Patent US4926549A successfully refreshed from Google Patents.
US4926549A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing electrical connection members
Assignee: Canon Inc
•
Filing: 1989-05-30
•
Granted: 1990-05-22
•
Expires: 2009-05-30
Abstract
Abstract A method of producing electrical connection members includes the steps of forming a carrier on a first electrically conductive member, etching holes in portions of the carrier to expose first electrically conductive member in the holes, and etching the portions of the first electrically conductive member which are exposed in the respective holes to form recesses in the first electrically conductive member so that each of the recesses has a diameter larger than the diameter of a corresponding one of the holes. The respective holes formed in the carrier are filled with second electrically conductive members, and then the first electrically conductive member is removed from the carrier. With this method, it is possible to easily produce electrical connection members in which high density electrical connecting portions can be provided and in which the reliability and security of electrical connections can be improved.
Inventors
- 👤 Tetsuo Yoshizawa
- 👤 Yoshimi Terayama
- 👤 Hiroshi Kondo
- 👤 Takashi Sakaki
- 👤 Shunichi Haga
- 👤 Yasuteru Ichida
- 👤 Masaki Konishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:48
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H10W70/01; H10W70/05; H10W70/095; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49204; Y10T29/49208
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
71 words
A method of producing an electrical connection member, comprising the steps of: applying a carrier containing a light-sensitive resin onto a first electrically conductive member; forming holes in predetermined portions of the carrier to form a pattern and expose the first electrically conductive member through each of the holes; filling each hole in the carrier with a second electrically conductive member; and removing the first electrically conductive member from the carrier.
Claim 2
Independent Claim
71 words
A method of producing an electrical connection member, comprising the steps of: applying a carrier containing a light-sensitive resin onto a first electrically conductive member; forming holes in predetermined portions of the carrier to form a pattern and expose the first electrically conductive member through each of the holes; filling each hole in the carrier with a second electrically conductive member; and removing the first electrically conductive member from the carrier.
Claim 3
Dependent Claim
63 words
A method according to claim 1, further comprising the step of etching the portions of the first electrically conductive member exposed through the holes formed in the carrier to form in the first electrically conductive member recesses corresponding to the holes before filling the holes, so that each recess has a diameter larger than the diameter of a corresponding hole in the carrier.
Claim 4
Dependent Claim
44 words
A method according to claim 2, wherein each second electrically conductive member is filled into the respective recess formed in the first electrically conductive member, the second electrically conductive members forming bumps which have protruding configurations and comprise part of an electrical connection member.
Claim 5
Dependent Claim
23 words
A method according to claim 1, further comprising the step of forming a wiring pattern on at least one surface of the carrier.
Claim 6
Dependent Claim
25 words
A method according to claim 1, wherein each second electrically conductive member has a bump-like configuration which projects above a corresponding surface of the carrier.
Claim 7
Dependent Claim
51 words
A method according to claim 1, further comprising the step of connecting the second electrically conductive members to respective connecting portions of an electrical circuit part by using either one of a metal and a metallic alloy to fuse the contacting surfaces of the connecting portions and second electrically conductive members.
Claim 8
Dependent Claim
23 words
A method according to claim 6, wherein the fusing step uses either one of an internal heating process and an external heating process.
Claim 9
Dependent Claim
40 words
A method according to claim 1, further comprising the step of connecting the second electrically conductive members to respective connecting portions of a probe card for measuring electrical characteristics of an electrical circuit member in contact with the probe card.
Claim 10
Independent Claim
111 words
A method of producing an electrical connection member, comprising the steps of: applying a carrier on a first electrically conductive member; forming holes in predetermined portions of the carrier by exposing the predetermined portions to light and etching the predetermined portions to expose the first electrically conductive member through each of the holes; etching the portions of the first electrically conductive member exposed through the holes formed in the carrier to form recesses therein so that each recess has a diameter larger than the diameter of a corresponding hole; filling each hole in the carrier with a second electrically conductive member; and removing the first electrically conductive member from the carrier.
Claim 11
Independent Claim
111 words
A method of producing an electrical connection member, comprising the steps of: applying a carrier on a first electrically conductive member; forming holes in predetermined portions of the carrier by exposing the predetermined portions to light and etching the predetermined portions to expose the first electrically conductive member through each of the holes; etching the portions of the first electrically conductive member exposed through the holes formed in the carrier to form recesses therein so that each recess has a diameter larger than the diameter of a corresponding hole; filling each hole in the carrier with a second electrically conductive member; and removing the first electrically conductive member from the carrier.
Claim 12
Dependent Claim
26 words
A method according to claim 9, wherein the carrier is made of a material which contains a resin which varies in hardness when illuminated with light.
Claim 13
Dependent Claim
26 words
A method according to claim 9, further comprising the step of forming a wiring pattern on at least one of the opposite surfaces of the carrier.
Claim 14
Dependent Claim
25 words
A method according to claim 9, wherein each second electrically conductive member has a bump-like configuration which projects above a corresponding surface of the carrier.
Claim 15
Dependent Claim
44 words
A method according to claim 9, wherein the second electrically conductive member is filled into the respective recess formed in the first electrically conductive member, the second electrically conductive members forming bumps which have protruding configurations and comprise part of an electrical connection member.
Claim 16
Dependent Claim
52 words
A method according to claim 9, further comprising the step of connecting the second electrically conductive members to respective connecting portions of an electrical circuit part by using either one of a metal and a metallic alloy to fuse the contacting surfaces of the connecting portions and the second electrically conductive members.
Claim 17
Dependent Claim
23 words
A method according to claim 14, wherein the fusing step uses either one of an internal heating process and an external heating process.
Claim 18
Dependent Claim
40 words
A method according to claim 9, further comprising the step of connecting the second electrically conductive members to respective connecting portions of a probe card for measuring electrical characteristics of an electrical circuit member in contact with the probe card.
Claim 19
Independent Claim
126 words
A method of producing an electrical connection member, comprising the steps of: applying a first carrier containing a light-sensitive resin on a first electrically conductive member; forming holes in predetermined portions of the first carrier to expose the first electrically conductive member through each of the holes; filling each hole in the first carrier with a second electrically conductive member; applying a second carrier containing a light-sensitive resin on the first carrier having holes filled with the second electrically conductive members; forming holes in predetermined portions of the second carrier to expose the second electrically conductive member through each of the holes; filling each hole in the second carrier with a third electrically conductive member; and removing the first electrically conductive member from the first carrier.
Claim 20
Independent Claim
126 words
A method of producing an electrical connection member, comprising the steps of: applying a first carrier containing a light-sensitive resin on a first electrically conductive member; forming holes in predetermined portions of the first carrier to expose the first electrically conductive member through each of the holes; filling each hole in the first carrier with a second electrically conductive member; applying a second carrier containing a light-sensitive resin on the first carrier having holes filled with the second electrically conductive members; forming holes in predetermined portions of the second carrier to expose the second electrically conductive member through each of the holes; filling each hole in the second carrier with a third electrically conductive member; and removing the first electrically conductive member from the first carrier.
Claim 21
Dependent Claim
65 words
A method according to claim 17, further comprising the step of etching the portions of the first electrically conductive member exposed through the holes formed in the first carrier to form in the first electrically conductive member recesses corresponding to the holes before filling the holes, so that each recess has a diameter larger than the diameter of a corresponding hole in the first carrier.
Claim 22
Dependent Claim
45 words
A method according to claim 18, wherein each second electrically conductive member is filled into the respective recess formed in the first electrically conductive member, the second electrically conductive members forming bumps which have protruding configurations and which comprise part of an electrical connection member.
Claim 23
Dependent Claim
32 words
A method according to claim 17, further comprising the step of forming a wiring pattern on either or both of the surfaces of the first carrier and the second electrically conductive member.
Claim 24
Dependent Claim
34 words
A method according to claim 17, wherein each second electrically conductive member and third electrically conductive member has a bump-like configuration which projects above a corresponding surface of the first and second carriers, respectively.
Claim 25
Dependent Claim
75 words
A method according to claim 17, further comprising the step of connecting the second electrically conductive members exposed at one surface of the first carrier and the third electrically conductive members exposed at an opposite facing surface of the second carrier to respective connecting portions of an electrical circuit part by fusing contacting surfaces of the connecting portions and second and third electrically conductive members with either one of a metal and a metallic alloy.
Claim 26
Dependent Claim
23 words
A method according to claim 22, wherein the fusing step uses either one of a internal heating process and an external heating process.
Claim 27
Dependent Claim
68 words
A method according to claim 17, further comprising the step of connecting the third electrically conductive member exposed at one surface of the first carrier to respective connecting portions of a probe card, and the second electrically conductive members are exposed at an opposite facing surface of the second carrier for measuring the electrical characteristics of a member in contact with respective connecting portions of the probe card.
Claim 28
Dependent Claim
64 words
A method according to claim 17, wherein the steps of applying a second carrier containing a light sensitive resin on the first carrier, forming holes in predetermined portions of the second carrier to expose the second electrically conductive member through each of the holes, and filling each hole formed in the second carrier with a third electrically conductive member, are performed at least once.
Claim 29
Independent Claim
158 words
A method of producing an electrical connection member, comprising the steps of: applying a first carrier on a first electrically conductive member; forming holes in predetermined portions of the first carrier to expose the first electrically conductive member through each of the holes; etching the portions of the first electrically conductive member exposed through the holes formed in the first carrier to form recesses therein such that each recess has a diameter larger than the diameter of a corresponding hole; filling each hole in the first carrier with a second electrically conductive member; applying a second carrier containing a light-sensitive resin on the first carrier having the holes filled with the second electrically conductive members; forming holes in predetermined portions of the second carrier to expose the second electrically conductive member through the holes; filling each hole in the second carrier with a third electrically conductive member; and removing the first electrically conductive member from the first carrier.
Claim 30
Independent Claim
158 words
A method of producing an electrical connection member, comprising the steps of: applying a first carrier on a first electrically conductive member; forming holes in predetermined portions of the first carrier to expose the first electrically conductive member through each of the holes; etching the portions of the first electrically conductive member exposed through the holes formed in the first carrier to form recesses therein such that each recess has a diameter larger than the diameter of a corresponding hole; filling each hole in the first carrier with a second electrically conductive member; applying a second carrier containing a light-sensitive resin on the first carrier having the holes filled with the second electrically conductive members; forming holes in predetermined portions of the second carrier to expose the second electrically conductive member through the holes; filling each hole in the second carrier with a third electrically conductive member; and removing the first electrically conductive member from the first carrier.
Claim 31
Dependent Claim
27 words
A method according to claim 26, wherein the first carrier is made of a material which contains a resin which varies in hardness when illuminated with light.
Claim 32
Dependent Claim
32 words
A method according to claim 26, further comprising the step of forming a wiring pattern on the surface of at least one of the first carrier and the second electrically conductive members.
Claim 33
Dependent Claim
33 words
A method according to claim 26, wherein each second electrically conductive member and third electrically conductive members has a bump-like configuration which projects above opposite facing surfaces of the first and second carriers.
Claim 34
Dependent Claim
45 words
A method according to claim 26, wherein each second electrically conductive member is filled into the respective recess formed in the first electrically conductive member, the second electrically conductive membes forming bumps which have protruding configuration and which comprise part of an electrical connection member.
Claim 35
Dependent Claim
73 words
A method according to claim 26, further comprising the step of connecting the second electrically conductive members exposed at one surface of the first carrier and the third electrically conductive members exposed at the opposite facing surface of the second carrier to respective connecting portions of an electrical circuit part by fusing contacting surfaces of the connecting portions and the second and third electrically conductive members with a metal or a metallic alloy.
Claim 36
Dependent Claim
23 words
A method according to claim 31, wherein the fusing step uses either one of an internal heating process and an external heating process.
Claim 37
Dependent Claim
69 words
A method according to claim 26, further comprising the step of connecting the third electrically conductive member exposed at one surface of the first carrier to respective connecting portions of a probe card, and the second electrically conductive members are exposed at the opposite facing surface of the second carrier for measuring the electrical characteristics of an electrical member in contact with respective connecting portions of the probe card.
Claim 38
Dependent Claim
72 words
A method according to claim 26, wherein the steps of applying a second carrier containing a light-sensitive resin on the first carrier having the holes filled with the second electrically conductive members, forming holes in predetermined portions of the second carrier to expose the second electrically conductive member through the holes, and filling each of the respective holes in the second carrier with third electrically conductive members, are performed at least once.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-05-21 | 1993-11-20 | 1994-05-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-21 | 1997-11-20 | 1998-05-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-21 | 2001-11-20 | 2002-05-22 | $7700.00 | Window Closed / Lapsed |