Tuning method and control system for automatic matching network

Claim 2

In a system with a power generator having an output impedance and a load having an input impedance, a method for using a matching network to match the output impedance of the power generator and the input impedance of the load, the matching network including a first magnetically saturable reactor composed of a transformer having primary and secondary windings wound around a non-linear ferromagnetic core and a second magnetically saturable reactor composed of a transformer having primary and secondary windings wound around a non-linear ferromagnetic core, the method comprising the steps of: (a) varying, by use of a first current amplifier, current through the secondary winding of the first magnetically saturable reactor at a first determined frequency; (b) varying, by use of a second current amplifier, current through the secondary winding of the second magnetically saturable reactor at a second determined frequency; (c) detecting changes in power reflected from the matching network to the power generator; (d) for the changes in power detected in step (c) separating an electrical component of change due to the varying of the current through the secondary winding of the first magnetically saturable reactor in step (a) from an electrical component of change due to the varying of the current through the secondary winding of the second magnetically saturable reactor in step (b); and (e) adjusting steady state current through the secondary winding of the first magnetically saturable reactor and current through the secondary winding of the second magnetically saturable reactor based on the electrical components separated in step (d).

Claim 3

A method as in claim 1 wherein the first determined frequency equals the second determined frequency and wherein the varying of the current through the secondary winding of the second magnetically saturable reactor in step (b) is out of phase with the varying of the current through the secondary winding of the first magnetically saturable reactor in step (a).

Claim 4

A method as in claim 1 wherein the first determined frequency does not equal the second determined frequency.

Claim 5

A method as in claim 1 wherein the first determined frequency equals the second determined frequency and wherein the varying of the current through the secondary winding of the first magnetically saturable reactor in step (a) is done using pulses and the varying of the current through the secondary winding of the second magnetically saturable reactor in step (b) is done using pulses which do not overlap the pulses of step (a).

Claim 6

A method as in claim 1 wherein the primary winding of the first magnetically saturable reactor is connected in series between the power generator and the load, and the primary winding of the first magnetically saturable reactor and the load are connected in parallel with the secondary winding of the second magnetically saturable reactor.

Claim 7

A method as in claim 1, wherein the load is a plasma process.

Claim 8

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising; a first magnetically saturable reactor composed of a transformer having primary and secondary windings wound around a non-linear ferromagnetic core; a second magnetically saturable reactor composed of a transformer having primary and secondary windings wound around a non-linear ferromagnetic core; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with changes in power reflected from the matching network back to the generator; and, control means, coupled to the secondary winding of the first magnetically saturable reactor, to the secondary winding of the second magnetically saturable reactor and to the detection means, for varying impedance through the primary winding of the first magnetically saturable reactor and for varying impedance through the primary winding of the second magnetically saturable reactor, the control means including, a first current amplifier for varying current through the secondary winding of the first magnetically saturable reactor at a first determined frequency, a second current amplifier for varying current through the secondary winding of the second magnetically saturable reactor at a second determined frequency, separating means for separating a first electrical component of change of the power reflected signal due to varying the current through the secondary winding of the first magnetically saturable reactor by the first current amplifier from a second electrical component of change of the power reflected signal due to varying the current through the secondary winding of the second magnetically saturable reactor by the second current amplifier, and steady state adjustment means for adjusting steady state current through the secondary winding of the first magnetically saturable reactor and steady state current through the secondary winding of the second magnetically saturable reactor based on relative values of the first electrical component of change and the second electrical component of change.

Claim 9

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising; a first magnetically saturable reactor composed of a transformer having primary and secondary windings wound around a non-linear ferromagnetic core; a second magnetically saturable reactor composed of a transformer having primary and secondary windings wound around a non-linear ferromagnetic core; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with changes in power reflected from the matching network back to the generator; and, control means, coupled to the secondary winding of the first magnetically saturable reactor, to the secondary winding of the second magnetically saturable reactor and to the detection means, for varying impedance through the primary winding of the first magnetically saturable reactor and for varying impedance through the primary winding of the second magnetically saturable reactor, the control means including, a first current amplifier for varying current through the secondary winding of the first magnetically saturable reactor at a first determined frequency, a second current amplifier for varying current through the secondary winding of the second magnetically saturable reactor at a second determined frequency, separating means for separating a first electrical component of change of the power reflected signal due to varying the current through the secondary winding of the first magnetically saturable reactor by the first current amplifier from a second electrical component of change of the power reflected signal due to varying the current through the secondary winding of the second magnetically saturable reactor by the second current amplifier, and steady state adjustment means for adjusting steady state current through the secondary winding of the first magnetically saturable reactor and steady state current through the secondary winding of the second magnetically saturable reactor based on relative values of the first electrical component of change and the second electrical component of change.

Claim 10

A matching network as in claim 7 wherein the load is a plasma process.

Claim 11

A matching network as in claim 7 wherein the first determined frequency is equal to the second determined frequency; and the second current amplifier varies the current through the secondary winding of the second magnetically saturable reactor out of phase with respect to the varying of the current through the secondary winding of the first magnetically saturable reactor by the first current amplifier.

Claim 12

A matching network as in claim 9 wherein: the first current amplifier includes a first generator reference signal generator means for generating a first reference signal, the first reference signal having a varying peak voltage amplitude, and a first amplifier which amplifies the first reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal; and the second current amplifier includes a second generator reference signal generator means for generating a second reference signal, the second reference signal having a varying peak voltage amplitude, and a second amplifier which amplifies the second reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal.

Claim 13

A matching network as in claim 10 wherein the separating means includes a bandpass filter which receives the power reflected signal and produces a filtered signal which includes only those components of the power reflected signal which oscillate at frequency approximately equal to the first determined frequency, the filtered signal having a varying voltage amplitude; a first multiplying means for multiplying the voltage amplitude of the filtered signal by the voltage amplitude of the first reference signal to produce the first component of change of the power reflected signal; and, a second multiplying means for multiplying the voltage amplitude of the filtered signal by the voltage amplitude of the second reference signal to produce the second component of change of the power reflected signal.

Claim 14

A matching network as in claim 11 wherein the steady state adjustment means includes: first low pass filter means for receiving the first component from the first multiplying means and producing a first averaged signal based on the average magnitude of the first component signal; first impedance control circuit means for generating and adjusting a first steady state signal with a voltage level based on the first averaged signal; second low pass filter means for receiving the second component from the second multiplying means and producing a second averaged signal based on the average magnitude of the second component signal; and, second impedance control circuit means for generating and adjusting a second steady state signal with a voltage level based on the second averaged signal.

Claim 15

A matching network as in claim 12 wherein the control means additionally comprises: first summing means for summing the first steady state signal with the first amplified reference signal to produce a first control signal; and, second summing means for summing the second steady state signal with the second amplified reference signal to produce a second control signal.

Claim 16

A matching network as in claim 9 wherein: the first current amplifier includes a first generator reference signal generator means for generating a first series of pulses each pulse having a voltage amplitude, and a first amplifier which amplifies the voltage amplitude of the first series of pulses an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal; and the second current amplifier includes a second generator reference signal generator means for generating a second series of pulses each pulse having a voltage amplitude, and a second amplifier which amplifies the voltage amplitude of the second series of pulses an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal.

Claim 17

A matching network as in claim 14 wherein pulses in the first series of pulses do not overlap with pulses in the second series of pulses.

Claim 18

A matching network as in claim 15 wherein the steady state adjustment means includes: first low pass filter means for receiving the first electrical component from the separating means and producing a first averaged signal based on the average magnitude of the first electrical component signal; first impedance control circuit means for generating and adjusting a first steady state signal with a voltage level based on the first averaged signal; second low pass filter means for receiving the second electrical component from the separating means and producing a second averaged signal based on the average magnitude of the second electrical component signal; and, second impedance control circuit means for generating and adjusting a second steady state signal with a voltage level based on the second averaged signal.

Claim 19

A matching network as in claim 16 wherein the control means additionally comprises: first summing means for summing the first steady state signal with the first amplified reference signal to produce a first control signal; and, second summing means for summing the second steady state signal with the second amplified reference signal to produce a second control signal.

Claim 20

A matching network as in claim 8 wherein the first determined frequency is not equal to the second determined frequency.

Claim 21

A matching network as in claim 18 wherein: the first current amplifier includes a first generator reference signal generator means for generating a first reference signal, the first reference signal having a varying voltage amplitude, and a first amplifier which amplifies the first reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal; and the second current amplifier includes a second generator reference signal generator means for generating a second reference signal, the second reference signal having a varying voltage amplitude, and a second amplifier which amplifies the second reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal.

Claim 22

A matching network as in claim 19 wherein the separating means includes a first bandpass filter which receives the power reflected signal and produces a first filtered signal which includes only those components of the power reflected signal which oscillate at frequency approximately equal to the first determined frequency, the first filtered signal having a varying voltage amplitude; a second bandpass filter which receives the power reflected signal and produces a second filtered signal which includes only those components of the power reflected signal which oscillate at frequency approximately equal to the second determined frequency, the second filtered signal having a varying voltage amplitude; a first multiplying means for multiplying the voltage amplitude of the first filtered signal by the voltage amplitude of the first reference signal to produce the first electrical component of change of the power reflected signal; and, a second multiplying means for multiplying the voltage amplitude of the second filtered signal by the voltage amplitude of the second reference signal to produce the second electrical component of change of the power reflected signal.

Claim 23

A matching network as in claim 10 wherein the steady state adjustment means includes: first low pass filter means for receiving the first electrical component from the separating means and producing a first averaged signal based on the average magnitude of the first electrical component signal; first impedance control circuit means for generating and adjusting a first steady state signal with a voltage level based on the first averaged signal; second low pass filter means for receiving the second electrical component from the separating means and producing a second averaged signal based on the average magnitude of the second electrical component signal; and, second impedance control circuit means for generating and adjusting a second steady state signal with a voltage level based on the second averaged signal.

Claim 24

A matching network as in claim 21 wherein the control means additionally comprises: first summing means for summing the first steady state signal with the first amplified reference signal to produce a first control signal; and, second summing means for summing the second steady state signal with the second amplified reference signal to produce a second control signal.

Claim 25

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising: a first variable impedance element; a second variable impedance element; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with changes in power reflected from the matching network back to the generator; and, a control means, coupled to the first variable impedance element, to the second variable impedance element and to the detection means, for varying impedance of the first variable impedance element and for varying impedance of the second variable impedance element, the control means including, first varying means for varying impedance of the first variable impedance element at a first determined frequency, the first varying means including a first generator reference signal generator means for generating a first reference signal, the first reference signal having a varying peak voltage amplitude, and a first amplifier which amplifies the first reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal, second varying means for varying impedance of the second variable impedance element at a second determined frequency, the second varying means including a second generator reference signal generator means for generating a second reference signal, the second reference signal having a varying peak voltage amplitude, and a second amplifier which amplifies the second reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal, separating means for separating a first electrical component of change of the power reflected signal due to varying the impedance of the first variable impedance element by the first varying means from a second electrical component of change of the power reflected signal due to varying the impedance of the second variable impedance element by the second varying means, and steady state adjustment means for adjusting steady state impedance of the first variable impedance and steady state impedance of the second variable impedance based on relative values of the first electrical component of change and the second electrical component of change; wherein the first determined frequency is equal to the second determined frequency; and the second varying means varies the impedance of the second variable impedance element out of phase with respect to the varying of the first variable impedance element by the first varying means.

Claim 26

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising: a first variable impedance element; a second variable impedance element; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with changes in power reflected from the matching network back to the generator; and, a control means, coupled to the first variable impedance element, to the second variable impedance element and to the detection means, for varying impedance of the first variable impedance element and for varying impedance of the second variable impedance element, the control means including, first varying means for varying impedance of the first variable impedance element at a first determined frequency, the first varying means including a first generator reference signal generator means for generating a first reference signal, the first reference signal having a varying peak voltage amplitude, and a first amplifier which amplifies the first reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal, second varying means for varying impedance of the second variable impedance element at a second determined frequency, the second varying means including a second generator reference signal generator means for generating a second reference signal, the second reference signal having a varying peak voltage amplitude, and a second amplifier which amplifies the second reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal, separating means for separating a first electrical component of change of the power reflected signal due to varying the impedance of the first variable impedance element by the first varying means from a second electrical component of change of the power reflected signal due to varying the impedance of the second variable impedance element by the second varying means, and steady state adjustment means for adjusting steady state impedance of the first variable impedance and steady state impedance of the second variable impedance based on relative values of the first electrical component of change and the second electrical component of change; wherein the first determined frequency is equal to the second determined frequency; and the second varying means varies the impedance of the second variable impedance element out of phase with respect to the varying of the first variable impedance element by the first varying means.

Claim 27

A matching network as in claim 23 wherein the separating means includes a bandpass filter which receives the power reflected signal and produces a filtered signal which includes only those electrical components of the power reflected signal which oscillate at frequency approximately equal to the first determined frequency, the filtered signal having a varying voltage amplitude; a first multiplying means for multiplying the voltage amplitude of the filtered signal by the voltage amplitude of the first reference signal to produce the first electrical component of change of the power reflected signal; and, a second multiplying means for multiplying the voltage amplitude of the filtered signal by the voltage amplitude of the second reference signal to produce the second electrical component of change of the power reflected signal.

Claim 28

A matching network as in claim 24 wherein the steady state adjustment means includes: first low pass filter means for receiving the first electrical component from the first multiplying means and producing a first averaged signal based on the average magnitude of the first electrical component signal; first impedance control circuit means for generating and adjusting a first steady state signal with a voltage level based on the first averaged signal; second low pass filter means for receiving the second electrical component from the second multiplying means and producing a second averaged signal based on the average magnitude of the second electrical component signal; and, second impedance control circuit means for generating and adjusting a second steady state signal with a voltage level based on the second averaged signal.

Claim 29

A matching network as in claim 25 wherein the control means additionally comprises: first summing means for summing the first steady state signal with the first amplified reference signal to produce a first control signal; and, second summing means for summing the second steady state signal with the second amplified reference signal to produce a second control signal.

Claim 30

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising; a first variable impedance element; a second variable impedance element; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with changes in power reflected from the matching network back to the generator; and, control means, coupled to the first variable impedance element, to the second variable impedance element and to the detection means, for varying impedance of the first variable impedance element and for varying impedance of the second variable impedance element, the control means including, first varying means for varying impedance of the first variable impedance element at a first determined frequency, the first varying means including a first generator reference signal generator means for generating a first series of pulses each pulse having a voltage amplitude, and a first amplifier which amplifies the voltage amplitude of the first series of pulses an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal, second varying means for varying impedance of the second variable impedance element at a second determined frequency, the second varying means including a second generator reference signal generator means for generating a second series of pulses each pulse having a voltage amplitude, and a second amplifier which amplifies the voltage amplitude of the second series of pulses an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal, separating means for separating a first electrical component of change of the power reflected signal due to varying the impedance of the first variable impedance element by the first varying means from a second electrical component of change of the power reflected signal due to varying the impedance of the second variable impedance element by the second varying means, and steady state adjustment means for adjusting steady state impedance of the first variable impedance and steady state impedance of the second variable impedance based on relative values of the first electrical component of change and the second electrical component of change; wherein the first determined frequency is equal to the second determined frequency; and the second varying means varies the impedance of the second variable impedance element out of phase with respect to the varying of the first variable impedance element by the first varying means.

Claim 31

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising; a first variable impedance element; a second variable impedance element; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with changes in power reflected from the matching network back to the generator; and, control means, coupled to the first variable impedance element, to the second variable impedance element and to the detection means, for varying impedance of the first variable impedance element and for varying impedance of the second variable impedance element, the control means including, first varying means for varying impedance of the first variable impedance element at a first determined frequency, the first varying means including a first generator reference signal generator means for generating a first series of pulses each pulse having a voltage amplitude, and a first amplifier which amplifies the voltage amplitude of the first series of pulses an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal, second varying means for varying impedance of the second variable impedance element at a second determined frequency, the second varying means including a second generator reference signal generator means for generating a second series of pulses each pulse having a voltage amplitude, and a second amplifier which amplifies the voltage amplitude of the second series of pulses an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal, separating means for separating a first electrical component of change of the power reflected signal due to varying the impedance of the first variable impedance element by the first varying means from a second electrical component of change of the power reflected signal due to varying the impedance of the second variable impedance element by the second varying means, and steady state adjustment means for adjusting steady state impedance of the first variable impedance and steady state impedance of the second variable impedance based on relative values of the first electrical component of change and the second electrical component of change; wherein the first determined frequency is equal to the second determined frequency; and the second varying means varies the impedance of the second variable impedance element out of phase with respect to the varying of the first variable impedance element by the first varying means.

Claim 32

A matching network as in claim 27 wherein pulses in the first series of pulses do not overlap with pulses in the second series of pulses.

Claim 33

A matching network as in claim 28 wherein the steady state adjustment means includes: first low pass filter means for receiving the first electrical component from the separating means and producing a first averaged signal based on the average magnitude of the first electrical component signal; first impedance control circuit means for generating and adjusting a first steady state signal with a voltage level based on the first averaged signal; second low pass filter means for receiving the second electrical component from the separating means and producing a second averaged signal based on the average magnitude of the second electrical component signal; and, second impedance control circuit means for generating and adjusting a second steady state signal with a voltage level based on the second averaged signal.

Claim 34

A matching network as in claim 29 wherein the control means additionally comprises: first summing means for summing the first steady state signal with the first amplified reference signal to produce a first control signal; and, second summing means for summing the second steady state signal with the second amplified reference signal to produce a second control signal.

Claim 35

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising; a first variable impedance element; a second variable impedance element; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with change in power reflected from the matching network back to the generator; and, control means, coupled to the first variable impedance element, to the second variable impedance element and to the detection means, for varying impedance of the first variable impedance element and for varying impedance of the second variable impedance element, the control means including, first varying means for varying impedance of the first variable impedance element at a first determined frequency, the first varying means including a first generator reference signal generator means for generating a first reference signal, the first reference signal having a varying voltage amplitude, and a first amplifier which amplifies the first reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal, second varying means for varying impedance of the second variable impedance element at a second determined frequency, the second varying means including a second generator reference signal generator means for generating a second reference signal, the second reference signal having a varying voltage amplitude, and a second amplifier which amplifies the second reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal, separating means for separating a first electrical component of change of the power reflected signal due to varying the impedance of the first variable impedance element by the first varying means from a second electrical component of change of the power reflected signal due to varying the impedance of the second variable impedance element by the second varying means, and steady state adjustment means for adjusting steady state impedance of the first variable impedance and steady state impedance of the second variable impedance based on relative values of the first electrical component of change and the second electrical component of change; wherein the first determined frequency is not equal to the second determined frequency.

Claim 36

A matching network placed between a generator and a load for matching an output impedance of the generator and an input impedance of the load, the matching network comprising; a first variable impedance element; a second variable impedance element; detection means for detecting the power reflected from the matching network back to the generator and for producing a power reflected signal which varies in correspondence with change in power reflected from the matching network back to the generator; and, control means, coupled to the first variable impedance element, to the second variable impedance element and to the detection means, for varying impedance of the first variable impedance element and for varying impedance of the second variable impedance element, the control means including, first varying means for varying impedance of the first variable impedance element at a first determined frequency, the first varying means including a first generator reference signal generator means for generating a first reference signal, the first reference signal having a varying voltage amplitude, and a first amplifier which amplifies the first reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a first amplified reference signal, second varying means for varying impedance of the second variable impedance element at a second determined frequency, the second varying means including a second generator reference signal generator means for generating a second reference signal, the second reference signal having a varying voltage amplitude, and a second amplifier which amplifies the second reference signal an amount which varies proportionally with the power reflected from the network bridge to produce a second amplified reference signal, separating means for separating a first electrical component of change of the power reflected signal due to varying the impedance of the first variable impedance element by the first varying means from a second electrical component of change of the power reflected signal due to varying the impedance of the second variable impedance element by the second varying means, and steady state adjustment means for adjusting steady state impedance of the first variable impedance and steady state impedance of the second variable impedance based on relative values of the first electrical component of change and the second electrical component of change; wherein the first determined frequency is not equal to the second determined frequency.

Claim 37

A matching network as in claim 31 wherein the separating means includes a first bandpass filter which receives the power reflected signal and produces a first filtered signal which includes only those electrical components of the power reflected signal which oscillate at frequency approximately equal to the first determined frequency, the first filtered signal having a varying voltage amplitude; a second bandpass filter which receives the power reflected signal and produces a second filtered signal which includes only those electrical components of the power reflected signal which oscillate at frequency approximately equal to the second determined frequency, the second filtered signal having a varying voltage amplitude; a first multiplying means for multiplying the voltage amplitude of the first filtered signal by the voltage amplitude of the first reference signal to produce the first electrical component of change of the power reflected signal; and, a second multiplying means for multiplying the voltage amplitude of the second filtered signal by the voltage amplitude of the second reference signal to produce the second electrical component of change of the power reflected signal.

Claim 38

A matching network as in claim 31 wherein the steady state adjustment means includes: first low pass filter means for receiving the first electrical component from the separating means and producing a first averaged signal based on the average magnitude of the first electrical component signal; first impedance control circuit means for generating and adjusting a first steady state signal with a voltage level based on the first averaged signal; second low pass filter means for receiving the second electrical component from the separating means and producing a second averaged signal based on the average magnitude of the second electrical component signal; and, second impedance control circuit means for generating and adjusting a second steady state signal with a voltage level based on the second averaged signal.

Claim 39

A matching network as claimed in claim 33 wherein the control means additionally comprises: first summing means for summing the first steady state signal with the first amplified reference signal to produce a first control signal; and, second summing means for summing the second steady state signal with the second amplified reference signal to produce a second control signal.

Claim 40

A matching network as in claim 35 wherein the load is a plasma process.