Abstract In a probe card, a plurality of holes are provided in a performance board and a probe needle is inserted through the hole and movable via the performance board in an up/down motion without being secured to the performnce board. A spring is held in place around the probe needle. A securing board is located relative to the performance board and a plurality of pistons each has an end which is projected via the securing board and are provided on the securing board to allow the corresponding probe needle to push. Upon the operation of the air cylinder in a position corresponding to the pad of the chip to be tested, the corresponding probe needle is selectively pushed, by the projecting end of the piston, into contact with the pad of any detected chip to start the measurement of the chip. When the air cylinder is not operated, the corresponding probe needle is pushed up, by the spring, away from the chip. Probe needles can be properly selected by one probe card and handle the corresponding pads of various types of semiconductor elements. Since the probe needles are not secured to the associated board, the present probe card can readily cope with the situation which would otherwise require a whole or partial replacement of the probe needles with new ones in accordance with various types of semiconductor devices.
A probe card comprising: a securing board a performance board arranged opposite to the securing board and having a plurality of holes; a plurality of probe needles, each of which is, inserted through a hole of said performance board to allow it to be moved, in an up/down motion; a plurality of spring means, each biasing the corresponding needle into a retracted position away from a corresponding semiconductor element pad to be tested; and and a plurality of probe needle reciprocating means, each of which has a piston corresponding to the probe needle, each piston having one end projecting from the securing board and adapted to selectively push the probe needle, the number of the probe needle reciprocating means being equal to that of the probe needles, wherein the projecting ends of the pistons of the probe needle reciprocating means, selectively push the probe needles against a biasing force of the spring means and into contact with the corresponding semiconductor element pad.
Claim 2
Dependent Claim
162 words
A probe card comprising: a securing board a performance board arranged opposite to the securing board and having a plurality of holes; a plurality of probe needles, each of which is, inserted through a hole of said performance board to allow it to be moved, in an up/down motion; a plurality of spring means, each biasing the corresponding needle into a retracted position away from a corresponding semiconductor element pad to be tested; and and a plurality of probe needle reciprocating means, each of which has a piston corresponding to the probe needle, each piston having one end projecting from the securing board and adapted to selectively push the probe needle, the number of the probe needle reciprocating means being equal to that of the probe needles, wherein the projecting ends of the pistons of the probe needle reciprocating means, selectively push the probe needles against a biasing force of the spring means and into contact with the corresponding semiconductor element pad.
Claim 3
Dependent Claim
102 words
The probe card according to claim 1, wherein said plurality of probe needle reciprocating means, each of which has a piston cylinder mounted on said securing board, each of these piston cylinders receiving another end of a said piston, and each of the piston cylinders having an electromagnetic valve connected thereto via a pressure supply tube; said said holes arranged on said performance board in a matrix at an interval of an order of 300 μm said holes have diameters of 350 μm; said probe needle has a diameter of 300 μm; and said piston cylinder has a diameter of 500 μm.