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US4994408A
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Epitaxial film growth using low pressure MOCVD
Assignee: NXP USA Inc
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Filing: 1989-02-06
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Granted: 1991-02-19
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Expires: 2009-02-06
Abstract
Abstract A method for growing high quality epitaxial films using low pressure MOCVD that includes providing a substrate that is misoriented from a singular plane, placing the substrate into an MOCVD reactor at a total pressure of less than 0.2 atmospheres and then growing an epitaxial film on the substrate. When providing a misoriented gallium arsenide substrate, the MOCVD reactor is set at a temperature in the range of 650 to 750 degrees centigrade to grow an aluminum gallium arsenide film. This temperature is substantially lower than that at which aluminum gallium arsenide epitaxial films are commonly grown and the resulting film has a smooth surface morphology and enhanced photoluminesence properties.
Inventors
- 👤 Eric S. Johnson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:55
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/10; C30B29/40; C30B29/42; C30B29/46; C30B29/48; H; H01; H01S; H01S5/00; H01S5/30; H01S5/32; Y; Y10; Y10S; Y10S148/00; Y10S148/056; Y10S148/072; Y10S148/097; Y10S148/11
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
100 words
A method for growing high quality epitaxial films using low pressure metalorganic chemical vapor deposition comprising the steps of: providing a gallium arsenide substrate that is misoriented from the {100} plane one of 3.0 to 8.5 degrees towards the {111}A plane, 4.5 to 12.5 degrees toward the {111}B plane and at least 4.0 degrees generally towards the {110} plane; placing said substrate into an MOCVD reactor, said reactor having a temperature in the range of 650 to 750 degrees centigrade and a total pressure of less than 0.2 atmospheres; and growing an aluminum gallium arsenide epitaxial film on said substrate.
Claim 2
Independent Claim
100 words
A method for growing high quality epitaxial films using low pressure metalorganic chemical vapor deposition comprising the steps of: providing a gallium arsenide substrate that is misoriented from the {100} plane one of 3.0 to 8.5 degrees towards the {111}A plane, 4.5 to 12.5 degrees toward the {111}B plane and at least 4.0 degrees generally towards the {110} plane; placing said substrate into an MOCVD reactor, said reactor having a temperature in the range of 650 to 750 degrees centigrade and a total pressure of less than 0.2 atmospheres; and growing an aluminum gallium arsenide epitaxial film on said substrate.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein the MOCVD reactor has a temperature of approximately 700 degrees centigrade.
Claim 4
Dependent Claim
23 words
The method of claim 1 wherein the MOCVD reactor has a Group V to Group III source flow ratio of 30 or less.
Claim 5
Independent Claim
103 words
A method for growing high quality epitaxial films using low pressure metalorganic chemical vapor deposition comprising the steps of: providing a gallium arsenide substrate that is misoriented from the {100} plane one of 3.0 to 8.5 degrees towards the {111}A plane, 4.5 to 12.5 degrees towards the {111}B plane and at least 4.0 degrees generally towards the {110} plane; placing said gallium arsenide substrate into an MOCVD reactor, said reactor having a total pressure of less than 0.2 atmospheres and a temperature in the range of 650 to 750 degrees centigrade; and growing an aluminum gallium arsenide film on said gallium arsenide substrate.
Claim 6
Independent Claim
103 words
A method for growing high quality epitaxial films using low pressure metalorganic chemical vapor deposition comprising the steps of: providing a gallium arsenide substrate that is misoriented from the {100} plane one of 3.0 to 8.5 degrees towards the {111}A plane, 4.5 to 12.5 degrees towards the {111}B plane and at least 4.0 degrees generally towards the {110} plane; placing said gallium arsenide substrate into an MOCVD reactor, said reactor having a total pressure of less than 0.2 atmospheres and a temperature in the range of 650 to 750 degrees centigrade; and growing an aluminum gallium arsenide film on said gallium arsenide substrate.
Claim 7
Dependent Claim
17 words
The method of claim 4 wherein the MOCVD reactor has a temperature of approximately 700 degrees centigrade.
Claim 8
Dependent Claim
23 words
The method of claim 4 wherein the MOCVD reactor has a Group V to Group III source flow ratio of 30 or less.
Claim 9
Independent Claim
112 words
A method for growing high quality aluminum gallium arsenide films on gallium arsenide substrates using low pressure metalorganic chemical vapor deposition comprising the steps of: providing a gallium arsenide substrate, said gallium arsenide substrate being misoriented from the {100} plane one of 3.0 to 8.5 degrees towards the {111}A plane, 4.5 to 12.5 degrees towards the {111}B plane and at least 4.0 degrees generally towards the {110} plane; placing said gallium arsenide substrate into an MOCVD reactor, said reactor having a total pressure of less than 0.2 atmospheres and a temperature in the range of 650 to 750 degrees centigrade; and growing an aluminum gallium arsenide film on said gallium arsenide substrate.
Claim 10
Independent Claim
112 words
A method for growing high quality aluminum gallium arsenide films on gallium arsenide substrates using low pressure metalorganic chemical vapor deposition comprising the steps of: providing a gallium arsenide substrate, said gallium arsenide substrate being misoriented from the {100} plane one of 3.0 to 8.5 degrees towards the {111}A plane, 4.5 to 12.5 degrees towards the {111}B plane and at least 4.0 degrees generally towards the {110} plane; placing said gallium arsenide substrate into an MOCVD reactor, said reactor having a total pressure of less than 0.2 atmospheres and a temperature in the range of 650 to 750 degrees centigrade; and growing an aluminum gallium arsenide film on said gallium arsenide substrate.
Claim 11
Dependent Claim
17 words
The method of claim 7 wherein the MOCVD reactor has a temperature of approximately 700 degrees centigrade.
Claim 12
Dependent Claim
31 words
The method of claim 7 wherein the providing a substrate step includes providing a substrate that is misoriented from the {100} plane towards planes between the {111}A, {111}B and {110} planes.
Claim 13
Dependent Claim
23 words
The method of claim 7 wherein the MOCVD reactor has a Group V to Group III source flow ratio of 30 or less.
References Cited (Backward Citations)
US3698944A
Cited
US4707216A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-18 | 1994-08-20 | 1995-02-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-18 | 1998-08-20 | 1999-02-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-18 | 2002-08-20 | 2003-02-19 | $7700.00 | Window Closed / Lapsed |