Patent US3485246A successfully refreshed from Google Patents.
US5044752A
Expired / Lapsed
US
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Apparatus and process for positioning wafers in receiving devices
Assignee: ASM America Inc
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Filing: 1989-06-30
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Granted: 1991-09-03
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Expires: 2009-06-30
Abstract
Abstract An apparatus is provided for loading and/or unloading wafers from a holding cassette to a quartz boat without scraping the wafer on the slots contained in the quartz boat; the apparatus comprising a robot and a paddle. The improvement resides in the main feature of wafer sensor means disposed on the surface of the paddle, the wafer sensor means being connected to a microprocessor which converts and digitizes an analog signal from the wafer sensor means, the analog signal indicating the position of a wafer disposed on the surface of the paddle. Further included is an arrangement for signaling the robot to compensate for the particular position of the wafer on the paddle by adjusting the position of the paddle with respect to the quartz boat. Another feature lies in the fact that sensing notches are disposed along the front, right-side and left-side edges of said paddle, each of the sensing notches having a sensor device and associated emitter means disposed on opposite sides of the sensing notches in such a manner as to permit detection of the position of the slots in the quartz boat stacking rods lying adjacent to respective sensing notches.
Inventors
- 👤 Henrik Thurfjell
- 👤 Robert G. Ozarski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:01
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0606; H10P72/30; H10P72/34; H10P72/3411; H10P72/50; H10P72/53; H10P72/70; H10P72/76; H10P72/7602; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
152 words
An apparatus for transporting and precisely positioning a semiconductor wafer relative to a receiving device, comprising: means for holding said wafer and placing it into said receiving device; a sensor means, comprising at least two spaced sensors disposed on said means for holding, for producing electrical analog signals whose value is dependent on the position of said wafer with respect to the center of said holding means; means for converting said analog signals to digital signals a digital processor for processing said digital signals to determine a given position of a wafer; and means couple to said digital processor for compensating for any misalignment in the position of said wafer with respect to the center of said holding means by correspondingly adjusting the movement of said holding means with respect to said receiving device, thereby to insure the precise positioning of said wafer in an appropriate receiving slot of said receiving device.
Claim 2
Independent Claim
152 words
An apparatus for transporting and precisely positioning a semiconductor wafer relative to a receiving device, comprising: means for holding said wafer and placing it into said receiving device; a sensor means, comprising at least two spaced sensors disposed on said means for holding, for producing electrical analog signals whose value is dependent on the position of said wafer with respect to the center of said holding means; means for converting said analog signals to digital signals a digital processor for processing said digital signals to determine a given position of a wafer; and means couple to said digital processor for compensating for any misalignment in the position of said wafer with respect to the center of said holding means by correspondingly adjusting the movement of said holding means with respect to said receiving device, thereby to insure the precise positioning of said wafer in an appropriate receiving slot of said receiving device.
Claim 3
Dependent Claim
62 words
The apparatus in accordance with claim 1, in which said means for holding and placing the wafer is a paddle, said digital processor is a microprocessor, said receiving device is a quartz boat, said means for compensating comprises means for adjusting the position of said paddle including a robot arm; and further including means for transmitting compensating signals to said robot arm.
Claim 4
Dependent Claim
15 words
The apparatus in accordance with claim 1, in which said sensor means comprises optical sensors.
Claim 5
Dependent Claim
52 words
The apparatus according to claim 1, wherein said holding and placing means have four corners and said sensor means comprises at least four optical sensors disposed about the respective four corners of said holding means, such that a wafer disposed on said holding means covers a portion of each said optical sensor.
Claim 6
Dependent Claim
32 words
The apparatus according to claim 4, wherein said optical sensors include a photosensitive material which generates an analog signal equivalent to the percentage of said photosensitive material exposed to a light source.
Claim 7
Dependent Claim
23 words
The apparatus according to claim 1, further comprising a sensor/analog interface, and an A/D converter, the latter being connected to said digital processor.
Claim 8
Dependent Claim
17 words
The apparatus according to claim 2, in which said microprocessor is serially connected to a host processor.
Claim 9
Dependent Claim
54 words
The apparatus according to claim 7, in which said host processor is connected to said robot arm, and in which a compensating signal is sent from said host processor to said robot arm in order to adjust the position of said paddle to compensate for the misorientation of said wafer disposed on said paddle.
Claim 10
Dependent Claim
77 words
The apparatus according to claim 4, including means for calculating the position of said wafer on said holding means along the x-axis and y-axis using the following equations: ##EQU3## and ##EQU4## where V is the longitudinal distance from the end of one sensor to another sensor; H is the horizontal distance from one sensor to another sensor; an da, b, c, and d are the converted and digitized signals from each of the four optical sensors, respectively.
Claim 11
Dependent Claim
32 words
The apparatus according to claim 5, wherein said optical sensors are activated by a light source, said light source being either direct lighting means or a mirror reflection rom the lighting means.
Claim 12
Dependent Claim
32 words
The apparatus according to claim 3, wherein said optical sensors are embedded in said holding means and positioned so that a centered wafer will cover predetermined portions of each said optical sensor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-02 | 1995-03-04 | 1995-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-02 | 1999-03-04 | 1999-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-02 | 2003-03-04 | 2003-09-03 | $7700.00 | Window Closed / Lapsed |