wire bonding method and apparatus and method of producing semiconductor device by use of wire bonding apparatus

Claim 2

A wire bonding method for electrically connecting a first wire bonding region to a second wire bonding region corresponding thereto through a bonding wire by a bonding tool means and a bonding arm means supporting the bonding tool means, the method comprising the steps of: directly driving the bonding tool means and bonding arm means in a wire bonding cycle for driving the tool in an upward and downward direction by one of a linear motor and an electromagnetic linear drive means during said wire bonding cycle; monitoring a differential signal during said wire bonding cycle representative of a difference between a position command signal for controlling an upward and downward displacement of the bonding tool means and a position signal outputted from a sensor for electrically detecting an actual upward and downward displacement of said bonding tool means; and actuating said bonding tool means in accordance with an increase in value of said differential signal monitored during said wire bonding cycle to a landing of the tool on one of the first and second bonding regions up to a predetermined threshold value, by applying a predetermined bonding load to the bonding tool means with one of the linear motor and the electromagnetic linear drive means to execute a wire bonding operation.

Claim 3

The method as defined in claim 1, wherein said bonding tool means includes a wedge means operating in an ultrasonic wire bonding mode.

Claim 4

The method as defined in claim 1, wherein said bonding tool means includes a capillary means operating in a ball bonding mode.

Claim 5

The method as defined in claim 1, wherein said bonding tool means includes a capillary means having both thermal compression and ultrasonic vibration applied thereto.

Claim 6

A wire bonding method for bonding a first wire bonding region to a second wire bonding region corresponding thereto through a bonding wire by a bonding tool means and a bonding arm means supporting the bonding tool means, the method comprising the steps of: directly driving the bonding tool means and the bonding arm means in a bonding cycle for driving the tool in an upward and downward direction by one of a linear motor means and an electromagnetic linear drive means; monitoring a differential signal during said wire bonding cycle representative of a difference between a position command signal for controlling an upward and downward displacement of the bonding tool means and a position signal outputted from a sensor means for electrically detecting an actual upward and downward displacement of said bonding tool means during said wire bonding cycle; actuating said differential signal with a predetermined threshold value for detecting a stopping of said bonding tool means caused by a landing of the bonding tool means on one of the first and second bonding regions so as to obtain a landing signal; and actuating said bonding tool means in accordance with the landing signal, by applying a predetermined bonding load to the bonding tool means with one of the linear motor means and the electromagnetic linear drive means to execute a wire bonding operation.

Claim 7

A wire bonding method for bonding a first wire bonding region to a second wire bonding region corresponding thereto through a bonding wire by a bonding tool means and a bonding arm means supporting the bonding tool means, the method comprising the steps of: directly driving the bonding tool means and the bonding arm means in a bonding cycle for driving the tool in an upward and downward direction by one of a linear motor means and an electromagnetic linear drive means; monitoring a differential signal during said wire bonding cycle representative of a difference between a position command signal for controlling an upward and downward displacement of the bonding tool means and a position signal outputted from a sensor means for electrically detecting an actual upward and downward displacement of said bonding tool means during said wire bonding cycle; actuating said differential signal with a predetermined threshold value for detecting a stopping of said bonding tool means caused by a landing of the bonding tool means on one of the first and second bonding regions so as to obtain a landing signal; and actuating said bonding tool means in accordance with the landing signal, by applying a predetermined bonding load to the bonding tool means with one of the linear motor means and the electromagnetic linear drive means to execute a wire bonding operation.

Claim 8

The method as defined in claim 5, wherein said bonding tool means includes a wedge means operating in an ultrasonic wire bonding mode.

Claim 9

The method as defined in claim 5, wherein said bonding tool means includes a capillary means in a ball bonding mode.

Claim 10

A wire bonding apparatus, the apparatus comprising: a bonding tool means; a driving arm means supporting said bonding tool means at one end thereof; a driving source means for driving said bonding arm means and said bonding tool means in a bonding cycle in an upward and downward direction by one of a linear motor and an electromagnetic linear drive means; an X-Y table for mounting and driving, in an X direction and a Y direction, said bonding tool means, said driving arm means, and said driving source means; a position detecting sensor means for detecting the upward and downward displacement of said arm means during said bonding cycle; a control circuit means for electrically controlling said driving source means during said bonding cycle; and comparator means for comparing a differential signal with a predetermined threshold value and detecting, in accordance with a result of a comparison by the comparator means during said bonding cycle, a stopping of said bonding tool means caused by a landing of said bonding tool means on a workpiece, said differential signal representing a difference between a position command signal for displacing said bonding tool means in the upward and downward directions through said control circuit means, driving source means and arm means, and a position signal obtained from said position detecting sensor means, during said wire bonding cycle said control circuit means being adapted to actuate said bonding tool means, in accordance with the detection of the landing, by applying a predetermined bonding load to the bonding tool means with the driving source means.

Claim 11

A wire bonding apparatus, the apparatus comprising: a bonding tool means; a driving arm means supporting said bonding tool means at one end thereof; a driving source means for driving said bonding arm means and said bonding tool means in a bonding cycle in an upward and downward direction by one of a linear motor and an electromagnetic linear drive means; an X-Y table for mounting and driving, in an X direction and a Y direction, said bonding tool means, said driving arm means, and said driving source means; a position detecting sensor means for detecting the upward and downward displacement of said arm means during said bonding cycle; a control circuit means for electrically controlling said driving source means during said bonding cycle; and comparator means for comparing a differential signal with a predetermined threshold value and detecting, in accordance with a result of a comparison by the comparator means during said bonding cycle, a stopping of said bonding tool means caused by a landing of said bonding tool means on a workpiece, said differential signal representing a difference between a position command signal for displacing said bonding tool means in the upward and downward directions through said control circuit means, driving source means and arm means, and a position signal obtained from said position detecting sensor means, during said wire bonding cycle said control circuit means being adapted to actuate said bonding tool means, in accordance with the detection of the landing, by applying a predetermined bonding load to the bonding tool means with the driving source means.

Claim 12

A wire bonding apparatus comprising: a wedge means forming a bonding tool means in an ultrasonic wire bonding mode; an ultrasonic horn means connected to said wedge means; an ultrasonic vibrator means for ultrasonically vibrating said wedge means; driving source means including one of a linear motor means and an electromagnetic linear drive means for displacing said wedge means in an upward and downward direction during a wire bonding cycle; an arm means for supporting said bonding tool means at one end thereof; an X-Y table for mounting and driving, in an X-direction and a Y-direction, the wedge means, the ultrasonic horn means, the ultrasonic vibrator means, the driving source means, and the arm means; fulcrum means for mounting said arm means in such a fashion that said ultrasonic horn means is attached to an end thereof disposed opposite to an upward and downward displacement portion of said driving source means; a position detecting sensor means for detecting an upward and downward displacement of said arm means during said wire bonding cycle; a control circuit means for electrically controlling the upward and downward displacement portion of said driving source means during said wire bonding cycle; and a comparator means for comparing a differential signal with a predetermined threshold value and detecting, in accordance with a result of a comparison by the comparator means during said wire bonding cycle, a stopping of said bonding tool means caused by a landing of said bonding tool means on a workpiece, said differential signal representing a difference between a position command signal for displacing said bonding tool means upwardly and downwardly through said control circuit means, driving source means, and arm means, and a position signal obtained from said position detecting sensor means during said wire bonding cycle, said control circuit means being adapted to actuate said bonding tool means, in accordance with the detection of the landing, by initiating the ultrasonic vibrator means and applying a predetermined bonding load to the bonding tool means with the driving source means to execute a wire bonding operation.

Claim 13

A wire bonding apparatus comprising: a wedge means forming a bonding tool means in an ultrasonic wire bonding mode; an ultrasonic horn means connected to said wedge means; an ultrasonic vibrator means for ultrasonically vibrating said wedge means; driving source means including one of a linear motor means and an electromagnetic linear drive means for displacing said wedge means in an upward and downward direction during a wire bonding cycle; an arm means for supporting said bonding tool means at one end thereof; an X-Y table for mounting and driving, in an X-direction and a Y-direction, the wedge means, the ultrasonic horn means, the ultrasonic vibrator means, the driving source means, and the arm means; fulcrum means for mounting said arm means in such a fashion that said ultrasonic horn means is attached to an end thereof disposed opposite to an upward and downward displacement portion of said driving source means; a position detecting sensor means for detecting an upward and downward displacement of said arm means during said wire bonding cycle; a control circuit means for electrically controlling the upward and downward displacement portion of said driving source means during said wire bonding cycle; and a comparator means for comparing a differential signal with a predetermined threshold value and detecting, in accordance with a result of a comparison by the comparator means during said wire bonding cycle, a stopping of said bonding tool means caused by a landing of said bonding tool means on a workpiece, said differential signal representing a difference between a position command signal for displacing said bonding tool means upwardly and downwardly through said control circuit means, driving source means, and arm means, and a position signal obtained from said position detecting sensor means during said wire bonding cycle, said control circuit means being adapted to actuate said bonding tool means, in accordance with the detection of the landing, by initiating the ultrasonic vibrator means and applying a predetermined bonding load to the bonding tool means with the driving source means to execute a wire bonding operation.

Claim 14

A wire bonding apparatus comprising: a capillary means for forming a wire bonding tool in a ball bonding mode; a driving source means including one of a linear motor means and an electromagnetic linear drive means for moving said capillary means in an upward and downward direction during a wire bonding cycle; arm means having said capillary means attached to one end thereof; fulcrum means for mounting said arm means such that said capillary means and an upward and downward displacement portion of said driving source means is disposed at an end of said arm means opposite said capillary means; a position detecting sensor means for detecting an upward and downward displacement of said arm means during said wire bonding cycle; a control circuit means for electrically controlling the upward and downward displacement portion of said driving source means during said wire bonding cycle; and a comparator means for comparing a differential signal with a predetermined threshold value and detecting, in accordance with a result of a comparison by said comparator means during said wire bonding cycle, a stopping of said bonding tool means caused by a landing of the bonding tool means on a workpiece, said differential signal representing a difference between a position command signal for displacing said bonding tool means upwardly and downwardly through said control circuit means, driving source means, the arm means, and a position signal obtained from said position detecting sensor means during said wire bonding cycle, said control circuit means being adapted to actuate said bonding tool means, in accordance with the detection of the landing, by applying a predetermined bonding load to the bonding tool means with the driving source means.

Claim 15

A wire bonding apparatus comprising: a capillary means for forming a wire bonding tool in a ball bonding mode; a driving source means including one of a linear motor means and an electromagnetic linear drive means for moving said capillary means in an upward and downward direction during a wire bonding cycle; arm means having said capillary means attached to one end thereof; fulcrum means for mounting said arm means such that said capillary means and an upward and downward displacement portion of said driving source means is disposed at an end of said arm means opposite said capillary means; a position detecting sensor means for detecting an upward and downward displacement of said arm means during said wire bonding cycle; a control circuit means for electrically controlling the upward and downward displacement portion of said driving source means during said wire bonding cycle; and a comparator means for comparing a differential signal with a predetermined threshold value and detecting, in accordance with a result of a comparison by said comparator means during said wire bonding cycle, a stopping of said bonding tool means caused by a landing of the bonding tool means on a workpiece, said differential signal representing a difference between a position command signal for displacing said bonding tool means upwardly and downwardly through said control circuit means, driving source means, the arm means, and a position signal obtained from said position detecting sensor means during said wire bonding cycle, said control circuit means being adapted to actuate said bonding tool means, in accordance with the detection of the landing, by applying a predetermined bonding load to the bonding tool means with the driving source means.

Claim 16

An apparatus according to claim 10, wherein means are provided for applying a thermo-compression and ultrasonic vibration to said capillary means.

Claim 17

An apparatus according to claim 10, wherein means are provided for applying a thermo-compression to said capillary means.