Patent US5013579A successfully refreshed from Google Patents.
US5013579A
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Microwave enhanced CVD method for coating mechanical parts for improved wear resistance
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1989-09-26
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Granted: 1991-05-07
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Expires: 2009-09-26
Abstract
Abstract A cyclotron resonance chemical vapor deposition method for coating mechanical component parts, in which the method is particularly advantageous in coating for parts having substantially flat surfaces and corners which are subject to wear. The method includes disposing the parts in a reaction chamber, inputting a reactive gas into the reaction chamber and exciting the reactive gas in the reaction chamber by applying microwave electromagnetic energy in the presence of a magnetic field. A layer is deposited on the corners and flat surfaces of the parts by chemical vapor reaction such that the layer at the corners is thicker than that on the flat surfaces due to the concentration of the electric field at the corners, thus providing more wear resistance at the corners.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:28
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; C; C23; C23C; C23C16/00; C23C16/04; C23C16/44; C23C16/50; C23C16/511; H01J37/3266; H01J37/32678; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/104
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
167 words
A cyclotron resonance chemical vapor deposition method for coating mechanical component parts, said parts having (a) flat surfaces and (b) corners subject to wear, said method comprising the steps of: disposing said parts in a reaction chamber; inputting into said reaction chamber a reactive gas comprising (a) carbon and optionally (i) nitrogen or (ii) nitrogen and boron or (b) boron and nitrogen; exciting said reactive gas in said reaction chamber by applying microwave electromagnetic energy in the presence of a magnetic field in the pressure range of 0.01-300 Torr to cause cyclotron resonance in the reaction chamber where the electric field of said electromagnetic energy tends to concentrate at said corners of the parts; and depositing a layer on the corners and flat surfaces of said parts by chemical vapor reaction such that the layer at the corners is thicker than that on the flat surfaces due to the concentration of the electric field at the corners to thus render the corners more resistant to said wear.
Claim 2
Dependent Claim
167 words
A cyclotron resonance chemical vapor deposition method for coating mechanical component parts, said parts having (a) flat surfaces and (b) corners subject to wear, said method comprising the steps of: disposing said parts in a reaction chamber; inputting into said reaction chamber a reactive gas comprising (a) carbon and optionally (i) nitrogen or (ii) nitrogen and boron or (b) boron and nitrogen; exciting said reactive gas in said reaction chamber by applying microwave electromagnetic energy in the presence of a magnetic field in the pressure range of 0.01-300 Torr to cause cyclotron resonance in the reaction chamber where the electric field of said electromagnetic energy tends to concentrate at said corners of the parts; and depositing a layer on the corners and flat surfaces of said parts by chemical vapor reaction such that the layer at the corners is thicker than that on the flat surfaces due to the concentration of the electric field at the corners to thus render the corners more resistant to said wear.
Claim 3
Dependent Claim
26 words
A method as in claim 1 where the thickness of the layer at the corners is approximately twice that of the layers at the flat surfaces.
Claim 4
Dependent Claim
23 words
A method as in claim 1 where said reactive gas comprises at least carbon and said layer comprises diamond or diamond like carbon.
Claim 5
Dependent Claim
13 words
A method as in claim 3 where said reactive gas includes an alcohol.
Claim 6
Dependent Claim
20 words
A method as in claim 1 where said reactive gas comprises boron and nitrogen and said layer comprises boron nitride.
Claim 7
Dependent Claim
14 words
A method as in claim 1 where said parts are parts of a watch.
Claim 8
Dependent Claim
14 words
A method as in claim 1 where said cyclotron resonance is mixed cyclotron resonance.
Claim 9
Independent Claim
139 words
A method for coating mechanical component parts, said parts having (a) flat surfaces and (b) corners subject to wear, said method comprising the steps of: disposing said parts in a reaction chamber; inputting into said reaction chamber a reactive gas comprising (a) carbon and optionally (i) nitrogen or (ii) nitrogen and boron or (b) boron and nitrogen; exciting said reactive gas in said reaction chamber by applying a DC biased, RF electric field such that said electric field tends to concentrate at said corners of the parts; and depositing a layer on the corners and flat surfaces of said parts by chemical vapor reaction such that the layer at the corners is thicker than that on the flat surfaces due to the concentration of the electric field at the corners to thus render the corners more resistant to wear.
Claim 10
Independent Claim
139 words
A method for coating mechanical component parts, said parts having (a) flat surfaces and (b) corners subject to wear, said method comprising the steps of: disposing said parts in a reaction chamber; inputting into said reaction chamber a reactive gas comprising (a) carbon and optionally (i) nitrogen or (ii) nitrogen and boron or (b) boron and nitrogen; exciting said reactive gas in said reaction chamber by applying a DC biased, RF electric field such that said electric field tends to concentrate at said corners of the parts; and depositing a layer on the corners and flat surfaces of said parts by chemical vapor reaction such that the layer at the corners is thicker than that on the flat surfaces due to the concentration of the electric field at the corners to thus render the corners more resistant to wear.
Claim 11
Dependent Claim
26 words
A method as in claim 8 where the thickness of the layer at the corners is approximately twice that of the layers at the flat surfaces.
Claim 12
Dependent Claim
23 words
A method as in claim 8 where said reactive gas comprises at least carbon and said layer comprises diamond or diamond like carbon.
Claim 13
Dependent Claim
13 words
A method as in claim 10 where said reactive gas includes an alcohol.
Claim 14
Dependent Claim
20 words
A method as in claim 8 where said reactive gas comprises boron and nitrogen and said layer comprises boron nitride.
Claim 15
Dependent Claim
14 words
A method as in claim 8 where said parts are parts of a watch.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-06 | 1994-11-05 | 1995-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-06 | 1998-11-05 | 1999-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-06 | 2002-11-05 | 2003-05-07 | $7700.00 | Window Closed / Lapsed |