Patent US4886571A successfully refreshed from Google Patents.
US4886571A
Expired / Lapsed
US
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Surface treatment and apparatus therefor
Assignee: Hitachi Ltd
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Filing: 1989-01-27
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Granted: 1989-12-12
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Expires: 2009-01-27
Abstract
Abstract An apparatus for surface treating a sample article with activated particles, comprising a reaction chamber in which a sample article to be surface processed is placed, means for introducing a reaction gas into the reaction chamber, an activation surface properly set in the reaction chamber and arranged capable of activating at least one part of the particles composing the reaction gas, and means for evacuating the used reaction gas out of the reaction chamber.
Inventors
- 👤 Keizo Suzuki
- 👤 Susumu Hiraoka
- 👤 Shigeru Nishimatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:29
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; H; H10; H10P; H10P50/00; C23C16/45587; C23C16/45591; Y; Y10; Y10S; Y10S156/00; Y10S156/914
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
72 words
An apparatus for surface treating a sample article with activated particles, comprising a reaction chamber in which a sample article to be surface treated is placed, means for introducing a reaction gas into said reaction chamber, an activation surface set in said reaction chamber and arranged capable of activating at least one part of the particles composing said reaction gas, and means for evacuating the reaction gas out of said reaction chamber.
Claim 2
Independent Claim
72 words
An apparatus for surface treating a sample article with activated particles, comprising a reaction chamber in which a sample article to be surface treated is placed, means for introducing a reaction gas into said reaction chamber, an activation surface set in said reaction chamber and arranged capable of activating at least one part of the particles composing said reaction gas, and means for evacuating the reaction gas out of said reaction chamber.
Claim 3
Dependent Claim
19 words
The surface treating apparatus according to claim 1, wherein said activation surface has a temperature higher than room temperature.
Claim 4
Dependent Claim
16 words
The surface treating apparatus according to claim 1, wherein said activation surface has a catalytic action.
Claim 5
Dependent Claim
33 words
The surface treating apparatus according to claim 1, wherein said activation material is made of at least one material selected from SiO 2 , Al 2 O 3 , C, Si, and Si-C.
Claim 6
Dependent Claim
48 words
The surface treating apparatus according to claim 1, wherein said activation surface is made of at least one kind of metal selected from W, Mo, Ta, Ti, Ni, Nb and Pt, or a mixture or an alloy of two or more kinds of metal selected from said metals.
Claim 7
Dependent Claim
35 words
The surface treating apparatus according to claim 1, wherein said activation surface comprises at least one kind of material selected from stainless steel, ZrO 2 , W, TiO 2 , congelite and SiO 2 .
Claim 8
Dependent Claim
27 words
The surface treating apparatus according to claim 1, having means for controlling the temperature Ta of said activation temperature in the range of 100 to 3,000° C.
Claim 9
Dependent Claim
30 words
The surface treating apparatus according to claim 1, having means for controlling the temperature Ta of said activation surface and the temperature Ts of sample surface independently of each other.
Claim 10
Dependent Claim
23 words
The surface treating apparatus according to claim 8, having means for controlling said temperatures Ta and Ts so that Ta<Ts or Ts≦400° C.
Claim 11
Dependent Claim
14 words
The surface treating apparatus according to claim 1, wherein said activation surface has unevenness.
Claim 12
Dependent Claim
15 words
The surface treating apparatus according to claim 1, wherein said activation surface describes a curvature.
Claim 13
Dependent Claim
18 words
The surface treating apparatus according to claim 1, wherein said activation surface has a configuration of rotational symmetry.
Claim 14
Dependent Claim
17 words
The surface treating apparatus according to claim 1, wherein said gas is introduced through said activation surface.
Claim 15
Dependent Claim
17 words
The surface treating apparatus according to claim 1, having means for applying a voltage to said sample.
Claim 16
Dependent Claim
22 words
The surface processing apparatus according to claim 1, having means for applying a magnetic field between said activation surface and said sample.
Claim 17
Dependent Claim
22 words
The surface treating apparatus according to claim 1, wherein said gas comprises entirely or partly of the molecules containing a halogen element.
Claim 18
Dependent Claim
14 words
The surface treating apparatus according to claim 16, wherein said sample surface is etched.
Claim 19
Dependent Claim
23 words
The surface treating apparatus according to claim 1, wherein said gas comprises entirely or partly of the molecules containing oxygen or nitrogen element.
Claim 20
Dependent Claim
16 words
The surface treating apparatus according to claim 18, wherein said sample surface is oxidized or nitrided.
Claim 21
Dependent Claim
25 words
The surface treating apparatus according to claim 1, wherein the atoms contained in said reaction gas are deposited or epitaxially grown on said sample surface.
Claim 22
Dependent Claim
32 words
The surface treating apparatus according to claim 1, wherein the distance between said activation surface and the surface of said sample is shorter than the mean free path of said active particles.
Claim 23
Dependent Claim
27 words
The surface treating apparatus according to claim 1, wherein the distance between said activation surface and the surface of said sample is 50 cm to 1 mm.
Claim 24
Dependent Claim
20 words
The surface treating apparatus according to claim 1, wherein a collimeter is provided between said activation surface and said sample.
Claim 25
Dependent Claim
17 words
The surface treating apparatus according to claim 23, having means for controlling the temperature of said collimeter.
Claim 26
Dependent Claim
21 words
The surface treating apparatus according to claim 1, wherein a gate valve is provided between said activation surface and said sample.
Claim 27
Dependent Claim
40 words
The surface treating apparatus according to claim 1, wherein an auxiliary evacuation chamber designed for making an exchange of sample is provided beside said reaction chamber, and said reaction chamber and auxiliary evacuation chamber are connected by a gate valve.
Claim 28
Independent Claim
42 words
An apparatus for surface treating a sample article with active particles, comprising a reaction chamber in which a sample article to be surface processed is placed, and an activation surface set in said reaction chamber and arranged capable of forming active particles.
Claim 29
Independent Claim
42 words
An apparatus for surface treating a sample article with active particles, comprising a reaction chamber in which a sample article to be surface processed is placed, and an activation surface set in said reaction chamber and arranged capable of forming active particles.
Claim 30
Dependent Claim
49 words
The surface treating apparatus according to claim 27, having means for introducing a reaction gas into said reaction chamber from an outside source, and means for evacuating the used reaction gas out of said reaction chamber, wherein the particles in said reaction gas are ativated by said activation surface.
Claim 31
Dependent Claim
31 words
The surface treating apparatus according to claim 27, wherein the particles to be made into active particles are carried on said activation surface or in the material forming such activation surface.
Claim 32
Independent Claim
42 words
An apparatus for surface treating a sample article with active particles, comprising a sample article to be surface treated, an activation surface for forming the active particles, and means for holding said sample article and activation surface under a substantially same pressure.
Claim 33
Independent Claim
42 words
An apparatus for surface treating a sample article with active particles, comprising a sample article to be surface treated, an activation surface for forming the active particles, and means for holding said sample article and activation surface under a substantially same pressure.
Claim 34
Independent Claim
45 words
An apparatus for surface treating a sample article with active particles formed by an activation surface, comprising a sample article to be surface processed, an activation surface for forming active particles, and means for holding said sample article and activation surface under a same atmosphere.
Claim 35
Independent Claim
45 words
An apparatus for surface treating a sample article with active particles formed by an activation surface, comprising a sample article to be surface processed, an activation surface for forming active particles, and means for holding said sample article and activation surface under a same atmosphere.
Claim 36
Independent Claim
41 words
A method for surface treating a sample article with active particles formed by an activation surface, characterized in that the sample article to be surface treated and the activation surface for forming the active particles are maintained under a same atomsphere.
Claim 37
Independent Claim
41 words
A method for surface treating a sample article with active particles formed by an activation surface, characterized in that the sample article to be surface treated and the activation surface for forming the active particles are maintained under a same atomsphere.
References Cited (Backward Citations)
US4522674A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1992-12-11 | 1993-06-12 | 1993-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-11 | 1997-06-12 | 1997-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-11 | 2001-06-12 | 2001-12-12 | $7700.00 | Window Closed / Lapsed |