US4990224A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Copper plating bath and process for difficult to plate metals
Assignee: International Business Machines Corp
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Filing: 1989-10-25
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Granted: 1991-02-05
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Expires: 2009-10-25
Abstract
Abstract An acid copper plating bath and process for using with electropositive metals such as aluminum and tungsten is described, wherein the bath contains sulfuric acid, copper sulfate, in solution with urea as a levelling agent, a cationic surfactant as a wetting agent and an ester of a sulfonic acid, Beta-phenylethyltosylate as a brightening agent.
Inventors
- 👤 Issa S. Mahmoud
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:27
CPC Classifications
C; C25; C25D; C25D3/00; C25D3/02; C25D3/38; C25D5/00; C25D5/34; C25D5/38; C25D5/42; C25D5/44
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
62 words
An acid copper plating bath for electropositive metals consisting essentially of: 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1 to 2 milliliters per liter, wetting agent, 1 to 2 grams per liter, Beta-phenylethyltosylate as a brightening agent, and sufficient deionized water to make one liter.
Claim 2
Dependent Claim
62 words
An acid copper plating bath for electropositive metals consisting essentially of: 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1 to 2 milliliters per liter, wetting agent, 1 to 2 grams per liter, Beta-phenylethyltosylate as a brightening agent, and sufficient deionized water to make one liter.
Claim 3
Dependent Claim
13 words
The bath of claim 1 wherein the wetting agent is a cationic surfactant.
Claim 4
Dependent Claim
37 words
An aqueous acid copper electroplating bath composition for strongly electropositive metals such as aluminum and tungsten comprising: sulfuric acid, 30-50 grams/liter; hydrated copper sulfate, 50-72 grams/liter; urea, 1 gram/liter; Beta-phenylethyltosylate, 1 gram/liter; and cationic surfactant, 1 gram/liter.
Claim 5
Dependent Claim
37 words
An aqueous acid copper electroplating bath composition for strongly electropositive metals such as aluminum and tungsten comprising: sulfuric acid, 30-50 grams/liter; hydrated copper sulfate, 50-72 grams/liter; urea, 1 gram/liter; Beta-phenylethyltosylate, 1 gram/liter; and cationic surfactant, 1 gram/liter.
Claim 6
Dependent Claim
128 words
A process for copper plating electropositive metals comprising the steps of: A. preparing a bath containing 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1to 2 milliliters per liter, sodium lauryl sulfate, 1 to 2 grams per liter, a tosyl or mesyl sulfonic acid ester, and sufficient deionized water to make one liter by first mixing components in order set out then filtering the solution; B. soaking the parts to be plated in the bath for 2 to 3 minutes; and C. electrodepositing copper from the bath, at a temperature of about 20 to 30 degrees centigrade, at a current density of 10 to 20 amperes per square foot, with continuous agitation.
Claim 7
Dependent Claim
128 words
A process for copper plating electropositive metals comprising the steps of: A. preparing a bath containing 0.5 to 0.75 mols per liter sulfuric acid, 0.3 to 0.5 mols per liter hydrated copper sulfate, 1 to 2 grams per liter, urea, 1to 2 milliliters per liter, sodium lauryl sulfate, 1 to 2 grams per liter, a tosyl or mesyl sulfonic acid ester, and sufficient deionized water to make one liter by first mixing components in order set out then filtering the solution; B. soaking the parts to be plated in the bath for 2 to 3 minutes; and C. electrodepositing copper from the bath, at a temperature of about 20 to 30 degrees centigrade, at a current density of 10 to 20 amperes per square foot, with continuous agitation.
Claim 8
Dependent Claim
25 words
The process of claim 4 wherein the soaking step is replaced by soaking for 30 to 60 seconds, under the influence of a positive bias.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-04 | 1994-08-06 | 1995-02-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-04 | 1998-08-06 | 1999-02-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-04 | 2002-08-06 | 2003-02-05 | $7700.00 | Window Closed / Lapsed |