US5075256A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer
Assignee: Applied Materials Inc
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Filing: 1989-08-25
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Granted: 1991-12-24
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Expires: 2009-08-25
Abstract
Abstract A method and apparatus are disclosed for removing one or more materials deposited on the backside and end edges of a semiconductor wafer which comprises urging the front side of the wafer against a faceplate in a vacuum chamber; flowing one or more gases through a space maintained between the front side of the wafer and the faceplate; and forming a plasma in a gap maintained between the backside of the wafer and susceptor to remove materials deposited on the backside and end edge of the wafer; the gas flowing through the space between the front side of the wafer and the faceplate acting to prevent the plasma from removing materials on the front side of the wafer. In a preferred embodiment, the front side of the wafer is spaced from the faceplate by providing a generally circular recess in the faceplate having a depth corresponding to the desired spacing and having a diameter larger than the diameter of the wafer with spacing means in the recessed area to engage portions of the wafer to permit gas to flow through the recess and around the end edge of the wafer to inhibit removal of materials from the front surface of the wafer by the plasma.
Inventors
- 👤 David N. Wang
- 👤 Lawrence C. Lei
- 👤 Mei Chang
- 👤 Cissy Leung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:55
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/12; H10P70/50; H10P70/56; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P50/28; H10P50/282; H10P50/283; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S438/00; Y10S438/963
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
178 words
A method for removing, in a vacuum chamber, one or more materials deposited on the backside and end edge of a semiconductor wafer which comprises: (a) urging the front side of said wafer upwardly against an undersurface of a faceplate in said chamber, said faceplate having openings in said undersurface through which one or more gases enter said chamber; (b) flowing into said chamber through said openings in said undersurface of said faceplate one or more of said gases over the surface of said front side of said wafer through a space maintained between said front side of said wafer and said undersurface of said faceplate; and (c) forming a plasma in a gap maintained between the backside of said wafer and a susceptor in said chamber on which said wafer normally rests to remove materials deposited on said backside and end edges of said wafer; wherein said flow of gas in said space between said front side of said wafer and said faceplate will prevent said plasma from removing materials on said front side of said wafer.
Claim 2
Independent Claim
178 words
A method for removing, in a vacuum chamber, one or more materials deposited on the backside and end edge of a semiconductor wafer which comprises: (a) urging the front side of said wafer upwardly against an undersurface of a faceplate in said chamber, said faceplate having openings in said undersurface through which one or more gases enter said chamber; (b) flowing into said chamber through said openings in said undersurface of said faceplate one or more of said gases over the surface of said front side of said wafer through a space maintained between said front side of said wafer and said undersurface of said faceplate; and (c) forming a plasma in a gap maintained between the backside of said wafer and a susceptor in said chamber on which said wafer normally rests to remove materials deposited on said backside and end edges of said wafer; wherein said flow of gas in said space between said front side of said wafer and said faceplate will prevent said plasma from removing materials on said front side of said wafer.
Claim 3
Dependent Claim
57 words
The process of claim 1 wherein said step of flowing one or more gases through said space maintained between said front side of said wafer and said faceplate further comprises flowing through said space one or more gases capable of reacting with said one or more materials deposited on the backside and end edge of said wafer.
Claim 4
Dependent Claim
65 words
The process of claim 2, including the further step of providing spacing means to space said front surface of said wafer from a portion of said faceplate containing openings for said gases to permit said gases to enter the space thereby created between said faceplate and the front surface of said wafer to thereby inhibit removal of materials from said front surface of said wafer.
Claim 5
Dependent Claim
64 words
The process of claim 3 including the further step of forming a recessed central portion in said faceplate containing gas passage openings to thereby, in cooperation with said spacing means, create a space between the faceplate and the front surface of the wafer through which said one or more gases may flow to inhibit removal of materials from said front surface of said wafer.
Claim 6
Independent Claim
206 words
A method for removing, in a vacuum chamber, one or more materials deposited on the back surface and end edge of a semiconductor wafer which comprises: (a) urging the front sueface of said wafer upwardly against an undersurface of a faceplate in said chamber; (b) providing spacing means to form a space between said front surface of said wafer and a portion of said undersurface of said faceplate containing openings for gases to enter said chamber to permit said gases to enter said space; (c) flowing one or more gases through openings in said faceplate into space maintained between said front surface of said wafer and said undersurface of said faceplate and then into a portion of said chamber below said wafer; and (d) forming a plasma in said portion of said chamber below said wafer in a gap maintained between said back surface of said wafer and a susceptor beneath said wafer in said chamber to remove materials deposited on said back surface and end edges of said wafer; said flow of gas through said space maintained between said front surface of said wafer and said faceplate acting to prevent said plasma beneath said wafer from removing materials on said front surface of said wafer.
Claim 7
Independent Claim
206 words
A method for removing, in a vacuum chamber, one or more materials deposited on the back surface and end edge of a semiconductor wafer which comprises: (a) urging the front sueface of said wafer upwardly against an undersurface of a faceplate in said chamber; (b) providing spacing means to form a space between said front surface of said wafer and a portion of said undersurface of said faceplate containing openings for gases to enter said chamber to permit said gases to enter said space; (c) flowing one or more gases through openings in said faceplate into space maintained between said front surface of said wafer and said undersurface of said faceplate and then into a portion of said chamber below said wafer; and (d) forming a plasma in said portion of said chamber below said wafer in a gap maintained between said back surface of said wafer and a susceptor beneath said wafer in said chamber to remove materials deposited on said back surface and end edges of said wafer; said flow of gas through said space maintained between said front surface of said wafer and said faceplate acting to prevent said plasma beneath said wafer from removing materials on said front surface of said wafer.
Claim 8
Dependent Claim
50 words
The process of claim 5 wherein said step of forming a space between said front surface of said wafer and said faceplate further comprises spacing said front surface of said wafer from said faceplate a distance within a range of from about from about 0.127 mm to about 0.508 mm.
Claim 9
Dependent Claim
54 words
The process of claim 6 wherein said step of flowing one or more gases through said space between said front surface of said wafer and said faceplate further comprises flowing one or more gases capable of reacting with said one or more materials deposited on the back surface and end edge of said wafer.
Claim 10
Dependent Claim
82 words
The process of claim 6 wherein said step of forming a space between said face plate and said front surface of said wafer further comprises forming a central circular recess in said front surface of said faceplate having a diameter larger than the diameter of said wafer, with segments of said faceplate not recessed protruding laterally into said recess a distance sufficient to engage portions of said front surface of said wafer while providing a space through which said gas may flow.
Claim 11
Dependent Claim
42 words
The process of claim 8 wherein said step of forming said recess includes forming said segments of said faceplate to laterally protrude into said recess a distance of from about 2.3 to 2.54 mm to support said front surface of said wafer.
Claim 12
Dependent Claim
40 words
The process of claim 6 wherein said step of forming said recess further comprises forming a gap between the outer edge of said recess and the end edge of said wafer which averages from about 1.27 to about 1.52 mm.
Claim 13
Dependent Claim
127 words
The process of claim 6 wherein said step of spacing said wafer from said recess in said faceplate further comprises forming a central circular recess portion in the front surface of said faceplate having a diameter larger than the diameter of said wafer, and spacing means in said recess portion having a level equal to the level of the unrecessed portion of said front surface of said faceplate to engage the front surface of said wafer to space it from the recessed portion of said faceplate while permitting gas to flow in the space between the front surface of said faceplate and the front side of the wafer created by said recess and to permit gas to flow around 360° of the end edge of said wafer.
Claim 14
Dependent Claim
50 words
The process of claim 6 wherein said step of forming a space between said face plate and said front surface of said wafer further comprises providing raised portions on the surface of said faceplate facing said front surface of said wafer to thereby space said front surface from said faceplate.
Claim 15
Dependent Claim
41 words
The process of claim 6 wherein said step of flowing said one or more gases through said space maintained between said front surface of said wafer and said faceplate further comprises flowing at least one gas capable of generating fluorine radicals.
Claim 16
Dependent Claim
57 words
The process of claim 13 wherein said step of flowing said one or more gases through said space maintained between said front surface of said wafer and said faceplate further comprises flowing at least one gas selected from the class consisting of NF 3 , SF 6 , CF 4 , and C 2 F 6 .
Claim 17
Dependent Claim
32 words
The process of claim 6 wherein said step of forming a plasma in said gap further comprises maintaining said plasma at a power level of from about 200 to about 800 watts.
Claim 18
Dependent Claim
43 words
The process of claim 15 wherein said step of forming said plasma further comprises maintaining said plasma for a period of from about 30 seconds to about 5 minutes to remove said deposits from said back surface and end edge of said wafer.
Claim 19
Independent Claim
238 words
A method for removing, in a vacuum chamber, one or more materials deposited on the back surface and end edge of a semiconductor wafer which comprises: (a) mounting said wafer on a susceptor in said vacuum chamber beneath a showerhead electrode therein having an undersurface from which one or more gases enter said chamber through openings in said undersurface of said showerhead electrode; (b) raising said wafer off said susceptor and urging the front surface of said wafer upwardly into contact with spacer means on said undersurface of said showerhead electrode in said chamber to thereby form a space between said front surface of said wafer and a portion of said undersurface of said showerhead electrode; (c) flowing one or more gases through said openings in said showerhead electrode into said space between said front surface of said wafer and said undersurface of said showerhead electrode and then into a portion of said chamber below said wafer and above said susceptor; and (d) forming a plasma in said portion of said chamber below said wafer in a gap maintained between said back surface of said wafer and said susceptor to remove materials deposited on said back surface and end edges of said wafer; said flow of gas through said space between said front surface of said wafer and said faceplate acting to prevent said plasma beneath said wafer from removing materials on said front surface of said wafer.
Claim 20
Independent Claim
238 words
A method for removing, in a vacuum chamber, one or more materials deposited on the back surface and end edge of a semiconductor wafer which comprises: (a) mounting said wafer on a susceptor in said vacuum chamber beneath a showerhead electrode therein having an undersurface from which one or more gases enter said chamber through openings in said undersurface of said showerhead electrode; (b) raising said wafer off said susceptor and urging the front surface of said wafer upwardly into contact with spacer means on said undersurface of said showerhead electrode in said chamber to thereby form a space between said front surface of said wafer and a portion of said undersurface of said showerhead electrode; (c) flowing one or more gases through said openings in said showerhead electrode into said space between said front surface of said wafer and said undersurface of said showerhead electrode and then into a portion of said chamber below said wafer and above said susceptor; and (d) forming a plasma in said portion of said chamber below said wafer in a gap maintained between said back surface of said wafer and said susceptor to remove materials deposited on said back surface and end edges of said wafer; said flow of gas through said space between said front surface of said wafer and said faceplate acting to prevent said plasma beneath said wafer from removing materials on said front surface of said wafer.
Claim 21
Independent Claim
318 words
A method for removing, in a vacuum chamber, one or more materials deposited on the back surface and end edge of a semiconductor wafer which comprises: (a) mounting said wafer on a susceptor in said vacuum chamber beneath a showerhead electrode therein having an undersurface from which one or more gases enter said chamber through openings in said undersurface of said showerhead electrode; (b) raising said wafer off said susceptor and urging the front surface of said wafer upwardly into contact with spacer means on said undersurface of said showerhead electrode in said chamber to thereby form a space of from about 0.127 mm to about 0.508 mm between said front surface of said wafer and a portion of said undersurface of said showerhead electrode; (c) flowing one or more gases, capable of generating fluorine radicals which will react with said one or more materials deposited on said back surface of said wafer, through said openings in said showerhead electrode into said space between said front surface of said wafer and said undersurface of said showerhead electrode and then into a portion of said chamber below said wafer and above said susceptor; and (d) forming a plasma in said portion of said chamber below said wafer at a power level of from about 200 to about 600 watts in a gap maintained between said back surface of said wafer and said susceptor to remove materials deposited on said back surface and end edges of said wafer; and (e) maintaining said plasma in said chamber for a period of from about 30 seconds to about 5 minutes to remove said deposits from said back surface and end edge of said wafer; said flow of gas through said space maintained between said front surface of said wafer and said faceplate acting to prevent said plasma beneath said wafer from contacting and removing materials on said front surface of said wafer.
Claim 22
Independent Claim
318 words
A method for removing, in a vacuum chamber, one or more materials deposited on the back surface and end edge of a semiconductor wafer which comprises: (a) mounting said wafer on a susceptor in said vacuum chamber beneath a showerhead electrode therein having an undersurface from which one or more gases enter said chamber through openings in said undersurface of said showerhead electrode; (b) raising said wafer off said susceptor and urging the front surface of said wafer upwardly into contact with spacer means on said undersurface of said showerhead electrode in said chamber to thereby form a space of from about 0.127 mm to about 0.508 mm between said front surface of said wafer and a portion of said undersurface of said showerhead electrode; (c) flowing one or more gases, capable of generating fluorine radicals which will react with said one or more materials deposited on said back surface of said wafer, through said openings in said showerhead electrode into said space between said front surface of said wafer and said undersurface of said showerhead electrode and then into a portion of said chamber below said wafer and above said susceptor; and (d) forming a plasma in said portion of said chamber below said wafer at a power level of from about 200 to about 600 watts in a gap maintained between said back surface of said wafer and said susceptor to remove materials deposited on said back surface and end edges of said wafer; and (e) maintaining said plasma in said chamber for a period of from about 30 seconds to about 5 minutes to remove said deposits from said back surface and end edge of said wafer; said flow of gas through said space maintained between said front surface of said wafer and said faceplate acting to prevent said plasma beneath said wafer from contacting and removing materials on said front surface of said wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-12-23 | 1995-06-24 | 1995-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-23 | 1999-06-24 | 1999-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-23 | 2003-06-24 | 2003-12-24 | $7700.00 | Window Closed / Lapsed |