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US4984243A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor laser device

Assignee: Mitsubishi Electric Corp
•
Filing: 1989-08-01
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Granted: 1991-01-08
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Expires: 2009-08-01
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Abstract

Abstract A semiconductor laser includes a groove in a GaAs first current blocking layer, which extends to an Al x Ga.sub.(1-x) As second clad layer beneath the first blocking layer. The width of the groove periodically changes along the length of the resonator. Over the regions of the first current blocking layer where the groove has a smaller width, a Al z Ga.sub.(1-z) As second current blocking grating layer is formed. An Al x Ga.sub.(1-x) As third current blocking layer is disposed on the second current blocking layer and the portions of the first current blocking layer not covered by the second current blocking layer. The variation of the width of the groove is achieved by selective etching in gaseous hydrogen chloride by irradiation with an arsenic molecular beam, or by selective dissolution in a liquid-phase solvent but not the second current blocking layer.

Inventors

  • 👤 Hitoshi Kagawa
  • 👤 Tetsuya Yagi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 06:48
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/12; H01S5/20; H01S5/22; H01S5/223; H01S5/2231; H01S5/1231; H01S5/2205; H01S5/2206; H01S5/221; H01S5/30; H01S5/32; H01S5/323; H01S5/32308; Y; Y10; Y10S; Y10S148/00; Y10S148/072; Y10S148/095

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 228 words
A semiconductor laser device comprising: a first electrode; a first conductivity-type GaAs substrate on which said first electrode is disposed; a first conductivity-type Al x Ga.sub.(1-x) As first cladding layer disposed on said substrate opposite said first electrode; a Al y Ga.sub.(1-y) As active layer disposed on said first cladding layer; a second conductivity-type Al x Ga.sub.(1-x) As second cladding layer disposed on said active layer; a GaAs first current blocking layer disposed on said second cladding layer, said first current blocking layer having a groove extending in length in a resonator direction, extending in depth to said second cladding layer, and changing periodically in width transverse to the length and depth; a Al z Ga.sub.(1-z) As second current blocking layer comprising a grating having stripes extending transverse to the resonator direction and disposed on the portions of said first current blocking layer where the groove has the narrower width; a first conductivity-type GaAs third current blocking layer disposed on said second current blocking layer and the portions of said first current blocking layer from which the stripes of said second current blocking layer are absent; a second conductivity-type Al x Ga.sub.(1-x) As third cladding layer filling the groove and disposed on said third current blocking layer; a second conductivity-type GaAs contact layer disposed on said third cladding layer; and a second electrode disposed on said contact layer.
Claim 2
Dependent Claim 228 words
A semiconductor laser device comprising: a first electrode; a first conductivity-type GaAs substrate on which said first electrode is disposed; a first conductivity-type Al x Ga.sub.(1-x) As first cladding layer disposed on said substrate opposite said first electrode; a Al y Ga.sub.(1-y) As active layer disposed on said first cladding layer; a second conductivity-type Al x Ga.sub.(1-x) As second cladding layer disposed on said active layer; a GaAs first current blocking layer disposed on said second cladding layer, said first current blocking layer having a groove extending in length in a resonator direction, extending in depth to said second cladding layer, and changing periodically in width transverse to the length and depth; a Al z Ga.sub.(1-z) As second current blocking layer comprising a grating having stripes extending transverse to the resonator direction and disposed on the portions of said first current blocking layer where the groove has the narrower width; a first conductivity-type GaAs third current blocking layer disposed on said second current blocking layer and the portions of said first current blocking layer from which the stripes of said second current blocking layer are absent; a second conductivity-type Al x Ga.sub.(1-x) As third cladding layer filling the groove and disposed on said third current blocking layer; a second conductivity-type GaAs contact layer disposed on said third cladding layer; and a second electrode disposed on said contact layer.
Claim 3
Dependent Claim 31 words
The laser device of claim 1 wherein said active layer, said first current blocking layer, and said second current blocking layer are each one of intrinsic and first and second conductivity-types.

References Cited (Backward Citations)

JPS6066484A Cited
US4761791A Cited
US4837775A Cited
US4845014A Cited
US4829023A Cited
US4782035A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-01-07 1994-07-09 1995-01-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-01-07 1998-07-09 1999-01-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-01-07 2002-07-09 2003-01-08 $7700.00 Window Closed / Lapsed

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