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US5114826A
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Photosensitive polyimide compositions
Assignee: International Business Machines Corp
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Filing: 1989-12-28
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Granted: 1992-05-19
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Expires: 2009-12-28
Abstract
Abstract New photosensitive polyimide compositions and processes of using the same in the fabrication of electronic components are provided. These compositions are comprised of ##STR1## containing polyamic acids and/or the corresponding hydroxy-polyamic esters, or hydroxypolyimides and a photoactive component as an additive or as covalently bonded functionality on the polymer chain. These compositions provide positive or negative patterning options and may be used as conventional resist materials, as imageable dielectric or passivating layers, as high Tg ion implant masks or as imageable lift-off layers in the fabrication of multilevel metal structures.
Inventors
- 👤 Ranee W. Kwong
- 👤 Harbans S. Sachdev
- 👤 Krishna G. Sachdev
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:56
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; G03F7/0758; G03F7/038; G03F7/0387; G03F7/039; H; H10; H10W; H10W72/00; H10W72/01; H10W72/012; H10W72/01221; H10W72/01225
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
90 words
A thermally stable photosensitive polymer composition comprising a substantially gel-free polyamic acid, polyamic ester or polyimide formed in a solvent comprising a N-methylpyrrolidone-diglyme mixture by the condensation of (a) a bis-(3-amino-4-hydroxyphenyl) composition of the structure ##STR32## where Q is selected from the group consisting of ##STR33## and (b) a dianhydride selected form the group consisting of (1) a bis-(3,4 dicarboxyphenyl) anhydride composition of the structure ##STR34## where Z is selected from the group consisting of ##STR35## and (2) an aliphatic tetracarboxylic anhydride of the form ##STR36## and a photoactive compound.
Claim 2
Dependent Claim
90 words
A thermally stable photosensitive polymer composition comprising a substantially gel-free polyamic acid, polyamic ester or polyimide formed in a solvent comprising a N-methylpyrrolidone-diglyme mixture by the condensation of (a) a bis-(3-amino-4-hydroxyphenyl) composition of the structure ##STR32## where Q is selected from the group consisting of ##STR33## and (b) a dianhydride selected form the group consisting of (1) a bis-(3,4 dicarboxyphenyl) anhydride composition of the structure ##STR34## where Z is selected from the group consisting of ##STR35## and (2) an aliphatic tetracarboxylic anhydride of the form ##STR36## and a photoactive compound.
Claim 3
Dependent Claim
16 words
The photosensitive polymer of claim 1 wherein at least one of Q and Z is ##STR37##
Claim 4
Dependent Claim
20 words
The photosensitive polymer of claim 1 wherein the mole equivalent ratio of diamine to dianhydride is from 1:1 to 1.25:1.
Claim 5
Dependent Claim
23 words
The photosensitive polymer of claim 3 which includes a chain terminating group selected from the group consisting of phthalic anhydride and hydroxyphthalic anhydride.
Claim 6
Dependent Claim
15 words
The photosensitive polymer of claim 1 wherein the photoactive compound is a diazoketone or bisazide.
Claim 7
Dependent Claim
13 words
The photosensitive polymer of claim 1 which is developable in aqueous alkaline developer.
Claim 8
Dependent Claim
18 words
The photosensitive polymer of claim 6 wherein the developer is potassium hydroxide, sodium hydroxide or tetramethyl ammonium hydroxide.
Claim 9
Dependent Claim
10 words
The photosensitive polymer of claim 1 which is solvent strippable.
Claim 10
Dependent Claim
17 words
The photosensitive polymer of claim 1 which is solvent strippable after heat treatment to about 250° C.
Claim 11
Dependent Claim
12 words
The photosensitive polymer of claim 1 wherein the solvent further comprises xylene.
Claim 12
Dependent Claim
92 words
A thermally stable photosensitive polymer composition comprising a polyamic acid, polyamic ester or polyimide formed in a solvent comprising a N-methyl-pyrolidone-diglyme mixture by the condensation of (a) a bis-(3-amino-4-hydroxyphenyl) composition of the structure ##STR38## where Q is selected from the group consisting of ##STR39## (b) a dianhydride selected from the group consisting of (1) a bis-(3,4 dicarboxyphenyl) anhydride composition of the structure ##STR40## where Z is selected from the group consisting of ##STR41## and (2) an aliphatic tetracarboxylic anhydride of the form ##STR42## where the polyimide is functionalized through its hydroxy groups.
Claim 13
Dependent Claim
92 words
A thermally stable photosensitive polymer composition comprising a polyamic acid, polyamic ester or polyimide formed in a solvent comprising a N-methyl-pyrolidone-diglyme mixture by the condensation of (a) a bis-(3-amino-4-hydroxyphenyl) composition of the structure ##STR38## where Q is selected from the group consisting of ##STR39## (b) a dianhydride selected from the group consisting of (1) a bis-(3,4 dicarboxyphenyl) anhydride composition of the structure ##STR40## where Z is selected from the group consisting of ##STR41## and (2) an aliphatic tetracarboxylic anhydride of the form ##STR42## where the polyimide is functionalized through its hydroxy groups.
Claim 14
Dependent Claim
29 words
The photosensitive polymer composition of claim 11 where the functionalizing group is a t-butyloxycarbonyl group, epoxypropyl group, methacryloyl group, o-naphthoquinone diazide-4-sulfonyl group, o-naphthoquinone diazide-5-sulfonyl group, or a polysiloxane group.
Claim 15
Dependent Claim
21 words
The photosensitive polymer composition of claim 11 wherein the mole equivalent ratio of diamine to dianhydride is from 1:1 to 1.25:1.
Claim 16
Dependent Claim
24 words
The photosensitive polymer composition of claim 13 which includes a chain terminating group selected from the group consisting of phthalic anhydride and hydroxyphthalic anhydride.
Claim 17
Dependent Claim
21 words
The photosensitive polymer composition of claim 13 wherein the mole equivalent ratio of diamine to dianhydride is from 1.05:1 to 1.25:1.
Claim 18
Dependent Claim
19 words
The photosensitive polymer composition of claim 15 which is imageable to provide high resolution submicron images in thin films.
Claim 19
Dependent Claim
12 words
The photosensitive polymer of claim 11 which further comprises a photoactive compound.
Claim 20
Dependent Claim
15 words
The photosensitive polymer of claim 17 wherein the photoactive compound is a diazoketone or bisazide.
Claim 21
Dependent Claim
13 words
The photosensitive polymer of claim 11 which is developable in aqueous alkaline developer.
Claim 22
Dependent Claim
18 words
The photosensitive polymer of claim 19 wherein the developer is potassium hydroxide, sodium metasilicate or tetramethyl ammonium hydroxide.
Claim 23
Dependent Claim
10 words
The photosensitive polymer of claim 11 which is solvent strippable.
Claim 24
Dependent Claim
17 words
The photosensitive polymer of claim 11 which is solvent strippable after heat treatment to about 250° C.
Claim 25
Dependent Claim
12 words
The photosensitive polymer of claim 11 wherein the solvent further comprises xylene.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-19 | 1995-11-18 | 1996-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-19 | 1999-11-18 | 2000-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-19 | 2003-11-18 | 2004-05-19 | $7700.00 | Window Closed / Lapsed |