Patent US5086286A successfully refreshed from Google Patents.
US5086286A
Expired / Lapsed
US
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Gas-sensitive device
Assignee: Kurabe Industrial Co Ltd
•
Filing: 1990-07-26
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Granted: 1992-02-04
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Expires: 2010-07-26
Abstract
Abstract A thin film gas-sensitive device includes an insulating substrate having a pair of electrodes, a gas-sensitive layer having a gas sensitive substance deposited on the insulating substrate and electrodes, and a catalytic layer deposited on the gas-sensitive layer and insulating substrate as a non-continuous layer. The insulating substrate is partly uncovered because the electrodes, the gas-sensitive layer containing the gas-sensitive substance and the catalytic layer do not thoroughly cover the substrate.
Inventors
- 👤 Yoshikazu Yasukawa
- 👤 Norihiro Inagaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:05
CPC Classifications
G; G01; G01N; G01N33/00; G01N33/0004; G01N33/0009; G01N33/0027; G01N33/0036; G01N33/004; G01N27/00; G01N27/02; G01N27/04; G01N27/12; H; H01; H01C; H01C7/00
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
74 words
A thin film gas-sensitive device comprising: an insulating substrate having a pair of electrodes disposed theron; a gas-sensitive layer, having a gas sensitive substance, deposited on the insulating substrate and electrodes; and a catalytic layer deposited on the gas-sensitive layer and insulating substrate as a non-continuous layer; wherein the insulating substrate is partly uncovered because the electrodes, the gas-sensitive layer containing the gas-sensitive substance and the catalytic layer do not thoroughly cover the substrate.
Claim 2
Dependent Claim
74 words
A thin film gas-sensitive device comprising: an insulating substrate having a pair of electrodes disposed theron; a gas-sensitive layer, having a gas sensitive substance, deposited on the insulating substrate and electrodes; and a catalytic layer deposited on the gas-sensitive layer and insulating substrate as a non-continuous layer; wherein the insulating substrate is partly uncovered because the electrodes, the gas-sensitive layer containing the gas-sensitive substance and the catalytic layer do not thoroughly cover the substrate.
Claim 3
Dependent Claim
24 words
A gas-sensitive device according to claim 1, wherein the gas-sensitive substance comprises at least one of SnO 2 or In 2 O 3 .
Claim 4
Dependent Claim
35 words
A gas-sensitive device according to claim 1 for use in detecting CO-gas, wherein the device contains less than 900 parts by weight of Au per 100 parts by weight of Sn in the gas-sensitive layer.
Claim 5
Dependent Claim
30 words
A gas-sensitive device according to claim 1, wherein the catalytic layer is of an average thickness of 5 nm or less and comprises at least one of Pt and Pd.
Claim 6
Dependent Claim
21 words
A gas-sensitive device according to claim 3, wherein the gas sensitive layer contains Sn in the form of SnO 2 .
Claim 7
Dependent Claim
13 words
A gas sensitive device according to claim 1, wherein the electrodes are comb-shaped.
Claim 8
Dependent Claim
70 words
A gas-sensitive device comprising: an insulating substrate; a pair of electrodes disposed on the substrate; a gas-sensitive substance deposited on portions of the substrate and the electrodes such that the substrate and the electrodes are only partially covered by the gas-sensitive substance; and a catalyst deposited on portions of the gas-sensitive substance and the substrate such that the gas-sensitive substance and the substrate are only partially covered by the catalyst.
Claim 9
Dependent Claim
70 words
A gas-sensitive device comprising: an insulating substrate; a pair of electrodes disposed on the substrate; a gas-sensitive substance deposited on portions of the substrate and the electrodes such that the substrate and the electrodes are only partially covered by the gas-sensitive substance; and a catalyst deposited on portions of the gas-sensitive substance and the substrate such that the gas-sensitive substance and the substrate are only partially covered by the catalyst.
Claim 10
Dependent Claim
23 words
The gas-sensitive device of claim 7, wherein the gas-sensitive substance comprises at least one of SnO 2 or In 2 O 3 .
Claim 11
Dependent Claim
37 words
The gas-sensitive device of claim 7, wherein the gas-sensitive substance comprises a mixture of Au and SnO 2 , the mixture being less than 900 parts by weight of Au per 100 parts by weight of Sn.
Claim 12
Dependent Claim
15 words
The gas-sensitive device of claim 7, wherein the catalyst is one of Pt and Pd.
Claim 13
Dependent Claim
25 words
The gas-sensitive device of claim 10, wherein the catalyst is deposited as a non-continuous layer having an average thickness of no more than 5 nm.
Claim 14
Dependent Claim
66 words
A method of producing the gas-sensitive device according to claim 7, comprising: providing the insulating substrate; forming the pair of electrodes on the substrate; depositing a selected average thickness of the gas-sensitive substance in a vacuum on the electrodes and substrate; thermally treating the gas-sensitive substance to oxidize the gas-sensitive substance; and depositing a selected average thickness of the catalyst on the substrate and gas-sensitive substance.
Claim 15
Dependent Claim
17 words
The method according to claim 12, wherein the average thickness of the gas-sensitive substance is 13 nm.
Claim 16
Dependent Claim
16 words
The method according to claim 12, wherein the average thickness of the catalyst is 5 nm.
Claim 17
Dependent Claim
26 words
The method according to claim 12, wherein during depositing of the gas-sensitive substance and the catalyst, the selected average thicknesses are measured using a crystal oscillator.
Claim 18
Dependent Claim
71 words
The method according to claim 12, wherein depositing a selected average thickness of the gas-sensitive substance in a vacuum on the electrodes and substrate comprises: depositing less than 900 parts by weight of Au; and depositing 100 parts by weight of Sn, and wherein during the step of thermally treating the gas-sensitive substance to oxidize the gas-sensitive substance, SnO 2 is formed and the Au mixes with the SnO 2 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-03 | 1995-08-05 | 1996-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-03 | 1999-08-05 | 2000-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-03 | 2003-08-05 | 2004-02-04 | $7700.00 | Window Closed / Lapsed |