US4894311A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positive-working photoresist composition
Assignee: Fujifilm Holdings Corp
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Filing: 1987-10-29
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Granted: 1990-01-16
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Expires: 2007-10-29
Abstract
Abstract A positive-working photoresist composition containing an alkali-soluble novolak resin and a photosensitive compound represented by the formula <IMAGE> (I) wherein D1 and D2, which may be the same or different, each represents a 1,2-naphthoquinonediazido-5-sulfonyl group or a 1,2-naphthoquinonediazido-4-sulfonyl group; R1 and R2, which may be the same or different, each represents an alkoxy group, or an alkyl ester group; and a, b, c, and d each is 0 or an integer from 1 to 5, provided that (a+b)>/=1 and (c+d)>/=1. The photoresist composition is excellent in sensitivity and resolving power and forms a resist pattern having good sectional shape and high heat resistance on, for example, a semiconductor. The photoresist composition is also applicable for forming a resist pattern having a line width of less than 1 mu m.
Inventors
- 👤 Kazuya Uenishi
- 👤 Yasumasa Kawabe
- 👤 Tadayoshi Kokubo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 19:52
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
110 words
A positive-working photoresist composition for fine photofabrication comprising an alkali-soluble novolak resin in admixture with at least one photosensitive compound represented by formula (I) ##STR10## wherein D 1 and D 2 , which may be the same or different, each represents a 1,2-naphthoquinonediazido-5-sulfonyl group or a 1,2-naphthoquinonedizido-4-sulfonyl group; R 1 and R 2 , which may be the same or different, each represents an alkoxy group, or an alkyl ester group, and a, b, c, and d each is 0 or an integer from 1 to 5, provided that (a+b)≧1 and (c+d)≧1, wherein said resin and said photosensitive compound are present in sufficient amounts to provide a positive resist pattern.
Claim 2
Dependent Claim
110 words
A positive-working photoresist composition for fine photofabrication comprising an alkali-soluble novolak resin in admixture with at least one photosensitive compound represented by formula (I) ##STR10## wherein D 1 and D 2 , which may be the same or different, each represents a 1,2-naphthoquinonediazido-5-sulfonyl group or a 1,2-naphthoquinonedizido-4-sulfonyl group; R 1 and R 2 , which may be the same or different, each represents an alkoxy group, or an alkyl ester group, and a, b, c, and d each is 0 or an integer from 1 to 5, provided that (a+b)≧1 and (c+d)≧1, wherein said resin and said photosensitive compound are present in sufficient amounts to provide a positive resist pattern.
Claim 3
Dependent Claim
41 words
The photoresist composition as claimed in claim 1, wherein said alkoxy group contains from 1 to 4 carbon atoms; and said alkyl ester group is represented by R'COO--, wherein R' represents an alkyl group having from 1 to 4 carbon atoms.
Claim 4
Dependent Claim
28 words
The photoresist composition as claimed in claim 1, wherein (a+b) is an integer of from 2 to 5, and (c+d) is an integer of from 1 to 4.
Claim 5
Dependent Claim
18 words
The photoresist composition as claimed in claim 1, wherein D 1 and D 2 each represents 1,2-naphthoquinonediazido-5-sulfonyl chloride.
Claim 6
Dependent Claim
45 words
The photoresist composition as claimed in claim 1, whe rein said novolak resin is a phenolaldehyde resin comprising a phenol selected from the group consisting of phenol, o-cresol, m-cresol, p-cresol, and xylenol and an aldehyde selected from the group consisting of formaldehyde, p-formaldehyde, and furfural.
Claim 7
Dependent Claim
30 words
The photoresist composition as claimed in claim 1, comprising from about 5 to 100 parts by weight of said photosensitive compound per 100 parts by weight of said novolak resin.
Claim 8
Dependent Claim
30 words
The photoresist composition as claimed in claim 6, comprising from about 10 to 50 parts by weight of said photosensitive compound per 100 parts by weight of said novolak resin.
Claim 9
Dependent Claim
121 words
A photoresist for fine photofabrication comprising a base plate having thereon a photosensitive layer containing a positive-working photoresist composition containing an alkali-soluble novolak resin in admixture with at least one compound represented by formula (I) ##STR11## wherein D 1 and D 2 , which may be the same or different, each represents a 1,2-naphthoquinonediazido-5-sulfonyl group or a 1,2-naphthoquinonediazido-4-sulfonyl group; R 1 and R 2 , which may be the same or different, each represents an alkoxy group, or an alkyl ester group; and a, b, c and d each is 0 or an integer from 1 to 5, provided that (a+b)≧1 and (c+d)≧1, wherein said resin and said photosensitive compound are present in sufficient amounts to produce a positive resist pattern.
Claim 10
Dependent Claim
121 words
A photoresist for fine photofabrication comprising a base plate having thereon a photosensitive layer containing a positive-working photoresist composition containing an alkali-soluble novolak resin in admixture with at least one compound represented by formula (I) ##STR11## wherein D 1 and D 2 , which may be the same or different, each represents a 1,2-naphthoquinonediazido-5-sulfonyl group or a 1,2-naphthoquinonediazido-4-sulfonyl group; R 1 and R 2 , which may be the same or different, each represents an alkoxy group, or an alkyl ester group; and a, b, c and d each is 0 or an integer from 1 to 5, provided that (a+b)≧1 and (c+d)≧1, wherein said resin and said photosensitive compound are present in sufficient amounts to produce a positive resist pattern.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-15 | 1993-07-17 | 1994-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-15 | 1997-07-17 | 1998-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-15 | 2001-07-17 | 2002-01-16 | $7700.00 | Window Closed / Lapsed |