Patent US4944837A successfully refreshed from Google Patents.
US4944837A
Expired / Lapsed
US
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Method of processing an article in a supercritical atmosphere
Assignee: Hoya Corp
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Filing: 1989-02-28
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Granted: 1990-07-31
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Expires: 2009-02-28
Abstract
Abstract In a method of processing an article, the article is introduced into a supercritical atmosphere which is formed in a pressure vessel and which atmosphere comprises carbon dioxide. When the article comprises an exposed resist film on a surface layer formed on a substrate, the exposed resist film is selectively removed to leave a predetermined pattern in the supercritical atmosphere and is thus processed into a patterned resist film. After the surface layer is selectively etched through the patterned resist film to form a patterned surface layer, the patterned resist film may be introduced into the supercritical atmosphere to be completely removed from the patterned surface layer. On processing the article, such as a compact disc, a mechanical parts, or the like, the article may be also introduced into the supercritical atmosphere to be cleaned up.
Inventors
- 👤 Masaru Nishikawa
- 👤 Kazumichi Nakagawa
- 👤 Yohichi Yamaguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:01
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/36
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
122 words
A method of forming a patterned resist film having a predetermined pattern on a surface layer formed on a substrate, said method comprising the steps of depositing a resist film on said surface layer, pre-processing said resist film into a pre-processed resist film which is attached to said surface layer and which has a latent image of said predetermined pattern, and processing said pre-processed resist film into said patterned resist film, said processing step comprising the steps of: introducing said pre-processed resist film together with said substrate into a supercritical atmosphere; and developing said pre-processed resist film in said supercritical atmosphere to selectively remove said pre-processed resist film in accordance with said latent image and to thereby form said patterned resist film.
Claim 2
Independent Claim
122 words
A method of forming a patterned resist film having a predetermined pattern on a surface layer formed on a substrate, said method comprising the steps of depositing a resist film on said surface layer, pre-processing said resist film into a pre-processed resist film which is attached to said surface layer and which has a latent image of said predetermined pattern, and processing said pre-processed resist film into said patterned resist film, said processing step comprising the steps of: introducing said pre-processed resist film together with said substrate into a supercritical atmosphere; and developing said pre-processed resist film in said supercritical atmosphere to selectively remove said pre-processed resist film in accordance with said latent image and to thereby form said patterned resist film.
Claim 3
Dependent Claim
54 words
A method as claimed in claim 1, said pre-processed resist film introducing step comprising the steps of: positioning said pre-processed resist film together with said substrate within a pressure vessel; supplying said pressure vessel with a fluid of a predetermined volume; and putting said fluid into a supercritical fluid to provide said supercritical atmosphere.
Claim 4
Dependent Claim
32 words
A method as claimed in claim 2, said fluid supplying step comprising the steps of: entering a gaseous fluid into said pressure vessel; and cooling said gaseous fluid into a liquefied fluid.
Claim 5
Dependent Claim
12 words
A method as claimed in claim 2, wherein said fluid is liquefied.
Claim 6
Dependent Claim
37 words
A method as claimed in claim 3, wherein said supercritical fluid has a density which is not lower than that of said liquefied fluid to keep said pressure vessel at a pressure higher than the atmospheric pressure.
Claim 7
Dependent Claim
71 words
A method as claimed in claim 5, said pressure vessel being kept at an initial temperature lowre than a predetermined temperature corresponding to a critical temperature of said liquefied fluid in said supplying step, wherein said pre-processed resist film putting step comprises the step of: raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said liquefied fluid into said supercritical fluid.
Claim 8
Dependent Claim
59 words
A method as claimed in claim 6, said pre-processed resist film developing step comprising the steps of: keeping said prescribed temperature during a predetermined time duration to develop said pre-processed resist film to said patterned resist film; and lowering the temperature of said pressure vessel to said initial temperatuure to thereby convert said supercritical fluid into said liquiefied fluid.
Claim 9
Dependent Claim
33 words
A method as claimed in claim 7, wherein said liquefied fluid is a material selected from the group consisting of carbon dioxide, inert gases, an assortment of hydrocarbons and fluorocarbons, halogens, an oxygen.
Claim 10
Independent Claim
85 words
A method of forming a patterned surface layer on a substrate, said method comprising the steps of: forming an unpatterned surface layer on said substrate; forming a patterned resist film on said unpatterned surface layer; selectively removing said unpatterned surfaced layer through said patterned resist film to form said patterned surface layer; introducing said patterned resist film into a supercritical atmosphere together with said substrate having said patterned surface layer; and removing said patterned resist film from said patterned surface layer within said supercritical atmosphere.
Claim 11
Independent Claim
85 words
A method of forming a patterned surface layer on a substrate, said method comprising the steps of: forming an unpatterned surface layer on said substrate; forming a patterned resist film on said unpatterned surface layer; selectively removing said unpatterned surfaced layer through said patterned resist film to form said patterned surface layer; introducing said patterned resist film into a supercritical atmosphere together with said substrate having said patterned surface layer; and removing said patterned resist film from said patterned surface layer within said supercritical atmosphere.
Claim 12
Dependent Claim
65 words
A method as claimed in claim 9, wherein said patterned resist film introducing step comprises the steps of: positioning said patterned resist film within a pressure vessel with said patterned surface layer attached to said substrate; supplying said pressure vessel with a fluid at a predetermined volume; and putting said fluid into a supercritical fluid to introduce said patterned resist film into said supercritical atmosphere.
Claim 13
Dependent Claim
32 words
A method as claimed in claim 10, said fluid supplying step comprising the steps of: entering a gaseous fluid into said pressure vessel; and cooling said gaseous fluid into a liquefied fluid.
Claim 14
Dependent Claim
12 words
A method as claimed in claim 10, wherein said fluid is liquefied.
Claim 15
Dependent Claim
37 words
A method as claimed in claim 11, wherein said supercritical fluid has a density which is not lower than that of said liquefied fluid to keep said pressure vessel at a pressure higher than the atmospheric pressure.
Claim 16
Dependent Claim
70 words
A method as claimed in claim 11, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to a critical temperature of said liquefied fluid in supplying step, wherein said patterned resist film putting step comprising the step of: raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said liquefied fluid into said supercritical fluid.
Claim 17
Dependent Claim
59 words
A method as claimed in claim 14, said patterned resist film removing step comprising the steps of: keeping said prescribed temperature during a predetermined time duration to remove said patterned resist film from said patterned surface layer; and lowering the temperature of said pressure vessel to said predetermined temperature to thereby convert said supercritical fluid into said liquefied fluid.
Claim 18
Dependent Claim
33 words
A method as claimed in claim 15, wherein said liquefied fluid is a material selected from the group consisting of carbon dioxide, inert gases, an assortment of hydrocarbons and fluorocarbons, halogens, and oxygen.
Claim 19
Dependent Claim
19 words
A method as claimed in claim 16, wherein said liquefied fluid includes an organic solvent of a prescribed amount.
Claim 20
Dependent Claim
70 words
A method as claimed in claim 3, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to a critical temperature of said liquefied fluid in supplying step, wherein said patterned resist film putting step comprising the step of: raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said liquefied fluid into said supercritical fluid.
Claim 21
Independent Claim
120 words
A method of washing a patterned surface layer on a substrate within a pressure vessel, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to the critical temperature of a fluid of a predetermined volume which is supplied to said pressure vessel, said method comprising the steps of: positioning said patterned surface layer together with said substrate within said pressure vessel; supplying said pressure vessel with said fluid; raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said fluid into a supercritical state; and maintaining said prescribed temperature for a predetermined duration of time to wash said patterned surface layer within said supercritical fluid.
Claim 22
Independent Claim
120 words
A method of washing a patterned surface layer on a substrate within a pressure vessel, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to the critical temperature of a fluid of a predetermined volume which is supplied to said pressure vessel, said method comprising the steps of: positioning said patterned surface layer together with said substrate within said pressure vessel; supplying said pressure vessel with said fluid; raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said fluid into a supercritical state; and maintaining said prescribed temperature for a predetermined duration of time to wash said patterned surface layer within said supercritical fluid.
Claim 23
Independent Claim
107 words
A method of washing an article within a pressure vessel, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to a critical temperature of a fluid of a predetermined volume which is supplied to said pressure vessel, said method comprising the steps of: positioning said article within said pressure vessel; supplying said pressure vessel with said fluid; raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said fluid into a supercritical state; and maintaining said prescribed temperature for a predetermined duration of time to wash said article within said supercritical fluid.
Claim 24
Independent Claim
107 words
A method of washing an article within a pressure vessel, said pressure vessel being kept at an initial temperature lower than a predetermined temperature corresponding to a critical temperature of a fluid of a predetermined volume which is supplied to said pressure vessel, said method comprising the steps of: positioning said article within said pressure vessel; supplying said pressure vessel with said fluid; raising the temperature of said pressure vessel to a prescribed temperature higher than said critical temperature to thereby convert said fluid into a supercritical state; and maintaining said prescribed temperature for a predetermined duration of time to wash said article within said supercritical fluid.
References Cited (Backward Citations)
US4341592A
Cited
USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 1993-07-30 | 1994-01-29 | 1994-07-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-30 | 1998-01-29 | 1998-07-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-30 | 2002-01-29 | 2002-07-31 | $7700.00 | Window Closed / Lapsed |