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US4903112A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor component with contact hole

Assignee: Siemens AG
•
Filing: 1988-06-22
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Granted: 1990-02-20
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Expires: 2008-06-22
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Abstract

Abstract A semiconductor component. The semiconductor component has two superimposed semiconductor layers of different conduction materials. An upper layer is provided with an opening through which a lower layer is exposed. A space saving scheme for connecting electrically the two layers is provided, by depositing a connecting layer which contacts the upper layer at an edge only and the lower layer is contacted at its depth where its doping material maximum is located. This requires a doping equal to or greater than 10 19 cm -3 for the upper layer, which is dependent on thickness.

Inventors

  • 👤 Helmut Strack
  • 👤 Gottfried Schuh

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 11:31
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/13; H10D62/149; H10D62/151; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0113; H10W; H10W20/00; H10W20/40; Y; Y10; Y10S; Y10S257/00; Y10S257/914

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 158 words
A semiconductor component comprising: a semiconductor substrate having an upper side; a first layer of a first conductivity type having upper and lower sides with a predetermined separation therebetween, said lower side being supported on said upper side of said semiconductor substrate, said first layer having a doping concentration exhibiting a maximum concentration at a depth below said upper side of said first layer, said upper side of said first layer having therein a depression having a bottom located substantially at said depth of said maximum concentration; a second layer of a second conductivity type having a doping concentration greater than 10 19 cm -3 and being supported on said upper side of said first layer, said second layer having therein an opening to expose said depression; and a conducting layer interconnecting said first and second layers, said conducting layer contacting said first layer at said depression and contacting said second layer at a wall of said opening.
Claim 2
Dependent Claim 158 words
A semiconductor component comprising: a semiconductor substrate having an upper side; a first layer of a first conductivity type having upper and lower sides with a predetermined separation therebetween, said lower side being supported on said upper side of said semiconductor substrate, said first layer having a doping concentration exhibiting a maximum concentration at a depth below said upper side of said first layer, said upper side of said first layer having therein a depression having a bottom located substantially at said depth of said maximum concentration; a second layer of a second conductivity type having a doping concentration greater than 10 19 cm -3 and being supported on said upper side of said first layer, said second layer having therein an opening to expose said depression; and a conducting layer interconnecting said first and second layers, said conducting layer contacting said first layer at said depression and contacting said second layer at a wall of said opening.
Claim 3
Dependent Claim 23 words
A semiconductor component according to claim 1, wherein said opening in said second layer tapers down in a funnel shape towards said substrate.
Claim 4
Dependent Claim 19 words
A semiconductor component according to claim 1, including an insulating layer covering a top surface of said second layer.
Claim 5
Dependent Claim 23 words
A semiconductor component according to claim 3, wherein said opening in said second layer tapers down in a funnel shape towards said substrate.
Claim 6
Dependent Claim 40 words
A semiconductor component according to claim 3, wherein said insulating layer has an opening therein above said opening in said second layer and wherein said opening in said insulating layer tapers down in a funnel shape towards said second layer.
Claim 7
Dependent Claim 40 words
A semiconductor component according to claim 4, wherein said insulating layer has an opening therein above said opening in said second layer and wherein said opening in said insulating layer tapers down in a funnel shape towards said second layer.

References Cited (Backward Citations)

US3969745A Cited
US4143384A Cited
FR2362492A1 Cited
US4194933A Cited
US4200968A Cited
US4408384A Cited
US4502069A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-02-19 1993-08-21 1994-02-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-02-19 1997-08-21 1998-02-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-02-19 2001-08-21 2002-02-20 $7700.00 Window Closed / Lapsed

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