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US5049461A
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Method of making and using a high resolution lithographic mask
Assignee: International Business Machines Corp
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Filing: 1989-06-19
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Granted: 1991-09-17
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Expires: 2009-06-19
Abstract
Abstract A high resolution lithographic mask having a desired pattern is generated and used to replicate the pattern onto a film in a one-step process. A film of phase-changeable material in one state is provided on a conductive substrate. By scanning tunneling microscope techniques, the state and thereby the conductivity or other property of the material in selected areas of the film is changed to a second state to provide from the film a mask having a desired pattern defined by crystalline areas. Amorphous material need not be removed from the mask. To replicate the pattern on another film, the latter is placed on another conductive substrate; the mask is positioned with its patterned side within electron tunneling distance of said other film; and the pattern is replicated in a single step by applying a voltage between the mask and other film. The voltage charge on said mask is positive and negative on said other film to cause current to flow in the crystalline areas of said mask and, by electron flow from said film to the mask, eliminate backscattering and insure high resolution. As the state changes (e.g., from crystalline to amorphous) in the pattern areas of said other film, conductivity in the crystalline areas will progressively decrease and, by causing a corresponding reduction in current flow in the crystalline areas, minimize the risk of undesired broadening of exposed areas of said other film.
Inventors
- 👤 Patrick C. Arnett
- 👤 Andres Bryant
- 👤 John S. Foster
- 👤 Jane E. Frommer
- 👤 Jon A. C. Iwata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:27
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; B; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F1/00; G03F1/68; G03F1/76; G03F1/78; G03F7/00; G03F7/20; G03F7/2049; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31752; H01J2237/31759; Y; Y10; Y10S; Y10S430/00; Y10S430/143; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/855
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
124 words
A method of generating a high resolution lithographic mask comprising the steps of: moving the tunneling tip of a scanning tunneling microscope in a z direction to within electron tunneling distance from a film having a region normally of one conductivity; applying voltage pulses to said tip in a preselected sequence while concurrently effecting relative movement between the tip and film in preselected x and y directions, said pulses being of sufficient magnitude and duration to change the conductivity of the material in selected areas of said region to another conductivity to provide from the film a mask having a desired pattern defined by areas of different conductivity and capable of being replicated without removing material of one of said conductivities from the film.
Claim 2
Independent Claim
124 words
A method of generating a high resolution lithographic mask comprising the steps of: moving the tunneling tip of a scanning tunneling microscope in a z direction to within electron tunneling distance from a film having a region normally of one conductivity; applying voltage pulses to said tip in a preselected sequence while concurrently effecting relative movement between the tip and film in preselected x and y directions, said pulses being of sufficient magnitude and duration to change the conductivity of the material in selected areas of said region to another conductivity to provide from the film a mask having a desired pattern defined by areas of different conductivity and capable of being replicated without removing material of one of said conductivities from the film.
Claim 3
Dependent Claim
66 words
The method of claim 1, including the further steps of: placing on a conductive substrate another film on which a mirror image of the pattern is to be replicated; disposing the mask with its patterned side within electron tunneling distance of said other film; and replicating the pattern on said other film in a single step by applying a voltage between said mask and other film.
Claim 4
Dependent Claim
33 words
The method of claim 2, wherein the mask is an anode and said other film is a cathode to cause electrons to travel toward said mask and prevent backscattering on said other film.
Claim 5
Dependent Claim
103 words
The method of claim 2, including the steps of: sensing, at each of a plurality of spaced points defined by a plurality of tunneling tips on a holder for the mask or on the mask itself, the tunneling or field emission current between a respective one of said tips and said other film; comparing the sensed current with a reference current; and maintaining each of the last-mentioned tips and said other film apart a predetermined distance corresponding to the preselected value of the reference current for thereby enabling the mask to tilt as necessary to maintain said predetermined distance at each such point.
Claim 6
Independent Claim
119 words
A method of generating a high resolution lithographic mask comprising the steps of: providing on a conducting substrate a film of phase-changeable material having a region uniformly in a first phase state; moving the tunneling tip of a scanning tunneling microscope in a z direction to within electron tunneling distance from said region; applying voltage pulses to said tip in a preselected sequence while concurrently effecting relative movement between the tip and film in preselected x and y directions, said pulses being of sufficient magnitude and duration to change the state and thereby the conductivity of the material in selected areas of said region to a second state to provide from the film a mask having a desired pattern.
Claim 7
Independent Claim
119 words
A method of generating a high resolution lithographic mask comprising the steps of: providing on a conducting substrate a film of phase-changeable material having a region uniformly in a first phase state; moving the tunneling tip of a scanning tunneling microscope in a z direction to within electron tunneling distance from said region; applying voltage pulses to said tip in a preselected sequence while concurrently effecting relative movement between the tip and film in preselected x and y directions, said pulses being of sufficient magnitude and duration to change the state and thereby the conductivity of the material in selected areas of said region to a second state to provide from the film a mask having a desired pattern.
Claim 8
Dependent Claim
33 words
The method of claim 5, wherein the states are crystalline and amorphous, and the material is one having a conductivity orders of magnitude higher in its crystalline state than in its amorphous state.
Claim 9
Dependent Claim
17 words
The method of claim 5, wherein said first state is amorphous and the second state is crystalline.
Claim 10
Dependent Claim
37 words
The method of claim 7, including the further step, following the applying step, of removing the amorphous material so that the pattern will be defined solely by crystalline state material projecting from the surface of the substrate.
Claim 11
Dependent Claim
92 words
The method of claim 5, including the further steps of: placing on the film another film with a resist on which a mirror image of the pattern is to be replicated; disposing the mask with its patterned side within electron tunneling distance of said other film; and replicating the pattern in said other film in a single step by applying a voltage between said mask and other film of sufficient magnitude and duration to produce a current that changes the state of the material in said other film in the pattern-defining areas.
Claim 12
Dependent Claim
32 words
The method of claim 9, wherein the voltage charge on said mask is positive and negative on said other film to cause electrons to flow from said other film to said mask.
Claim 13
Dependent Claim
56 words
The method of claim 9, including the further step of: voltage biasing said mask and other film to cause electrons to pass from said other film to the crystallized areas of said mask and heat said areas to a degree sufficient to change said other film from the crystalline to the amorphous state in said areas.
Claim 14
Dependent Claim
47 words
The method of claim 9, wherein during the replicating step, the state is changed from crystalline to amorphous, and as the state changes and conductivity progressively decreases, current flow in the crystalline area will correspondingly reduce and minimize the risk of undesired broadening of said other film.
Claim 15
Dependent Claim
34 words
The method of claim 9, including the further step, after the replicating step, of using said other film as an intermediate mask from which the desired pattern may be replicated onto still other films.
Claim 16
Dependent Claim
101 words
The method of claim 2, including the steps of: sensing, at each of a plurality of spaced points defined by tunneling tips on a holder for the mask, an electrical condition between a respective one of said tips and said other film; comparing the condition as sensed with a preselected reference condition; and maintaining each of said tips on the mask holder and said other film apart a predetermined distance corresponding to the preselected value of the reference condition for thereby enabling the holder and thereby the mask to tilt as necessary to maintain said predetermined distance at each such point.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-16 | 1995-03-18 | 1995-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-16 | 1999-03-18 | 1999-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-16 | 2003-03-18 | 2003-09-17 | $7700.00 | Window Closed / Lapsed |