Spectoscopic sampling accessory having dual measuring and viewing systems

Claim 2

A microspectrometer accessory, comprising: a viewing system occupying a first segment of a sample aperture, the viewing system projecting an image of an observation area of a specimen plane to a remote visual image at a viewing magnification, and a spectroscopic measuring system occupying a second segment of the sample aperture that is separate from the first segment, the spectroscopic measuring system comprising at least a first set of identical symmetrical aberration canceling imaging mirror optics that map the specimen plane with at least a first remote focus, the specimen plane including a measuring area, the spectroscopic measuring system having a specimen magnification that is less than the viewing magnification, and the measuring area being smaller than the observation area.

Claim 3

A microspectrometer accessory as claimed in claim 1, wherein the spectroscopic measuring system comprises: a reflectance subsystem in which the spectroscopic measuring system maps the specimen plane with the remote focus, and a transmittance subsystem in which the spectroscopic measuring system maps a second remote focus with the specimen plane.

Claim 4

A microspectrometer accessory as claimed in claim 1, further comprising at least a first mask positioned at the remote focus to delimit the measuring area.

Claim 5

A microspectrometer accessory as claimed in claim 2, wherein the spectroscopic measuring system has a numerical aperture at the specimen plane in the range of 0.8 -0.95.

Claim 6

A microspectrometer accessory as claimed in claim 2, further comprising a second mask at the second remote focus.

Claim 7

A microspectrometer accessory as claimed in claim 2, wherein the reflectance and transmittance subsystems share at least a part of a common output aperture.

Claim 8

A microspectrometer accessory as claimed in claim 1, wherein the first set of identical symmetrical aberration canceling imaging mirror optics comprise parabolic mirrors.

Claim 9

A microspectrometer accessory as claimed in claim 2, wherein both the reflectance and transmission subsystems comprise at least first and second pairs of identical symmetrical aberration canceling imaging mirror optics.

Claim 10

A microspectrometer accessory as claimed in claim 1, wherein the spectroscopic measuring system comprises a transmission subsystem which includes the first set of identical symmetrical aberration canceling imaging mirror optics and a second st of identical symmetrical aberration canceling imaging mirror optics, the transmission subsystem transmitting radiant energy through the specimen plane, the second set of identical symmetrical aberration canceling imaging mirror optics forming a second remote focus, and the first set of identical symmetrical aberration canceling imaging mirror optics having a first hole through which visible light form the specimen plane can pass, the spectroscopic measuring system further comprising at least one mask at least one of the first or second remote foci, the spectroscopic measuring system further comprising a reflectance subsystem which includes the first set of identical symmetrical aberration canceling imaging mirror optics, the reflectance subsystem multiplexing incident and reflected radiant energy by having half of a beam of each occupy separate segments of the first set in a reflectance mode, and the viewing system comprises a binocular viewer which receives the visible light via the first hole in the first set of identical symmetrical aberration canceling imaging mirror optics.

Claim 11

A microspectrometer accessory as claimed in claim 9, wherein the hole in the first set of identical symmetrical aberration canceling imaging mirror optics forms less than a right angle with the specimen plane.

Claim 12

A microspectrometer accessory as claimed in claim 10, wherein the hole forms an angle of 5 degrees with respect to a right angle with the specimen plane.

Claim 15

A method of spectroscopic measuring as claimed in claim 12, wherein the radiant energy is infrared radiant energy.

Claim 16

A method of spectroscopic measuring as claimed in claim 12, wherein substantially an entire beam of radiant energy is supplied to the first segment.

Claim 17

A method of spectroscopic measuring as claimed in claim 12, wherein the imaging mirror optic comprises identical symmetrical aberration canceling imaging mirrors.

Claim 18

A method of spectroscopic measuring as claimed in claim 13, further comprising producing a spectrum from the infrared radiant energy.

Claim 19

A method of spectroscopic measuring as claimed in claim 15, wherein the first or second segments are large enough to give the imaging mirror optic a numerical aperture in the range of 0.8-0.95.

Claim 20

An accessory for multiplexing spectroscopic measuring using a spectrometer, comprising: an imaging mirror objective having an input aperture, an output aperture and mapping a remote focus at a specimen plane with at least one remote focus, a supply of a first type of radiant energy to a first segment of the input aperture, a first optical system occupying a first segment of the output aperture, a second optical system occupying a second segment of the output aperture that is separate from the first segment, and a detector for the spectrometer, the detector being a part of at least one of the optical systems.

Claim 21

An accessory for multiplexing spectroscopic measuring using a spectrometer, comprising: an imaging mirror objective having an input aperture, an output aperture and mapping a remote focus at a specimen plane with at least one remote focus, a supply of a first type of radiant energy to a first segment of the input aperture, a first optical system occupying a first segment of the output aperture, a second optical system occupying a second segment of the output aperture that is separate from the first segment, and a detector for the spectrometer, the detector being a part of at least one of the optical systems.

Claim 22

An accessory for multiplexing spectroscopic measuring as claimed in claim 18, wherein the mirror objective comprises identical symmetrical aberration canceling imaging mirrors.

Claim 23

An accessory for multiplexing spectroscopic measuring as claimed in claim 18, further comprising a supply of a second type of radiant energy to a second segment of the input aperture that is separate from the first segment of the input aperture.

Claim 24

An accessory for multiplexing spectroscopic measuring as claimed in claim 20, wherein the mirror objective comprises identical symmetrical aberration canceling imaging mirrors.

Claim 25

An accessory for multiplexing spectroscopic measuring as claimed in claim 18, wherein at least one of the first or second optical systems supplies at least one of the types of radiant energy to the detector for an infrared spectrometer.

Claim 26

An accessory for multiplexing spectroscopic measuring using a spectrometer, comprising: a imaging mirror objective having an input aperture, an output aperture and mapping a specimen plane with at least one remote focus, a supply of a first type of radiant energy to a first segment of the input aperture, a supply of a second type of radiant energy to a second segment of the input aperture that is separated from the first segment, a first optical system occupying a first segment of the output aperture, and a detector for the spectrometer, the detector being a part of at least the first optical system.

Claim 27

An accessory for multiplexing spectroscopic measuring using a spectrometer, comprising: a imaging mirror objective having an input aperture, an output aperture and mapping a specimen plane with at least one remote focus, a supply of a first type of radiant energy to a first segment of the input aperture, a supply of a second type of radiant energy to a second segment of the input aperture that is separated from the first segment, a first optical system occupying a first segment of the output aperture, and a detector for the spectrometer, the detector being a part of at least the first optical system.

Claim 28

An accessory for multiplexing spectroscopic measuring as claimed in claim 23, wherein the mirror imaging objective comprises identical symmetrical aberration canceling imaging mirrors.

Claim 29

An accessory for multiplexing spectroscopic measuring as claimed in claim 23, wherein the detector is for an infrared spectrometer.

Claim 30

An accessory for multiplexing spectroscopic measuring using a spectrometer, comprising at least one set of identical symmetrical aberration canceling imaging mirrors having an aperture that occupies at least a segment of a sample aperture about a sample, the one set of identical symmetrical aberration canceling imaging mirrors mapping a remote focus with a specimen plane, the identical symmetrical imaging mirrors having first and second segments, the first segment being separate from the second segment, a supply of more than half of a beam of radiant energy to the first segment, and an output which directs from the second segment substantially all of the radiant energy from the first segment that is specularly reflected at the specimen plane to a detector for a spectrometer.

Claim 31

An accessory for multiplexing spectroscopic measuring using a spectrometer, comprising at least one set of identical symmetrical aberration canceling imaging mirrors having an aperture that occupies at least a segment of a sample aperture about a sample, the one set of identical symmetrical aberration canceling imaging mirrors mapping a remote focus with a specimen plane, the identical symmetrical imaging mirrors having first and second segments, the first segment being separate from the second segment, a supply of more than half of a beam of radiant energy to the first segment, and an output which directs from the second segment substantially all of the radiant energy from the first segment that is specularly reflected at the specimen plane to a detector for a spectrometer.

Claim 32

An accessory for multiplexing spectroscopic measuring as claimed in claim 26, wherein the identical symmetrical aberration canceling imaging mirrors have at least a third segment which receives at least a second beam of radiant energy, the third segment being separate from the first and second segments.

Claim 33

An accessory for multiplexing spectroscopic measuring as claimed in claim 27, wherein the first beam of radiant energy comprises infrared energy and the second beam of radiant energy comprises visible light.

Claim 36

A method of multiplexing spectroscopic measuring as claimed in claim 29, further comprising producing an infrared spectrum.

Claim 37

A method of multiplexing spectroscopic measuring as claimed in claim 29, further comprising simultaneously supplying a second type of radiant energy to a second segment of the input aperture, and simultaneously delimiting the measuring area on the specimen plane at the remote focus using the second type of radiant energy.

Claim 38

A method of multiplexing spectroscopic measuring as claimed in claim 31, further comprising obtaining an infrared spectrum of at least one type of radiant energy from at least one of the segments of the output aperture.

Claim 41

A method of multiplexing spectroscopic measuring as claimed in claim 33, further comprising obtaining an infrared spectrum.