Photoelectric encoder having a grating substrate with integral light emitting elements

Claim 2

A photoelectric encoder having a main scale with a predetermined reference grating formed thereon and an index scale which is disposed in parallel with said main scale in such a manner as to be relatively movable with respect to said main scale, grating being provided on a light emission side, said photoelectric encoder comprising; a grating substrate on the light emission side composed of a plate-like laminate of semiconductor layers which have opposite polarities, a film electrode being provided on a side of said grating substrate from which light is emitted, said film electrode having slits provided therein, thus forming light emitting elements; whereby light restricted by said reference grating and said predetermined grating on the light emission side is received and an amount of relative movement between said main scale and said index scale is output.

Claim 3

A photoelectric encoder according to claim 1, wherein a surface of said grating substrate on the light emission side which does not face said reference grating is covered with a light shielding material in the form of a thin film.

Claim 4

The photoelectric encoder according to claim 1, wherein said photoelectric encoder is a three-grating type photoelectric encoder.

Claim 5

A photoelectric encoder according to claim 1, wherein said index scale is provided with a grating on a detection side which faces said grating on the light emission side through said reference grating.

Claim 6

A photoelectric encoder according to claim 4, wherein a substrate of said grating on the detection side is composed of light transmissive material, and light receiving elements are arranged at regular intervals on a surface of said grating substrate which faces said reference grating.

Claim 7

A photoelectric encoder having a main scale with a predetermined reference grating formed thereon and an index scale which is disposed in parallel with said main scale in such a manner as to be relatively movable with respect to said main scale, a grating on a light emission side and a grating on a detection side are formed, said photoelectric encoder comprising: a grating substrate on the light emission side composed of a plate-like laminate of semiconductor layers which have opposite polarities, a film electrode being provided on a side of said grating substrate from which light is emitted, said film electrode having slits provided therein, thus forming light emitting elements, light receiving elements arranged in alignment at regular intervals on one surface of said grating substrate; whereby light emitted from said light emitting elements is reflected by said reference grating on said main scale through gaps between said light receiving elements and received by said light receiving elements, and the amount of relative movement of said main scale and said index scale is output.

Claim 8

A photoelectric encoder having a main scale with a predetermined reference grating formed thereon and an index scale which is disposed in parallel with said main scale in such a manner as to be relatively movable with respect to said main scale, a grating on a light emission side and a grating on a detection side are formed, said photoelectric encoder comprising: a grating substrate on the light emission side composed of a plate-like laminate of semiconductor layers which have opposite polarities, a film electrode being provided on a side of said grating substrate from which light is emitted, said film electrode having slits provided therein, thus forming light emitting elements, light receiving elements arranged in alignment at regular intervals on one surface of said grating substrate; whereby light emitted from said light emitting elements is reflected by said reference grating on said main scale through gaps between said light receiving elements and received by said light receiving elements, and the amount of relative movement of said main scale and said index scale is output.

Claim 9

A photoelectric encoder according to claim 6, wherein a surface of said grating substrate on the light emission side which does not face said reference grating is covered with a light shielding material in the form of a thin film.

Claim 10

A photoelectric encoder according to claim 6, wherein said light receiving elements are produced by laminating semiconductor layers which have opposite polarities and providing slits at regular intervals in the thus-produced semiconductor lamination layer.

Claim 11

A photoelectric encoder according to claim 6, wherein said light receiving elements are produced by laminating semiconductor layers which have opposite polarities and providing slits at regular intervals in the thus-produced semiconductor lamination layer, and signal leading material layers are provided on a surface of each said light receiving element which faces said reference grating and on a boundary surface with said light emitting element.

Claim 12

A photoelectric encoder according to claim 6, wherein said light receiving elements are produced by laminating semiconductor layers which have opposite polarities and providing slits at regular intervals in the thus-produced semiconductor lamination layer, signal leading material layers are provided on a surface of each said light receiving element which faces said reference grating and on a boundary surface with said light emitting element, and a width of each of said slits is not less than twice the height each of said light receiving element measured from a surface of said light emitting element.