Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
33 words
A vacuum chuck which comprises a chuck base and a suction head formed of a porous body of sintered particles of a thermoplastic resin having open pores which serve as the vacuum ducts.
Claim 2
Dependent Claim
33 words
A vacuum chuck which comprises a chuck base and a suction head formed of a porous body of sintered particles of a thermoplastic resin having open pores which serve as the vacuum ducts.
Claim 3
Dependent Claim
30 words
The vacuum chuck as claimed in claim 1 wherein the porous body is a sintered powder blend composed of particles of a thermoplastic resin and particles of a thermosetting resin.
Claim 4
Dependent Claim
16 words
The vacuum chuck as claimed in claim 1 wherien the thermoplastic resin is a fluorocarbon resin.
Claim 5
Dependent Claim
16 words
The vacuum chuck as claimed in claim 1 wherein the thermoplastic resin is a polyamide resin.
Claim 6
Dependent Claim
22 words
The vacuum chuck as claimed in claim 1 wherein the chuck base and the suction head are adhesively bonded to each other.
Claim 7
Dependent Claim
22 words
The vacuum chuck as claimed in claim 1 wherein the porous body has a porosity in the range from 10% to 70%.
Claim 8
Dependent Claim
28 words
The vacuum chuck as claimed in claim 1 wherein the porous body has open pores having a pore diameter in the range from 1 μm to 1000 μm.
Claim 9
Dependent Claim
30 words
The vacuum chuck as claimed in claim 2 wherein the amount of the thermosetting resin is in the range from 3% to 30% by weight based on the thermoplastic resin.
Claim 10
Dependent Claim
50 words
A vacuum chuck which comprises a chuck base and a flat suction head plate having peripheral side surfaces, said head plate being formed from sintered particles of a thermoplastic resin having open pores which serve as the vacuum ducts and wherein the peripheral surfaces have been rendered impermeable to air.
Claim 11
Dependent Claim
50 words
A vacuum chuck which comprises a chuck base and a flat suction head plate having peripheral side surfaces, said head plate being formed from sintered particles of a thermoplastic resin having open pores which serve as the vacuum ducts and wherein the peripheral surfaces have been rendered impermeable to air.
Claim 12
Dependent Claim
30 words
The vacuum chuck as claimed in claim 9 wherein the porous body is a sintered powder blend composed of particles of a thermoplastic resin and particles of a thermosetting resin.
Claim 13
Dependent Claim
16 words
The vacuum chuck as claimed in claim 9 wherein the thermoplastic resin is a fluorocarbon resin.
Claim 14
Dependent Claim
16 words
The vacuum chuck as claimed in claim 9 wherein the thermoplastic resin is a polyamide resin.
Claim 15
Dependent Claim
22 words
The vacuum chuck as claimed in claim 9 wherein the chuck base and the suction head are adhesively bonded to each other.
Claim 16
Dependent Claim
22 words
The vacuum chuck as claimed in claim 9 wherein the porous body has a porosity in the range from 10% to 70%.
Claim 17
Dependent Claim
28 words
The vacuum chuck as claimed in claim 9 wherein the porous body has open pores having a pore diameter in the range from 1 μm to 1000 μm.
Claim 18
Dependent Claim
30 words
The vacuum chuck as claimed in claim 10 wherein the amount of the thermosetting resin is in the range from 3% to 30% by weight based on the thermoplastic resin.
Claim 19
Dependent Claim
22 words
The vacuum chuck of claim 9 wherein the peripheral surfaces have an adhesive layer thereon thereby rendering the surfaces impermeable to air.
Claim 20
Dependent Claim
23 words
The vacuum chuck of claim 9 wherein the peripheral surfaces have a thermoplastic resin layer thereon thereby rendering the surfaces impermeable to air.
Claim 21
Dependent Claim
27 words
The vacuum chuck of claim 9 wherein the peripheral surfaces have been heat treated to seal any open pores therein thereby rendering the surfaces impermeable to air.