Patent US5146137A successfully refreshed from Google Patents.
US5146137A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for the generation of a plasma
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1990-03-29
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Granted: 1992-09-08
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Expires: 2010-03-29
Abstract
Abstract The invention relates to a device for the generation of a plasma by means of circularly polarized high frequency waves. These high frequency waves are generated by means of voltages having a phase rotation of 90°.
Inventors
- 👤 Roland Gesche
- 👤 Karl-Heinz Kretschmer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:37
CPC Classifications
H; H05; H05H; H05H1/00; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/32137; H01J37/32155; H01J37/32165
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
151 words
An apparatus for generating a plasma inside a first container using circularly polarized high frequency waves by coupling electromagnetic energy into the plasma through the container wall from the outside, said apparatus comprising: a first pair of field generating means connected to a first voltage; a second pair of field generating means connected to a second voltage, wherein the first voltage is 90° phase shifted relative to the second voltage, said first and second pairs of field generating means being mounted on a first region of the container; and a third pair of field generating means and a fourth pair of field generating means mounted on a second region of the container a predetermined distance along the longitudinal axis of the container from the first region of the container, said third and fourth pairs of field generating means being connected to sources of voltage phase shifted with respect to each other.
Claim 2
Independent Claim
151 words
An apparatus for generating a plasma inside a first container using circularly polarized high frequency waves by coupling electromagnetic energy into the plasma through the container wall from the outside, said apparatus comprising: a first pair of field generating means connected to a first voltage; a second pair of field generating means connected to a second voltage, wherein the first voltage is 90° phase shifted relative to the second voltage, said first and second pairs of field generating means being mounted on a first region of the container; and a third pair of field generating means and a fourth pair of field generating means mounted on a second region of the container a predetermined distance along the longitudinal axis of the container from the first region of the container, said third and fourth pairs of field generating means being connected to sources of voltage phase shifted with respect to each other.
Claim 3
Dependent Claim
101 words
An apparatus as defined in claim 1 further comprising: a high frequency voltage source in the form of an oscillator; a first amplifier amplifying the output signal of the oscillator to produce the second voltage such that the amplified signal from the first amplifier is applied once to said plasma without phase shift; a second amplifier amplifying the output signal of the oscillator; and a phase shifter shifting the phase of the signal input to the second amplifier to produce the first voltage such that the amplified signal from the second amplifier is applied once to said plasma with phase shift.
Claim 4
Dependent Claim
83 words
An apparatus as defined in claim 1 further comprising: a high frequency voltage source in the form of an oscillator; an amplifier amplifying the output signal of the oscillator; a first phase shifter shifting the phase of the signal from the amplifier to produce the first voltage; and a second phase shifter shifting the phase of the signal from the amplifier to produce the second voltage such that the amplified signal from the amplifier is applied once to said plasma with phase shift.
Claim 5
Dependent Claim
21 words
An apparatus as defined in claim 1, wherein each of said pairs of field generating means comprises a pair of electrodes.
Claim 6
Dependent Claim
32 words
An apparatus as defined in claim 4 wherein the first and second pairs of electrodes are offset about the axis of the container relative to the third and fourth pairs of electrodes.
Claim 7
Dependent Claim
19 words
An apparatus as defined in claim 1, wherein each of said field generating means comprises a pair of coils.
Claim 8
Dependent Claim
72 words
An apparatus as defined in claim 6 wherein: said first and second pairs of coils are each mounted substantially 90° apart from each other around the container, the waves generated thereby being offset from each other by 90°; and the coils of said third and fourth pairs of coils are each mounted substantially 90° apart from each other around the container, the waves generated thereby being offset from each other by 90°.
Claim 9
Dependent Claim
31 words
An apparatus as defined in claim 4, wherein a static or low-frequency magnetic field is applied to the plasma in addition to the high frequency waves, whereby helicon waves are generated.
Claim 10
Dependent Claim
22 words
An apparatus as defined in claim 8, wherein the static or low-frequency magnetic field is generated by a coil surrounding the container.
Claim 11
Dependent Claim
34 words
An apparatus as defined in claim 1, wherein a second container joins said first container holding the plasma and is integral with the first container, and a coil is mounted around the second container.
Claim 12
Dependent Claim
30 words
An apparatus as defined in claim 4, characterized in that the predetermined distance is adjustable by mechanically displacing the electrodes resulting in an adjustment of the wavelength in the plasma.
Claim 13
Dependent Claim
25 words
An apparatus as defined in claim 1 wherein wavelength in the plasma is adjustable by electrically changing the phase shift of the first and second.
Claim 14
Independent Claim
117 words
An apparatus for generating a plasma inside a container using circularly polarized waves by coupling electromagnetic energy into the plasma through the container wall from the outside, said apparatus comprising: a first pair of field generating means connected to a first voltage; a second pair of field generating means connected to a second voltage, wherein the first voltage is 90° phase shifted relative to the second voltage; and a third pair of and a fourth pair of field generating means longitudinally separated from said first and second pairs of field generating means along said container, said third and fourth pairs of field generating means being connected to sources of voltage phase shifted with respect to each other.
Claim 15
Independent Claim
117 words
An apparatus for generating a plasma inside a container using circularly polarized waves by coupling electromagnetic energy into the plasma through the container wall from the outside, said apparatus comprising: a first pair of field generating means connected to a first voltage; a second pair of field generating means connected to a second voltage, wherein the first voltage is 90° phase shifted relative to the second voltage; and a third pair of and a fourth pair of field generating means longitudinally separated from said first and second pairs of field generating means along said container, said third and fourth pairs of field generating means being connected to sources of voltage phase shifted with respect to each other.
Claim 16
Dependent Claim
63 words
An apparatus as defined in claim 13, wherein each of said pairs of field generating means comprises a pair of coils, and wherein said pairs of coils are mounted around the container, and said first and third pairs of coils are both connected to the first voltage source and said second and fourth pairs of coils are both connected to the second voltage.
Claim 17
Dependent Claim
52 words
An apparatus as defined in claim 14, characterized in that the first pair of coils fed by the first voltage are mounted along a first axis and the third pair of coils fed by the first voltage are mounted along a second axis, tho first axis being perpendicular to the second axis.
Claim 18
Dependent Claim
21 words
An apparatus as defined in claim 13, wherein each of said pairs of field generating means comprises a pair of electrodes.
Claim 19
Dependent Claim
21 words
An apparatus as defined in claim 13, wherein each of said pairs of field generating means comprises a pair of coils.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-08 | 1996-03-09 | 1996-09-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-08 | 2000-03-09 | 2000-09-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-08 | 2004-03-09 | 2004-09-08 | $7700.00 | Window Closed / Lapsed |