US5199918A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming field emitter device with diamond emission tips
Assignee: Applied Nanotech Holdings Inc
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Filing: 1991-11-07
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Granted: 1993-04-06
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Expires: 2011-11-07
Abstract
Abstract A field emitter device comprising a conductive metal and a diamond emission tip with negative electron affinity in ohmic contact with and protruding above the metal. The device is fabricated by coating a substrate with an insulating diamond film having negative electron affinity and a top surface with spikes and valleys, depositing a conductive metal on the diamond film, and applying an etch to expose the spikes without exposing the valleys, thereby forming diamond emission tips which protrude a height above the conductive metal less than the mean free path of electrons in the diamond film.
Inventors
- 👤 Nalin Kumar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 05:43
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H01J2201/00; H01J2201/30; H01J2201/304; H01J2201/30403; H01J2201/30446; H01J2201/30453; H01J2201/30457
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
74 words
A method of fabricating a field emitter device, comprising the following steps in the sequence set forth: providing a substrate; coating said substrate with a diamond film having negative electron affinity and a top surface with spikes and valleys; depositing a conductive metal on said diamond film; and etching the conductive metal to expose the portions of said spikes without exposing said valleys, thereby forming diamond emission tips which protrude above said conductive metal.
Claim 2
Independent Claim
74 words
A method of fabricating a field emitter device, comprising the following steps in the sequence set forth: providing a substrate; coating said substrate with a diamond film having negative electron affinity and a top surface with spikes and valleys; depositing a conductive metal on said diamond film; and etching the conductive metal to expose the portions of said spikes without exposing said valleys, thereby forming diamond emission tips which protrude above said conductive metal.
Claim 3
Dependent Claim
31 words
The method of claim 1 with said emission tips being insulating and protruding above said conductive metal a height less than the mean free path of electrons in said diamond film.
Claim 4
Dependent Claim
17 words
The method of claim 1 with said conductive metal forming an ohmic contact with said diamond film.
Claim 5
Dependent Claim
23 words
The method of claim 3 further comprising the step of annealing said diamond film and conductive metal to form said ohmic contact therebetween.
Claim 6
Dependent Claim
13 words
The method of claim 1 with said diamond film having a (111) orientation.
Claim 7
Dependent Claim
14 words
The method of claim 1 with said diamond film deposited by chemical vapor deposition.
Claim 8
Dependent Claim
12 words
The method of claim 1 with said etching performed by ion milling.
Claim 9
Dependent Claim
13 words
The method of claim 1 with said conductive metal being titanium or tungsten.
Claim 10
Dependent Claim
32 words
The method of claim 1 further comprising a plurality of said emission tips with heights above said conductive metal no larger than 50 angstroms and spaced by no more than one micron.
Claim 11
Dependent Claim
28 words
The method of claim 1 further comprising applying a voltage of no greater than 5 volts to said conductive metal, thereby causing field emission from said emission tips.
Claim 12
Independent Claim
115 words
A method of fabricating a field emitter device, comprising the steps of: providing a substrate; depositing an insulating diamond film on said substrate, said diamond film having a negative electron affinity and a top surface with spikes and valleys; depositing a layer of conductive metal on said diamond film; etching said conductive metal to cause portions of said conductive metal above said spikes to be removed to expose the tops of said spikes without exposing said valleys, thereby forming diamond emission tips which extend above said conductive metal a height less than the mean free path of electrons in said diamond film; and forming an ohmic contact between said conductive metal and said diamond film.
Claim 13
Independent Claim
115 words
A method of fabricating a field emitter device, comprising the steps of: providing a substrate; depositing an insulating diamond film on said substrate, said diamond film having a negative electron affinity and a top surface with spikes and valleys; depositing a layer of conductive metal on said diamond film; etching said conductive metal to cause portions of said conductive metal above said spikes to be removed to expose the tops of said spikes without exposing said valleys, thereby forming diamond emission tips which extend above said conductive metal a height less than the mean free path of electrons in said diamond film; and forming an ohmic contact between said conductive metal and said diamond film.
Claim 14
Dependent Claim
14 words
The method of claim 11 with said height between approximately 10 to 100 angstroms.
Claim 15
Dependent Claim
13 words
The method of claim 11 with said conductive metal being tungsten or titanium.
Claim 16
Dependent Claim
20 words
The method of claim 11 further comprising annealing said diamond to said conductive metal to form said ohmic contact therebetween.
Claim 17
Dependent Claim
19 words
The method of claim 14 with said annealing performed at a temperature between approximately 400° C. to 500° C.
Claim 18
Independent Claim
102 words
A method of fabricating a field emitter device, comprising the following steps in the sequence set forth: providing a substrate; applying chemical vapor deposition to coat said substrate with an insulating diamond film having a (111) orientation, negative electron affinity and a top surface with spikes and valleys; sputter depositing a conductive metal on said diamond film; and applying ion milling to etch said conductive metal to expose the tops of said spikes without exposing said valleys to form emission tips which protrude above the non-etched conductive metal a height less than the mean free path of electrons in said diamond film.
Claim 19
Independent Claim
102 words
A method of fabricating a field emitter device, comprising the following steps in the sequence set forth: providing a substrate; applying chemical vapor deposition to coat said substrate with an insulating diamond film having a (111) orientation, negative electron affinity and a top surface with spikes and valleys; sputter depositing a conductive metal on said diamond film; and applying ion milling to etch said conductive metal to expose the tops of said spikes without exposing said valleys to form emission tips which protrude above the non-etched conductive metal a height less than the mean free path of electrons in said diamond film.
Claim 20
Dependent Claim
21 words
The method of claim 16 further comprising annealing said conductive metal with said diamond film to form said ohmic contact therebetween.
Claim 21
Dependent Claim
12 words
The method of claim 17 with said metal being titanium or tungsten.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-04-05 | 1996-10-05 | 1997-04-06 | $2000.00 | Window Closed / Lapsed |
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