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Patent US4929923A successfully refreshed from Google Patents.
US4929923A
Expired / Lapsed
US
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Thin film resistors and method of trimming
Assignee: Intersil Corp
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Filing: 1989-05-26
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Granted: 1990-05-29
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Expires: 2009-05-26
Abstract
Abstract A resistor having a first portion of a high resistivity material and a second portion of a low resistivity material and laser trimming the low resistivity material portion.
Inventors
- 👤 Vineet S. Dharmadhikari
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:18
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/22; H01C17/24; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49099
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
75 words
A method of trimming resistors in an integrated circuit comprising: forming a first resistor on a substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; and trimming at least a selective portion of said second portion of said first resistor to increase the total resistance of said resistor over a range of resistances.
Claim 2
Independent Claim
75 words
A method of trimming resistors in an integrated circuit comprising: forming a first resistor on a substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; and trimming at least a selective portion of said second portion of said first resistor to increase the total resistance of said resistor over a range of resistances.
Claim 3
Dependent Claim
27 words
A method according to claim 1, wherein said first material is selected to have a resistivity of at least five times the resistivity of said second material.
Claim 4
Dependent Claim
34 words
A method according to claim 1, wherein said first material is selected from the group of chrome-silicide or cermets, and the second material is selected from the group of nickel-chromium (nichrome) or tantalum nitride.
Claim 5
Dependent Claim
28 words
A method according to claim 3, including connecting said first and second portions of said resistor by a conductor selected from the group of aluminum alloys, copper, gold.
Claim 6
Dependent Claim
25 words
A method according to claim 1, wherein said first resistor is formed with said first and second portion connected in series electrically on said substrate.
Claim 7
Dependent Claim
28 words
A method according to claim 1, wherein said first and second portions are formed to each have a thickness in the range of 80 A° to 1000 A°.
Claim 8
Dependent Claim
17 words
A method according to claim 1, wherein said trimming includes subjecting said second portion to a laser.
Claim 9
Dependent Claim
70 words
An integrated circuit comprising: a substrate; a first resistor on said substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; and wherein at least a selective portion of said second portion has been trimmed to increase the total resistance of said first resistor over a range of resistances.
Claim 10
Dependent Claim
70 words
An integrated circuit comprising: a substrate; a first resistor on said substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; and wherein at least a selective portion of said second portion has been trimmed to increase the total resistance of said first resistor over a range of resistances.
Claim 11
Dependent Claim
25 words
An integrated circuit according to claim 8, wherein said first and second portions of said first resistor are connected in series electrically on said substrate.
Claim 12
Dependent Claim
25 words
An integrated circuit according to claim 8, wherein said first material has a resistivity of at least five times the resistivity of said second material.
Claim 13
Dependent Claim
36 words
An integrated circuit according to claim 8, wherein said first material is selected from the group of chrome silicide or cermets, and the second material is selected from the group of nickel-chromium (nichrome) or tantalum nitride.
Claim 14
Dependent Claim
28 words
An integrated circuit according to claim 8, wherein a conductor connects said first and second portions of said resistor selected from the group of aluminum alloys, copper, gold.
Claim 15
Dependent Claim
26 words
An integrated circuit according to claim 8, wherein said first and second portions each have a thickness in the range of 80 A° to 1000 A°.
Claim 16
Dependent Claim
96 words
An integrated circuit comprising: a substrate; a first resistor on said substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; a second resistor on said substrate of said first material having a total resistance more than the total resistance of said first resistor before trimming; and wherein said second portion of said first resistor has been trimmed to match said total resistance of said first resistor to said total resistance of said second resistor.
Claim 17
Dependent Claim
96 words
An integrated circuit comprising: a substrate; a first resistor on said substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; a second resistor on said substrate of said first material having a total resistance more than the total resistance of said first resistor before trimming; and wherein said second portion of said first resistor has been trimmed to match said total resistance of said first resistor to said total resistance of said second resistor.
Claim 18
Dependent Claim
97 words
An integrated circuit comprising: a substrate; a first resistor on said substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; a second resistor on said substrate having a first portion of said first material and a second portion of said second material; and wherein at least a selective portion of the second portion of the resistor having the smaller total resistance has been trimmed to match the total resistances of the first and second resistors.
Claim 19
Dependent Claim
97 words
An integrated circuit comprising: a substrate; a first resistor on said substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; a second resistor on said substrate having a first portion of said first material and a second portion of said second material; and wherein at least a selective portion of the second portion of the resistor having the smaller total resistance has been trimmed to match the total resistances of the first and second resistors.
Claim 20
Independent Claim
98 words
A method of trimming resistors in an integrated circuit comprising: forming a first resistor on a substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; forming a second resistor on said substrate of said first material to have a total resistance more than the total resistance of said first resistor; and trimming said second portion of said first resistor to match said total resistance of said first resistor to said total resistance of said second resistor.
Claim 21
Independent Claim
98 words
A method of trimming resistors in an integrated circuit comprising: forming a first resistor on a substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; forming a second resistor on said substrate of said first material to have a total resistance more than the total resistance of said first resistor; and trimming said second portion of said first resistor to match said total resistance of said first resistor to said total resistance of said second resistor.
Claim 22
Independent Claim
100 words
A method of trimming resistors in an integrated circuit comprising: forming a first resistor on a substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; forming a second resistor on said substrate having a first portion of said first material and a second portion of said second material; and trimming at least a selective portion of said second portion of the resistor having the smaller total resistance to match the total resistances of the first and second resistors.
Claim 23
Independent Claim
100 words
A method of trimming resistors in an integrated circuit comprising: forming a first resistor on a substrate having a first portion of a first material having a first resistivity and a second portion of a second material having a second resistivity substantially smaller than said first resistivity; forming a second resistor on said substrate having a first portion of said first material and a second portion of said second material; and trimming at least a selective portion of said second portion of the resistor having the smaller total resistance to match the total resistances of the first and second resistors.
References Cited (Backward Citations)
US3864825A
Cited
US4846949A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-05-28 | 1993-11-27 | 1994-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-28 | 1997-11-27 | 1998-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-28 | 2001-11-27 | 2002-05-29 | $7700.00 | Window Closed / Lapsed |