Abstract A bridging contact between internal contacts in a semiconductor integrated circuit is formed which is insulated from any connection to an intervening feature. A first dielectric layer is deposited over the contacts and the intevening feature, followed by an etch stop layer. The etch stop layer is patterned to form an etch stop mask and a second dielectric layer is deposited over the first dielectric layer and the patterned etch stop. The first and second dielectric layers are etched to form a trench opening and a pair of communicating passageways in the dielectric layers which expose the internal contacts. The etch stop mask protects and controls the vertical and horizontal dimensions of the resultant dielectric insulator that protects the intervening feature. Metal is deposited in the opening and passageways to form a bridging contact between the contacts. The bridging contact is electrically isolated from the intervening feature by the dielectric insulator remaining over and around the intervening feature.
A method of forming a bridging contact in a semiconductor integrated circuit between a pair of contacts on an internal layer separated by an intervening feature, the method comprising the steps of: depositing a first dielectric layer on the surface of the internal layer, said first dielectric layer covering the contacts and the intervening features; patterning an etch stop layer over the first dielectric layer related to the intervening feature; depositing a second dielectric layer over the first dielectric layer and the patterned etch stop layer; etching the first and second dielectric layers to form an opening in the second dielectric layer exposing the patterned etch stop layer and communicating with a pair of passageways formed in the first dielectric layer exposing the contacts; and depositing metal in the opening and passageways to form a bridging contact between the contacts.
Claim 2
Independent Claim
140 words
A method of forming a bridging contact in a semiconductor integrated circuit between a pair of contacts on an internal layer separated by an intervening feature, the method comprising the steps of: depositing a first dielectric layer on the surface of the internal layer, said first dielectric layer covering the contacts and the intervening features; patterning an etch stop layer over the first dielectric layer related to the intervening feature; depositing a second dielectric layer over the first dielectric layer and the patterned etch stop layer; etching the first and second dielectric layers to form an opening in the second dielectric layer exposing the patterned etch stop layer and communicating with a pair of passageways formed in the first dielectric layer exposing the contacts; and depositing metal in the opening and passageways to form a bridging contact between the contacts.
Claim 3
Dependent Claim
54 words
The method of claim 1 in which the step of patterning an etch stop layer further comprises the steps of: depositing the etch stop layer over the first dielectric layer; patterning a resist on the etch stop layer in the form of the opening; etching the etch stop layer; and stripping the remaining resist.