignment mark means, based on said first and second radiation beams illuminating said first and second alignment mark means.