US5198634A
Expired / Lapsed
US
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Plasma contamination removal process
Assignee: Mattson Technology Inc
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Filing: 1990-05-21
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Granted: 1993-03-30
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Expires: 2010-05-21
Abstract
Abstract A unique process for the removal of organic polymer photoresist and contaminants from the surface of substrates such as semiconductor wafers is disclosed. The process uses a preferred operating power to pressure ratio (where power is measured in watts per cm 3 of plasma and pressure in torr) of less than about 0.150. Pressures of from 10 to 50 torr, and power input of from 200 to 500 watts per cathode can be used to minimize radiation damage to the substrate, and avoid the necessity of using remotely generated plasmas. Additionally, the process minimizes device contamination by post-strip residues (organic and/or inorganic), since only a deionized water rinse is required. Processing time is also reduced.
Inventors
- 👤 Brad S. Mattson
- 👤 Ralph S. Martin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 05:18
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/12; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/427; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; H10P72/00; H10P72/04; H10P72/0402
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
110 words
A plasma cleaning process for the removal of undesired materials from the surface of a substrate comprising: (a) disposing a substrate in a reaction chamber, said reaction chamber including a source of electromagnetic radiation; (b) introducing plasma forming gasses into said chamber; (c) exposing said gasses to electromagnetic radiation of sufficient power from said source to create a plasma in contact with a face of said substrate; and (d) maintaining an operating pressure in the chamber such that the ratio of the power used to create said plasma, as measured in watts per cm 3 of said plasma, to said pressure, as measured in torr, is less than about 0.150.
Claim 2
Dependent Claim
110 words
A plasma cleaning process for the removal of undesired materials from the surface of a substrate comprising: (a) disposing a substrate in a reaction chamber, said reaction chamber including a source of electromagnetic radiation; (b) introducing plasma forming gasses into said chamber; (c) exposing said gasses to electromagnetic radiation of sufficient power from said source to create a plasma in contact with a face of said substrate; and (d) maintaining an operating pressure in the chamber such that the ratio of the power used to create said plasma, as measured in watts per cm 3 of said plasma, to said pressure, as measured in torr, is less than about 0.150.
Claim 3
Dependent Claim
20 words
The process according to claim 1 wherein said power to pressure ratio is maintained in the range 0.017 to 0.150.
Claim 4
Dependent Claim
26 words
The process according to claim 1 wherein said plasma is formed using electromagnetic wave radiation at a power of from about 50 to about 500 watts.
Claim 5
Dependent Claim
23 words
The process according to claim 1 wherein said plasma is maintained at a pressure of from about 10 torr to about 50 torr.
Claim 6
Dependent Claim
22 words
The process according to claim 1 wherein said substrate is a wafer selected from the group consisting of silicon or gallium arsenide.
Claim 7
Dependent Claim
14 words
The process according to claim 4 wherein said undesired materials include a polymeric photoresist.
Claim 8
Dependent Claim
14 words
The process according to claim 1 wherein said gasses include a fluorine containing gas.
Claim 9
Dependent Claim
13 words
The process according to claim 6 wherein said photoresist is contaminated with metals.
Claim 10
Dependent Claim
17 words
The process according to claim 7 comprising the further step of rinsing said substrate in deionized water.
Claim 11
Dependent Claim
47 words
The process according to claim 1 wherein said gasses are selected from the group consisting of O 2 , N 2 O, CO 2 , O 3 , CF 4 , C 2 F 6 , C 3 F 8 , NF 3 and compatible combinations thereof.
Claim 12
Dependent Claim
21 words
The process according to claim 2 wherein said electromagnetic radiation is selected from the group consisting of UV, RF and microwave.
Claim 13
Dependent Claim
17 words
The process according to claim 1, further comprising the step of providing heat conductively to said substrate.
Claim 14
Dependent Claim
37 words
The process of claim 1, further comprising the steps of: providing a support having a principal surface on which said substrate is disposed; and locating said source of electromagnetic radiation about 10 mm from said principal surface.
Claim 15
Dependent Claim
28 words
The process of claim 1, further comprising the step of providing a second source of electromagnetic radiation, said second source being located adjacent the source of electromagnetic radiation.
Claim 16
Dependent Claim
20 words
The process of claim 1, wherein said gasses are provided via a passage formed in said source of electromagnetic radiation.
Claim 17
Dependent Claim
110 words
A wafer photoresist plasma cleaning method comprising the steps of: (a) disposing a wafer in a reaction chamber including a source of electromagnetic radiation; (b) introducing plasma forming gasses into said chamber in a space between said source and a surface of said wafer which has been layered with polymeric photoresist; and (c) exposing said gasses to electromagnetic radiation of sufficient power to generate a plasma in contact with said face of said wafer while maintaining an operating pressure and power input such that the ratio of power input, as measured in watts per cm 3 of said plasma, to pressure, as measured in torr, is less than about 0.150.
Claim 18
Dependent Claim
110 words
A wafer photoresist plasma cleaning method comprising the steps of: (a) disposing a wafer in a reaction chamber including a source of electromagnetic radiation; (b) introducing plasma forming gasses into said chamber in a space between said source and a surface of said wafer which has been layered with polymeric photoresist; and (c) exposing said gasses to electromagnetic radiation of sufficient power to generate a plasma in contact with said face of said wafer while maintaining an operating pressure and power input such that the ratio of power input, as measured in watts per cm 3 of said plasma, to pressure, as measured in torr, is less than about 0.150.
Claim 19
Dependent Claim
22 words
The process according to claim 16 wherein said ratio of power to pressure is maintained in the range of 0.017 to 0.150.
Claim 20
Dependent Claim
24 words
The process according to claim 16 wherein said plasma is formed using radiation at a power of from about 50 to about 500 watts.
Claim 21
Dependent Claim
22 words
The process according to claim 16 wherein said plasma is maintained at a pressure of from about 10 to about 50 torr.
Claim 22
Dependent Claim
24 words
The process according to claim 16 wherein said wafer is formed of a material selected from the group consisting of silicon and gallium arsenide.
Claim 23
Dependent Claim
14 words
The process according to claim 18 wherein said gasses include a fluorine containing gas.
Claim 24
Dependent Claim
13 words
The process according to claim 20 wherein said photoresist is contaminated with metals.
Claim 25
Dependent Claim
17 words
The process according to claim 21 comprising the further step of rinsing said substrate in deionized water.
Claim 26
Dependent Claim
47 words
The process according to claim 16 wherein said gasses are selected from the group consisting of O 2 , N 2 O, CO 2 , O 3 , CF 4 , C 2 F 6 , C 3 F 8 , NF 3 and compatible combinations thereof.
Claim 27
Dependent Claim
20 words
The process according to claim 17 wherein said radiation is selected from the group consisting of UV, RF and microwave.
Claim 28
Independent Claim
90 words
An apparatus adapted for the removal of undesired materials from the surface of a substrate comprising: an electrically isolated and conductive support for the substrate, said support having a principal surface on which said substrate is disposed; a source of electromagnetic radiation located about 10 mm from said principal surface, said source defining a passage; means for providing gas to said passage, wherein said electromagnetic radiation creates from said gas a plasma in contact with a face of said substrate; and a reaction chamber housing said support and said source.
Claim 29
Independent Claim
90 words
An apparatus adapted for the removal of undesired materials from the surface of a substrate comprising: an electrically isolated and conductive support for the substrate, said support having a principal surface on which said substrate is disposed; a source of electromagnetic radiation located about 10 mm from said principal surface, said source defining a passage; means for providing gas to said passage, wherein said electromagnetic radiation creates from said gas a plasma in contact with a face of said substrate; and a reaction chamber housing said support and said source.
Claim 30
Dependent Claim
12 words
The device of claim 26, further comprising means for heating said support.
Claim 31
Dependent Claim
18 words
The device of claim 26, further comprising a second source of electromagnetic radiation located adjacent to said source.
Claim 32
Dependent Claim
15 words
The device of claim 26, wherein said source has a diameter of about 225 mm.
Claim 33
Dependent Claim
13 words
The device of claim 26, wherein said principal surface is rectangular in shape.
Claim 34
Independent Claim
173 words
An apparatus adapted for the removal of undesired materials from the surface of a substrate comprising: an electrically isolated and conductive support for the substrate, said substrate having a rectangular principal surface on which said substrate is disposed; means for conductively heating said support; a first source of electromagnetic radiation located about 10 mm from said principal surface, said source defining a first passage; a second source of electromagnetic radiation located adjacent to said first source, and defining a second passage; means for delivering gas to said first and second passages, wherein the electromagnetic radiation from said first and second sources creates a plasma in contact with a face of said substrate from respectively the gas delivered to said first and second passages; and a reaction chamber housing said first and second sources and said support; wherein a ratio of the power used to create said plasma, as measured in watts per cm 3 of said plasma, to an operating pressure in said chamber, as measured in torr, is less than about 0.150.
Claim 35
Independent Claim
173 words
An apparatus adapted for the removal of undesired materials from the surface of a substrate comprising: an electrically isolated and conductive support for the substrate, said substrate having a rectangular principal surface on which said substrate is disposed; means for conductively heating said support; a first source of electromagnetic radiation located about 10 mm from said principal surface, said source defining a first passage; a second source of electromagnetic radiation located adjacent to said first source, and defining a second passage; means for delivering gas to said first and second passages, wherein the electromagnetic radiation from said first and second sources creates a plasma in contact with a face of said substrate from respectively the gas delivered to said first and second passages; and a reaction chamber housing said first and second sources and said support; wherein a ratio of the power used to create said plasma, as measured in watts per cm 3 of said plasma, to an operating pressure in said chamber, as measured in torr, is less than about 0.150.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-03-29 | 1996-09-28 | 1997-03-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-03-29 | 2000-09-28 | 2001-03-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-03-29 | 2004-09-28 | 2005-03-30 | $7700.00 | Window Closed / Lapsed |